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    • 3. 发明授权
    • Method for manufacturing semiconductor device
    • 制造半导体器件的方法
    • US07541279B2
    • 2009-06-02
    • US11615105
    • 2006-12-22
    • Sang Chul KimJae Won Han
    • Sang Chul KimJae Won Han
    • H01L21/20
    • H01L21/76874C25D3/38C25D3/58C25D5/022C25D7/123H01L21/2885H01L21/76877
    • A method for manufacturing a semiconductor device is provided. The method includes the steps of forming an interlayer insulating layer on a semiconductor substrate, selectively patterning the interlayer insulating layer to form a contact hole, depositing a first metal on an inner surface of the contact hole, submerging the semiconductor substrate on which the first metal is deposited into an electrochemical plating (ECP) solution bath in which a second metal is dissolved, dissolving the first metal in the ECP solution bath, plating the first and second metals dissolved in the ECP solution bath at the same time to gap-fill an alloy of the first and second metals in the contact hole, and removing the alloy using the interlayer insulating layer as an end point in a CMP process to form an alloy interconnection.
    • 提供一种制造半导体器件的方法。 该方法包括以下步骤:在半导体衬底上形成层间绝缘层,选择性地图案化层间绝缘层以形成接触孔;在接触孔的内表面上沉积第一金属;浸没第一金属 沉积到其中溶解有第二金属的电化学电镀(ECP)溶液浴中,将第一金属溶解在ECP溶液浴中,同时电镀溶解在ECP溶液浴中的第一和第二金属以间隙填充 接触孔中的第一和第二金属的合金,并且在CMP工艺中使用层间绝缘层作为终点去除合金以形成合金互连。
    • 10. 发明申请
    • METHOD OF FORMING METAL WIRING OF SEMICONDUCTOR DEVICE
    • 形成半导体器件金属接线的方法
    • US20100112807A1
    • 2010-05-06
    • US12608052
    • 2009-10-29
    • Sang-Chul Kim
    • Sang-Chul Kim
    • H01L21/768H01L21/31
    • H01L21/02063H01L21/76814
    • A method of forming a metal wiring of a semiconductor device, and devices thereof. A method of forming a metal wiring, and devices thereof, may maximize semiconductor yield by substantially removing oxide on and/or over a trench and/or by substantially removing a by-product that may remain on and/or over a surface of a wafer. A method of forming a metal wiring of a semiconductor may include forming a dielectric layer on and/or over a metal wiring. A method of forming a metal wiring of a semiconductor may include forming a contact hole, which may expose a partial surface of metal wiring, on and/or over a dielectric layer. A method of forming a metal wiring of a semiconductor may include performing an oxide removing process on and/or over an inner side of a contact hole, and/or performing a by-product removing process on and/or over an inner side wall of a trench.
    • 一种形成半导体器件的金属布线的方法及其装置。 形成金属布线的方法及其装置可通过基本上除去沟槽上和/或沟槽上的氧化物和/或通过基本上除去可能保留在晶片表面上和/或上方的副产物而使半导体产量最大化 。 形成半导体的金属布线的方法可以包括在金属布线上和/或上方形成电介质层。 形成半导体的金属布线的方法可以包括在电介质层上和/或上方形成可能暴露金属布线的部分表面的接触孔。 形成半导体的金属布线的方法可以包括在接触孔的内侧上和/或上方对接触孔的内侧进行氧化物去除处理,和/或在内侧壁上和/ 一个沟槽