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21. 发明授权

US07482737B2 Aluminum nitride thin film, composite film containing the same and piezoelectric thin film resonator using the same 有权
标题翻译：氮化铝薄膜，含有其的复合膜和使用其的压电薄膜谐振器
公开(公告)号：US07482737B2
公开(公告)日：2009-01-27
申请号：US11546765
申请日：2006-10-12
申请人： Tetsuo Yamada , Keigo Nagao , Eiji Masui
发明人： Tetsuo Yamada , Keigo Nagao , Eiji Masui
IPC分类号： H03H9/125
CPC分类号： H03H9/585 , H01L41/0477 , H03H3/02 , H03H9/02031 , H03H9/13 , H03H9/173 , H03H9/174 , H03H2003/021 , H03H2003/023
摘要： A piezoelectric thin film resonator has a substrate and a piezoelectric layered structure including a lower electrode, piezoelectric aluminum nitride thin film with c-axis orientation and upper electrode formed on the substrate in this order. The lower electrode are made of a metal thin film including a layer containing ruthenium as a major component having a full-width half maximum (FWHM) of a rocking curve of a (0002) diffraction peak of ruthenium of 3.0° or less. The piezoelectric aluminum nitride thin film formed on the lower electrode has a full-width half maximum (FWHM) of a rocking curve of a (0002) diffraction peak of 2.0° or less.
摘要翻译：压电薄膜谐振器具有基板和压电层叠结构，其包括下电极，具有c轴取向的压电氮化铝薄膜和在基板上依次形成的上电极。下电极由包含钌作为主要成分的层的金属薄膜制成，其中钌的（0002）钌衍射峰的摇摆曲线的全宽度半峰值（FWHM）为3.0°以下。形成在下电极上的压电氮化铝薄膜具有2.0°以下的（0002）衍射峰的摇摆曲线的全宽半最大值（FWHM）。

22. 发明申请

US20070007852A1 Boundary acoustic wave device 有权
标题翻译：边界声波装置
公开(公告)号：US20070007852A1
公开(公告)日：2007-01-11
申请号：US10597115
申请日：2004-12-27
申请人： Hajime Kando
发明人： Hajime Kando
IPC分类号： H03H9/125
CPC分类号： H03H9/0222
摘要： A dielectric substance is laminated on one surface of a piezoelectric substance, and an IDT and reflectors are disposed as electrodes at a boundary between the piezoelectric substance and the dielectric substance, and the thickness of the electrodes is determined so that the acoustic velocity of the Stoneley wave is decreased less than that of a slow transverse wave propagating through the dielectric substance and that of a slow transverse wave propagating through the piezoelectric substance, thereby forming a boundary acoustic wave device.
摘要翻译：电介质被层叠在压电体的一个表面上，IDT和反射器被设置在压电体与电介质之间的边界处的电极上，电极的厚度被确定为使得Stoneley的声速波的频率比通过介电物质传播的慢横波的波形减小，而通过压电物质传播的慢横波的波形减小，从而形成声界面波装置。

23. 发明授权

US06979933B2 Apparatus and method for charging and discharging a capacitor 失效
标题翻译：用于对电容器充电和放电的装置和方法
公开(公告)号：US06979933B2
公开(公告)日：2005-12-27
申请号：US10621797
申请日：2003-07-17
申请人： Mark Oudshoorn , Donald Vanderslius
发明人： Mark Oudshoorn , Donald Vanderslius
IPC分类号： H01L41/04 , H02M3/335 , H02M3/338 , H03H9/125 , H02N2/00 , H03H9/13
CPC分类号： H02M3/3353 , H01L41/042 , H02M3/338
摘要： An apparatus for electrically stimulating a smart material includes a controllable power source for charging the smart material and/or switching circuitry for discharging the smart material. The controllable power source includes a regulated DC to DC converter having controllable drive circuitry associated therewith. The drive circuitry can be self-oscillating through associated feedback means. The switching circuitry can be responsive to one or more control signals.
摘要翻译：用于电刺激智能材料的装置包括用于对智能材料进行充电的可控电源和/或用于释放智能材料的开关电路。可控电源包括具有与其相关联的可控驱动电路的稳压DC-DC转换器。驱动电路可以通过相关联的反馈装置自振荡。开关电路可以响应于一个或多个控制信号。

24. 发明授权

US5825262A Ladder filter with piezoelectric resonators each having a plurality of layers with internal electrodes 失效
标题翻译：具有压电谐振器的梯形滤波器，每个具有多个具有内部电极的层
公开(公告)号：US5825262A
公开(公告)日：1998-10-20
申请号：US846296
申请日：1997-04-30
申请人： Jiro Inoue , Toshihiko Unami , Tetsuo Takeshima
发明人： Jiro Inoue , Toshihiko Unami , Tetsuo Takeshima
IPC分类号： H03H9/17 , H01L41/083 , H03H20060101 , H03H9/10 , H03H9/125 , H03H9/15 , H03H9/205 , H03H9/54 , H03H9/58 , H03H9/60
CPC分类号： H03H9/178 , H03H9/605
摘要： A ladder type filter achieves a substantial reduction in distortion in filtering characteristics. The ladder type filter includes a supporting substrate formed of an insulating material. Supporting members are attached to lands which are formed by portions of pattern electrodes disposed on the supporting substrate. A plurality of piezoelectric resonators are mounted on the supporting members and connected in a ladder arrangement to define a ladder type filter. Each piezoelectric resonator has a base member in which piezoelectric layers and internal electrodes are laminated. External electrodes formed on one side surface of the base member are connected to the internal electrodes disposed in the base member. The width w and the thickness t of the piezoelectric resonators and the number n of laminated layers each comprising one of the piezoelectric layers and one of the internal electrodes disposed adjacent to the corresponding piezoelectric layer are selected so as to satisfy 1.ltoreq.log.sub.10 (n.sup.2 wt).ltoreq.3.
摘要翻译：梯形滤波器实现滤波特性的失真的显着降低。梯型过滤器包括由绝缘材料形成的支撑衬底。支撑构件附接到由设置在支撑基板上的图案电极的部分形成的平台。多个压电谐振器安装在支撑构件上并且以梯形结构连接以限定梯形滤波器。每个压电谐振器具有层压压电层和内部电极的基底部件。形成在基体的一个侧表面上的外部电极连接到设置在基底构件中的内部电极。选择压电谐振器的宽度w和厚度t以及每个包括一个压电层和与相应的压电层相邻布置的一个内部电极的层压层的数量n，使得满足1≤log10（ n2wt）

25. 发明授权

US5640133A Capacitance based tunable micromechanical resonators 失效
标题翻译：基于电容的可调谐微机械谐振器
公开(公告)号：US5640133A
公开(公告)日：1997-06-17
申请号：US494024
申请日：1995-06-23
申请人： Noel C. MacDonald , Fred M. Bertsch , Kevin A. Shaw , Scott G. Adams
发明人： Noel C. MacDonald , Fred M. Bertsch , Kevin A. Shaw , Scott G. Adams
IPC分类号： H03H9/125 , H02N1/00 , H03H9/02 , H03H9/205 , H03H9/24 , H03H9/46
CPC分类号： H03H9/02425 , H02N1/008 , H03H9/02417 , H03H9/46 , H03H2009/02496
摘要： A tunable electromicromechanical resonator structure incorporates an electrostatic actuator which permits reduction or enhancement of the resonant frequency of the structure. The actuator consists of two sets of opposed electrode fingers, each set having a multiplicity of spaced, parallel fingers. One set is mounted on a movable portion of the resonator structure and one set is mounted on an adjacent fixed base on substrate, with the fingers in opposed relationship and their adjacent ends spaced apart by a gap. An adjustable bias voltage across the sets of electrodes adjusts the resonant frequency of the movable structure.
摘要翻译：可调电动机械谐振器结构包括静电致动器，其允许减小或增强结构的谐振频率。致动器由两组相对的电极指组成，每组具有多个间隔开的平行指状物。一组安装在谐振器结构的可移动部分上，一组安装在基板上的相邻的固定基座上，指状物处于相对关系，并且其相邻端部间隔开间隙。两组电极之间的可调偏压调节可移动结构的谐振频率。

26. 发明授权

US4433264A Electrode structure for a zinc oxide thin film 失效
标题翻译：氧化锌薄膜的电极结构
公开(公告)号：US4433264A
公开(公告)日：1984-02-21
申请号：US500828
申请日：1983-06-03
申请人： Hiroshi Nishiyama , Takeshi Nakamura
发明人： Hiroshi Nishiyama , Takeshi Nakamura
IPC分类号： H03H9/17 , H03H9/125 , H03H9/13 , H03H9/21 , H01L41/08
CPC分类号： H03H9/21 , H01L41/29 , H03H9/131
摘要： An electrode structure for a zinc oxide thin film having a SnO.sub.2 layer between the surface of the zinc oxide thin film and the electrode. A tuning fork vibrator equipped with such a structure has a high reliability in that changes in resonance frequency and insulation resistance (IR) with time are small and the increase in series resonance resistance (R.sub.O) is small.
摘要翻译：一种在氧化锌薄膜的表面和电极之间具有SnO 2层的氧化锌薄膜的电极结构。具有这种结构的音叉振子具有高的可靠性，因为谐振频率和绝缘电阻（IR）随时间的变化小，并且串联谐振电阻（RO）的增加很小。

27. 发明授权

US4396895A Multiple resonant electromechanical filters using edge-mode vibration of a long piezoelectric plate 失效
标题翻译：使用长压电板的边缘模式振动的多谐振机电滤波器
公开(公告)号：US4396895A
公开(公告)日：1983-08-02
申请号：US266073
申请日：1981-05-21
申请人： Hiroshi Shimizu , Yuji Iseki , Hiroshi Watanabe
发明人： Hiroshi Shimizu , Yuji Iseki , Hiroshi Watanabe
IPC分类号： H03H9/125 , H03H9/50 , H03H9/58 , H03H9/15 , H03H9/60
CPC分类号： H03H9/581
摘要： A multimode piezoelectric mechanical filter using edge-mode piezoelectric transducers, each comprising a semi-infinite or long piezoelectric plate polarized in the thickness direction, and a pair of exciting electrodes formed on the plate at an end portion thereof. Input and output edge-mode transducers are supported at their other ends together with optional resonator elements. The transducer and/or resonator elements are mechanically coupled with one another by a coupling rod at their end portions opposite the support to transmit the edge-mode vibration from one to the other. All of the transducers and resonator elements may be disposed in a common plane and may be integrally formed by punching a single piezoelectric plate to form a monolithic type mechanical filter. In such monolithic type filter, coupling rods are also integrally formed with the transducers and resonators. Alternatively, the transducer regions and/or resonator regions are separated and defined by a slit or slits formed in a large square piezoelectric plate, the bottom portion of each slit being usable as the mechanical coupling.
摘要翻译：使用边缘模式压电换能器的多模压电机械滤波器，每个包括在厚度方向上偏振的半无限长或长的压电板，以及在其端部形成在板上的一对激励电极。输入和输出边缘模式换能器在其另一端与可选的谐振元件一起支持。传感器和/或谐振器元件通过联接杆在与支撑件相对的端部处彼此机械耦合以将边缘模式振动从一个传递到另一个。所有换能器和谐振器元件可以设置在共同的平面中，并且可以通过冲压单个压电板来一体地形成以形成整体式机械过滤器。在这种单片式过滤器中，联接杆也与换能器和谐振器一体地形成。或者，换能器区域和/或谐振器区域由形成在大方形压电板中的狭缝或狭缝分隔和限定，每个狭缝的底部可用作机械耦合。

28. 发明授权

US4392115A Volume magnetostatic wave device 失效
标题翻译：体积静磁波装置
公开(公告)号：US4392115A
公开(公告)日：1983-07-05
申请号：US253268
申请日：1981-04-13
申请人： Gerard Volluet , Pierre Hartemann
发明人： Gerard Volluet , Pierre Hartemann
IPC分类号： H01P1/00 , H01P3/00 , H01P9/00 , H03H2/00 , H03H9/125 , H03B5/00 , H03H9/38
CPC分类号： H03H2/001
摘要： The volume magnetostatic wave device comprises a unidirectional-radiation transducer composed of equidistant microstrips connected to a polyphase transformer and coupled to a ferrimagnetic wafer which is subjected to a polarizing magnetic field.
摘要翻译：体积静磁波装置包括由连接到多相变压器的等距微带组成的单向辐射传感器，并耦合到经受极化磁场的铁磁晶片。

29. 发明授权

US4282498A Circuit package 失效
标题翻译：电路封装
公开(公告)号：US4282498A
公开(公告)日：1981-08-04
申请号：US77519
申请日：1979-09-20
申请人： Nobutsugu Iizawa
发明人： Nobutsugu Iizawa
IPC分类号： H01L23/04 , H01L23/02 , H03B5/32 , H03H9/02 , H03H9/05 , H03H9/125 , H03H9/10
CPC分类号： H03H9/0542 , H03B5/32 , H03H9/0595
摘要： A circuit package wherein a framed resonator leaf is mounted in a recessed portion of a plastic body. The contours of the recess orient and support the resonator frame, and an electrically conductive adhesive both bonds the resonator frame to the body and electrically connects the resonator to lead electrodes embedded in the body. A circuit chip element electrically connected to the lead electrodes is also embedded in the body to provide an integral circuit package. A cover over the recess, bonded to the body, protects the resonator element. Welded connections and a resonator mounting plate are not used.
摘要翻译：一种电路封装，其中框架式谐振器叶片安装在塑料体的凹陷部分中。凹部的轮廓定向并支撑谐振器框架，并且导电粘合剂将谐振器框架结合到主体并将谐振器电连接到嵌入在主体中的引线电极。电连接到引线电极的电路芯片元件也嵌入在主体中以提供整体电路封装。结合到主体上的凹部上的盖保护谐振元件。不使用焊接连接和谐振器安装板。

30. 发明授权

US3859546A Rectangular piezoelectric ceramic resonator oppositely poled along opposite side surfaces 失效
标题翻译：矩形压电陶瓷谐振器在OPPOSITE SIDE SURFACES中相对投射
公开(公告)号：US3859546A
公开(公告)日：1975-01-07
申请号：US39775173
申请日：1973-09-17
申请人： NIPPON ELECTRIC CO
发明人： DOI KIKUO , FUTAMI TAKEHIRO
IPC分类号： H03H9/17 , H03H9/125 , H03H9/24 , H03H9/50 , H01V7/00
CPC分类号： H03H9/50 , H03H9/125
摘要： A torsional mode electromechanical transducer comprises a piezoelectric ceramic piece oppositely poled along opposite side surfaces and a pair of electrodes attached to the respective principal surfaces of the ceramic piece. A mechanical resonator having appropriate planar surfaces may be attached to one or both of the electrodes with the ceramic piece. A pair of such piezoelectric ceramic pieces may be fixed together with a common electrode interposed and with the directions of residual polarization of the respective ceramic pieces disposed antiparallel.
摘要翻译：扭转模式机电换能器包括相对侧面相对地极化的压电陶瓷片和连接到陶瓷片的相应主表面的一对电极。具有适当平面的机械谐振器可以通过陶瓷片连接到一个或两个电极。可以将一对这样的压电陶瓷片与公共电极固定在一起，并且各陶瓷片的残余极化方向反平行设置。

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