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    • 2. 发明授权
    • Imaging apparatus capable of switching display methods
    • 能够切换显示方式的成像装置
    • US08599244B2
    • 2013-12-03
    • US12331501
    • 2008-12-10
    • Shinichiro HirookaHiroshi Chiba
    • Shinichiro HirookaHiroshi Chiba
    • H04N13/02
    • H04N5/2628G03B13/32H04N5/23212H04N5/23293H04N5/23296H04N5/272H04N13/10H04N13/239H04N13/296
    • An imaging apparatus comprises an image pickup unit, a cutout image generation unit for cutting out a specified area in a pickup image taken by the image pickup unit to generate a cutout image enlarged at a specified magnification, an image display unit for displaying one or both of the pickup image taken by the image pickup unit and the cutout image generated by the cutout image generation unit, a display image control unit for controlling a method of displaying an image the image display unit displays, a manual focus operation unit for the user to control through manual operation the focus position of the image pickup unit, and a manual zoom operation unit for the user to control the zoom magnification of the image pickup unit.
    • 一种成像装置,包括图像拾取单元,切割图像生成单元,用于切割由图像拾取单元拍摄的拾取图像中的指定区域,以产生以指定倍率放大的切割图像;图像显示单元,用于显示一个或两个 由图像拾取单元拍摄的拾取图像和由切割图像生成单元生成的切割图像的显示图像控制单元,用于控制图像显示单元显示的图像的显示方法的显示图像控制单元,用户的手动对焦操作单元 通过手动操作图像拾取单元的对焦位置进行控制,以及用于使用者控制图像拾取单元的变焦倍率的手动变焦操作单元。
    • 4. 发明授权
    • X-ray generator
    • X光发生器
    • US08243885B2
    • 2012-08-14
    • US12318413
    • 2008-12-29
    • Katsumi KawasakiYutaka InariHiroshi Chiba
    • Katsumi KawasakiYutaka InariHiroshi Chiba
    • H01J35/10
    • H01J35/26H01J2235/1046
    • To provide an X-ray generator capable of preventing electric corrosion and exerting stable performance over long periods. The X-ray generator includes: a rotary anticathode having a rotary anticathode part and a shaft part; an anticathode accommodating case including an air-tight case part for keeping an area surrounding the rotary anticathode part in a vacuum atmosphere, and a journaling case part for rotatively supporting the shaft part via a bearing; and an electric motor to rotatably drive the anticathode (target). A water-cooled jacket, through which cooling water for cooling the rotary anticathode part and the shaft part flows, is provided in the rotary anticathode. In the X-ray generator, an insulating bearing of which at least one of an inner ring, an outer ring and a rolling element is made of an insulating material is used as the bearing, and a conductive fiber brush having a large number of conductive microfibers serving as slide-contacting brush is arranged between opposing peripheral surfaces of the journaling case part of the anticathode accommodating case and the shaft part of the rotary anticathode, such that current is flown from the rotary anticathode to the anticathode accommodating case via the conductive fiber brush. In addition, pure water or ion-exchange water having low electric conductivity is used as cooling water flown through the water-cooled jacket.
    • 提供能够防止电腐蚀并长时间运行稳定的X射线发生器。 X射线发生器包括:具有旋转防阴极部分和轴部分的旋转阴极; 包括用于将旋转止痛部分的周围区域保持在真空气氛中的气密壳体部分和用于通过轴承可旋转地支撑所述轴部的日志箱部分的反阴极容纳壳体; 以及电动机来旋转地驱动所述止痛药(靶)。 在旋转阴极中设置有用于冷却旋转阴极部和轴部的冷却水的水冷套。 在X射线发生器中,使用由绝缘材料制成内环,外圈和滚动元件中的至少一个的绝缘轴承作为轴承,并且具有大量导电性的导电性纤维刷 用作滑动接触刷子的微纤维布置在防电器容纳盒的记录壳体部分的相对的外围表面和旋转阴极的轴部分之间,使得电流经由导电纤维从旋转抗电极流到抗阴茎容纳壳体 刷。 此外,作为通过水冷套管的冷却水,使用导电性低的纯水或离子交换水。
    • 7. 发明授权
    • Exposure apparatus and method for producing device
    • 曝光装置及其制造方法
    • US07817244B2
    • 2010-10-19
    • US11585824
    • 2006-10-25
    • Masahiro NeiNaoyuki KobayashiHiroshi ChibaShigeru Hirukawa
    • Masahiro NeiNaoyuki KobayashiHiroshi ChibaShigeru Hirukawa
    • G03B27/42G03B27/52
    • G03F9/7019G03F7/70341G03F9/7011G03F9/7015G03F9/7034G03F9/7046G03F9/7088G03F9/7096
    • An exposure apparatus performs exposure for a substrate by filling a space between a projection optical system and the substrate with a liquid and projecting an image of a pattern onto the substrate through the liquid by using the projection optical system. The exposure apparatus includes a substrate stage for holding the substrate, a liquid supply unit for supplying the liquid to a side of an image plane of the projection optical system, and a focus/leveling-detecting system for detecting surface information about a surface of the substrate not through the liquid. The exposure apparatus performs liquid immersion exposure for the substrate while adjusting a positional relationship between the surface of the substrate and the image plane formed through the projection optical system and the liquid, on the basis of the surface information detected by the focus/leveling-detecting system. The liquid immersion exposure can be performed at a satisfactory pattern transfer accuracy.
    • 曝光装置通过用液体填充投影光学系统和基板之间的空间来对基板进行曝光,并且通过使用投影光学系统通过液体将图案的图像投影到基板上。 曝光装置包括用于保持基板的基板台,用于将液体供给到投影光学系统的像面的一侧的液体供应单元,以及用于检测关于投影光学系统的表面的表面信息的聚焦/调平检测系统 底物不通过液体。 曝光装置在基于通过投影光学系统和液体形成的图像平面之间的位置关系的基础上,对基板进行液浸曝光,基于由聚焦/调平检测 系统。 可以以令人满意的图案转印精度进行液浸曝光。