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    • 24. 发明授权
    • Quartz damage repair method for high-end mask
    • 石英损伤修复方法为高档面膜
    • US06555277B1
    • 2003-04-29
    • US10134822
    • 2002-04-26
    • Same-Ting ChenTzy-Ying LinWen-Rong Huang
    • Same-Ting ChenTzy-Ying LinWen-Rong Huang
    • G03F900
    • G03F1/72
    • In accordance with the objectives of the invention a new method is provided for repairing photolithographic exposure masks. The invention uses an etch function of a conventional mask repair tool. The invention addresses defects that occur in a pattern of opaque material (such as chrome) created over the surface of an exposure mask whereby an (undesired) opening exists in the opaque material. The invention uses a focused E-beam exposure of the surface of the exposure mask to purposely “damage” this surface over the area where the opaque material is required to be present. Repair accuracy is in this manner easy to control, the conventional problem of peeling of the opaque or light sensitive material is eliminated.
    • 根据本发明的目的,提供了一种用于修复光刻曝光掩模的新方法。 本发明使用常规掩模修复工具的蚀刻功能。 本发明解决了在曝光掩模的表面上产生的不透明材料(例如铬)的图案中发生的缺陷,由此在不透明材料中存在(不期望的)开口。 本发明使用曝光掩模的表面的聚焦电子束曝光来有目的地在要求存在不透明材料的区域上“损坏”该表面。 以这种方式易于控制的修复精度,消除了不透明或光敏材料剥离的常规问题。
    • 25. 发明授权
    • Fabrication of static-alignment fiber-guiding grooves for planar
lightwave circuits
    • 用于平面光波电路的静态取向光纤引导槽的制造
    • US5471552A
    • 1995-11-28
    • US391850
    • 1995-02-22
    • Dong-Sing WuuTzung-Rue HsiehTzy-Ying LinHong-Ming Chen
    • Dong-Sing WuuTzung-Rue HsiehTzy-Ying LinHong-Ming Chen
    • G02B6/12G02B6/136G02B6/30G02B6/36G02B6/10
    • G02B6/3636G02B6/136G02B6/30G02B2006/12097G02B2006/121G02B6/3652G02B6/3692Y10S438/97
    • A method for fabricating planar lightwave circuits with at least one static-alignment fiber-guiding groove comprising the steps of: (a) fabricating a sandwiched Si-substrate by forming an etching stop layer on a first Si layer, followed by forming a second Si layer on the etching stop layer; (b) forming a waveguide layer on the Si-substrate, the waveguide layer containing at least one planar waveguide channel buried between a first cladding layer and a second cladding layer; (c) forming a photomask on the waveguide layer so as to allow the fiber-guiding grooves to be fabricated; (d) using the photomask and a first reactive ion etching procedure to form a first portion of the fiber-guiding groove, the first reactive ion etching procedure is controlled such that it etches through the waveguide layer and stops at the second Si layer; and (e) using the photomask and a second reactive ion etching procedure to form a second portion of the fiber-guiding groove, wherein the second reactive etching ion is selected in such a manner that the second reactive ion etching procedure etches only through the second Si layer and stops at the interface between the second Si layer and the etching stop layer. In a preferred embodiment, the etching stop layer comprises a glass material which is resistant to the second reactive etching ion, the fiber-guiding groove is a U-shaped groove, and the waveguide channel has a refractive index which differs from that of the first and second cladding layers by about 0.25%. The etching stop layer provides precise depth control and ensures the repeatibility of light coupling efficiency between the optical fiber and the waveguide, a critical element in lightwave circuits.
    • 一种用于制造具有至少一个静态取向光纤导引槽的平面光波电路的方法,包括以下步骤:(a)通过在第一Si层上形成蚀刻停止层,然后形成第二Si 蚀刻停止层上的层; (b)在所述Si衬底上形成波导层,所述波导层包含至少一个掩埋在第一覆层和第二覆层之间的平面波导沟道; (c)在波导层上形成光掩模,以便制造光纤引导槽; (d)使用光掩模和第一反应离子蚀刻步骤形成纤维引导槽的第一部分,控制第一反应离子蚀刻步骤,使其蚀刻穿过波导层并停止在第二Si层; 和(e)使用光掩模和第二反应离子蚀刻程序形成纤维引导槽的第二部分,其中第二反应蚀刻离子以这样的方式选择,使得第二反应离子蚀刻步骤仅通过第二反应离子蚀刻步骤 Si层并停止在第二Si层和蚀刻停止层之间的界面处。 在优选实施例中,蚀刻停止层包括耐第二反应蚀刻离子的玻璃材料,纤维导向槽是U形槽,并且波导通道的折射率不同于第一反应蚀刻离子的折射率 和第二覆层约0.25%。 蚀刻停止层提供精确的深度控制,并确保光纤和波导之间的光耦合效率的重复性,这是光波电路中的关键元件。