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    • 72. 发明申请
    • (Al, Ga, In)N-BASED COMPOUND SEMICONDUCTOR AND METHOD OF FABRICATING THE SAME
    • (Al,Ga,In)N基化合物半导体及其制造方法
    • US20080265374A1
    • 2008-10-30
    • US12132760
    • 2008-06-04
    • Chung Hoon LEE
    • Chung Hoon LEE
    • H01L29/20H01L21/205
    • H01L33/40H01L33/0095H01L33/32
    • Disclosed are a (Al, Ga, In)N-based compound semiconductor device and a method of fabricating the same. The (Al, Ga, In)N-based compound semiconductor device of the present invention comprises a substrate; a (Al, Ga, In)N-based compound semiconductor layer grown on the substrate; and an electrode formed of at least one material or an alloy thereof selected from the group consisting of Pt, Pd and Au on the (Al, Ga, In)N-based compound semiconductor layer. Further, the method of fabricating the (Al, Ga, In)N-based compound semiconductor device comprises the steps of growing a P layer including P type impurities in a growth chamber; discharging hydrogen and a hydrogen source gas in the growth chamber; lowering the temperature of the (Al, Ga, In)N-based compound semiconductor with the P layer formed thereon to such an extent that it can be withdrawn to the outside from the growth chamber; withdrawing the (Al, Ga, In)N-based compound semiconductor from the growth chamber; and forming an electrode of at least one material or an alloy thereof selected from the group consisting of Pt, Pd and Au on the p layer. According to the present invention, it is possible to sufficiently secure P type conductivity and obtain good ohmic contact characteristics without performing an annealing process. And, no further annealing is necessary when Pt, Pd, Au electrode are used.
    • 公开了一种(Al,Ga,In)N基化合物半导体器件及其制造方法。 本发明的(Al,Ga,In)N基化合物半导体器件包括:衬底; 在衬底上生长的(Al,Ga,In)N基化合物半导体层; 以及在(Al,Ga,In)N基化合物半导体层上由选自Pt,Pd和Au的至少一种材料或其合金形成的电极。 此外,制造(Al,Ga,In)N基化合物半导体器件的方法包括在生长室中生长包含P型杂质的P层的步骤; 在生长室中排出氢和氢源气体; 降低其上形成有P层的(Al,Ga,In)N基化合物半导体的温度至可从生长室抽出到外部的程度; 从生长室中取出(Al,Ga,In)N基化合物半导体; 以及在p层上形成选自Pt,Pd和Au中的至少一种材料或其合金的电极。 根据本发明,可以在不进行退火处理的情况下充分确保P型导电性并获得良好的欧姆接触特性。 并且,当使用Pt,Pd,Au电极时,不需要进一步的退火。
    • 78. 发明授权
    • Ultrasonically actuated needle pump system
    • 超声波驱动针泵系统
    • US06638249B1
    • 2003-10-28
    • US09617478
    • 2000-07-17
    • Amit LalChung-Hoon Lee
    • Amit LalChung-Hoon Lee
    • A61M100
    • A61B5/14514A61B5/150022A61B5/150083A61B5/150297A61B5/150389A61B5/150503A61B5/150946A61B5/150977A61B5/15142A61B2010/008A61B2017/00765A61M37/0092
    • An ultrasonically driven pump, which may be used for sampling body fluids or atomizing liquids, has a stationary outer needle and an inner needle mounted within the bore of the outer needle. The distal end of the inner needle is positioned adjacent to the distal end of the outer needle. The inner needle is ultrasonically vibrated by an ultrasonic actuator without vibrating the outer needle, with resulting draw of liquid through the distal end of the outer needle into the bore of the inner needle for discharge through the proximal end of the inner needle. The outer needle can be formed to have a penetrating tip suited for penetrating the skin of a subject to allow sampling of body fluids including interstitial fluids. The pump can also be used for atomizing liquid, by drawing liquid from a supply that is pumped from the distal end to an open proximal end of the inner needle where the liquid is discharged by atomization into the atmosphere.
    • 可用于取样体液或雾化液体的超声波泵具有固定的外针和安装在外针的孔内的内针。 内针的远端定位成与外针的远端相邻。 内针被超声波致动器超声波振动,而不会使外针振动,从而将液体从外针的远端抽出到内针的孔中,以通过内针的近端排出。 外针可以形成为具有适于穿透受试者皮肤的穿透尖端,以允许对包括间质液的体液进行取样。 该泵还可用于雾化液体,其是从从远端泵送到内针的开口近端的液体从液体通过雾化排放到大气中排出液体。