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    • 2. 发明授权
    • Structures of high-voltage MOS devices with improved electrical performance
    • 具有改善电气性能的高压MOS器件的结构
    • US07888767B2
    • 2011-02-15
    • US11588902
    • 2006-10-26
    • Kun-Ming HuangHsueh-Liang ChouWeng-Chu ChuChen-Bau Wu
    • Kun-Ming HuangHsueh-Liang ChouWeng-Chu ChuChen-Bau Wu
    • H01L29/02
    • H01L29/7835H01L29/0653H01L29/0692H01L29/1045H01L29/1083H01L29/1087H01L29/66659H01L29/7833
    • A semiconductor structure includes a first high-voltage well (HVW) region of a first conductivity type overlying a substrate, a second HVW region of a second conductivity type opposite the first conductivity type overlying the substrate and laterally adjoining the first HVW region, and a third HVW region of the second conductivity type underlying the second HVW region. A region underlying the first HVW region is substantially free from the third HVW region, wherein the third HVW region has a bottom lower than a bottom of the first HVW region. The semiconductor structure further includes an insulation region in a portion and extending from a top surface of the first HVW region into the first HVW region, a gate dielectric extending from over the first HVW region to over the second HVW region wherein the gate dielectric has a portion over the insulation region, and a gate electrode on the gate dielectric.
    • 半导体结构包括覆盖衬底的第一导电类型的第一高电压阱(HVW)区域,覆盖衬底并横向邻接第一HVW区域的与第一导电类型相反的第二导电类型的第二HVW区域,以及 位于第二HVW区域的第二导电类型的第三HVW区域。 第一HVW区域下方的区域基本上没有第三HVW区域,其中第三HVW区域具有比第一HVW区域的底部低的底部。 该半导体结构还包括一部分中的绝缘区域并从第一HVW区域的顶表面延伸到第一HVW区域,从第一HVW区域延伸到第二HVW区域上方的栅极电介质,其中栅极电介质具有 绝缘区域上的栅极电极和栅极电介质上的栅电极。