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    • 2. 发明授权
    • X-ray image detector system
    • X射线图像检测系统
    • US06403965B1
    • 2002-06-11
    • US09533934
    • 2000-03-23
    • Mitsushi IkedaMasaki AtsutaAkira KinnoKouhei Suzuki
    • Mitsushi IkedaMasaki AtsutaAkira KinnoKouhei Suzuki
    • G01T124
    • H01L27/14663H01L27/14659
    • An X-ray image detector system includes: a plurality of scanning lines; a plurality of signal lines formed so as to intersect the scanning lines; and a plurality of pixel parts, each of which is formed at a corresponding one of the intersections between the scanning lines and the signal lines so as to form an array; each of said pixel parts having an X-ray-to-charge converting part for converting an incident X-ray to an electric charge, a pixel electrode for receiving the electric charge from the X-ray-to-charge converting part, and a switching element which is operated on the basis of a signal of a corresponding one of the scanning lines, one end of the switching element being connected to the pixel electrode, and the other end of the switching element being connected to a corresponding one of the signal lines, wherein the X-ray-to-charge converting part includes at least a first X-ray-to-charge converting film, and a second X-ray-to-charge converting film having a lower resistivity than that of the first X-ray-to-charge converting film. Thus, it is possible to provide an X-ray image detector system capable of detecting an image even if X-ray irradiation is weak.
    • X射线图像检测器系统包括:多条扫描线; 形成为与扫描线相交的多条信号线; 以及多个像素部分,每个像素部分形成在扫描线和信号线之间的相应的一个相交处以形成阵列; 每个所述像素部分具有用于将入射的X射线转换成电荷的X射线电荷转换部分,用于从X射线到电荷转换部分接收电荷的像素电极,以及 开关元件,其基于相应的扫描线的信号而操作,所述开关元件的一端连接到所述像素电极,并且所述开关元件的另一端连接到所述信号中的相应的一个 线,其中所述X射线电荷转换部分至少包括第一X射线电荷转换膜,以及具有比所述第一X射线电荷转换膜低的电阻率的第二X射线电荷转换膜 射 - 电转换膜。 因此,即使X射线照射弱,也可以提供能够检测图像的X射线图像检测器系统。
    • 4. 发明授权
    • Method of manufacturing semiconductor device
    • 制造半导体器件的方法
    • US5431773A
    • 1995-07-11
    • US991954
    • 1992-12-17
    • Mitsushi IkedaMichio Murooka
    • Mitsushi IkedaMichio Murooka
    • G02F1/136G02F1/1362G02F1/1368H01L21/02H01L21/302H01L21/3065H01L21/311H01L21/336H01L21/77H01L21/84H01L29/49H01L29/78H01L29/786C23F1/00
    • H01L29/4908G02F1/1362H01L21/31122H01L28/40H01L29/66765G02F2001/13629H01L27/124
    • A method of manufacturing a semiconductor device, which comprises steps of providing a substrate, forming an oxide layer of a metal material, which includes a tantalum or an alloy mainly containing a tantalum on the substrate, placing the substrate into a first chamber, activating an etching gas which includes a fluorine containing gas and an oxygen containing gas, in a second chamber, introducing the activated etching gas into the second chamber, and etching the oxide layer by the introduced gas selectively against the substrate. A method of manufacturing a liquid crystal display device, which comprises steps of providing a substrate, forming an anodic oxide layer of a tantalum containing material on the substrate, forming an etching mask on the anodic oxide layer, placing the substrate into a first region, activating a mixture of fluorine and oxygen containing gas in a second region, apart from the first region, introducing the activated etching gas into the first region through a gas introducing portion, and etching the oxide layer on the substrate selectively against the substrate, by using the etching mask.
    • 一种制造半导体器件的方法,包括以下步骤:在衬底上形成包含钽或主要含有钽的合金的金属材料的氧化物层的衬底,将衬底放置在第一腔室中,激活 在第二室中包括含氟气体和含氧气体的蚀刻气体,将活化的蚀刻气体引入到第二室中,并且通过引入的气体选择性地对衬底蚀刻氧化物层。 一种制造液晶显示装置的方法,包括以下步骤:在基板上形成含钽材料的阳极氧化层,在阳极氧化层上形成蚀刻掩模,将基板放置在第一区域中, 在第一区域的第二区域中激活含氟和含氧气体的混合物,通过气体导入部分将活化的蚀刻气体引入第一区域,并通过使用 蚀刻掩模。
    • 9. 发明授权
    • Imaging device
    • 成像设备
    • US06862338B2
    • 2005-03-01
    • US10436235
    • 2003-05-13
    • Akira KinnoMitsushi Ikeda
    • Akira KinnoMitsushi Ikeda
    • A61B6/00A61B6/03H01L27/14H01L27/146H01L31/09H04N5/32H04N5/325H04N5/357H04N5/369H04N5/376H05G1/64
    • H04N5/325A61B6/032H04N5/3594
    • There are provided a photoelectric conversion film converting an x-ray to a charge, a switching element composed of a transistor, of which a gate is connected to a corresponding scanning line, a source is connected to the photoelectric conversion film, and a drain is connected to a corresponding signal line, and a accumulation element connected to the photoelectric conversion film and the switching element, accumulating the charged produced in the photoelectric conversion element, a scanning line driving circuit driving the scanning lines, and a signal detection circuit connected to the signal lines and reading out the charge accumulated in the accumulation element. A potential of the photoelectric conversion film and a gate potential of the switching element is set such that an absolute value of a gate-source voltage of the switching element decreases when the charge is accumulated in the accumulation element. The scanning line driving circuit outputs at least two kinds of scanning line voltages that can turn off the switching element.
    • 提供了将x射线转换为电荷的光电转换膜,由晶体管构成的开关元件,栅极连接到相应的扫描线,源极连接到光电转换膜,漏极为 连接到相应的信号线,以及连接到光电转换膜和开关元件的累积元件,累积在光电转换元件中产生的电荷,驱动扫描线的扫描线驱动电路,以及连接到光电转换元件的信号检测电路 信号线并读出累积元件中累积的电荷。 设置光电转换膜的电位和开关元件的栅极电位,使得当电荷积累在累积元件中时,开关元件的栅极 - 源极电压的绝对值降低。 扫描线驱动电路输出可以切断开关元件的至少两种扫描线电压。