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    • 4. 发明授权
    • Bipolar junction transistor and manufacturing method thereof
    • 双极结晶体管及其制造方法
    • US07547959B2
    • 2009-06-16
    • US11646828
    • 2006-12-27
    • Nam Joo Kim
    • Nam Joo Kim
    • H01L27/082H01L27/102H01L29/70
    • H01L29/0692H01L29/0821H01L29/1004H01L29/66272H01L29/732
    • An improved bipolar junction transistor and a method for manufacturing the same are provided. The bipolar junction transistor includes: a buried layer and a high concentration N-type collector region in a P-type semiconductor substrate; a low concentration P-type base region in the semiconductor substrate above the buried layer; a first high concentration P-type base region along an edge of the low concentration P-type base region; a second high concentration P-type base region at a center of the low concentration P-type base region; a high concentration N-type emitter region between the first and second high concentration base regions; and insulating layer spacers between the high concentration base regions and the high concentration emitter regions. In the bipolar junction transistor, the emitter-base distance can be reduced using a trench and an insulating layer spacer. This may improve base voltage and high-speed response characteristics.
    • 提供一种改进的双极结型晶体管及其制造方法。 双极结型晶体管包括:P型半导体衬底中的掩埋层和高浓度N型集电极区域; 在掩埋层上方的半导体衬底中的低浓度P型基极区域; 沿着低浓度P型基区的边缘的第一高浓度P型基区; 位于低浓度P型基区的中心的第二高浓度P型碱基区域; 第一和第二高浓度基区之间的高浓度N型发射极区; 以及高浓度基极区域和高浓度发射极区域之间的绝缘层间隔物。 在双极结型晶体管中,可以使用沟槽和绝缘层间隔物来减小发射极 - 基极距离。 这可以提高基极电压和高速响应特性。
    • 5. 发明申请
    • INDUCTOR STRUCTURE OF A SEMICONDUCTOR DEVICE
    • 半导体器件的电感结构
    • US20070152298A1
    • 2007-07-05
    • US11615678
    • 2006-12-22
    • Nam Joo Kim
    • Nam Joo Kim
    • H01L29/00
    • H01L23/5227H01L23/5222H01L23/53295H01L2924/0002H01L2924/00
    • Embodiments relate to and inductor structure of a semiconductor device and a manufacturing method of the same, that may be capable of reducing a parasitic capacitance occurring between an inductor metallic interconnection and a silicon substrate. Support insulating layer patterns may be formed on a top of the silicon substrate on which the interlayer dielectric layer is formed. Inductor metallic interconnections having relatively wide widths are formed on the support insulating layer patterns. When a top protective layer covering the inductor metallic interconnections is deposited, air layers are formed under the protruding parts of the inductor metallic interconnections. Because the air layer having a lower dielectric constant may exist between the inductor metallic interconnections and the silicon substrate, a parasitic capacitance may decrease and a self-resonance frequency may increase, and may extend an available frequency band.
    • 实施例涉及到半导体器件的电感结构及其制造方法,其可能能够减小在电感器金属互连和硅衬底之间发生的寄生电容。 支撑绝缘层图案可以形成在其上形成有层间电介质层的硅衬底的顶部上。 在支撑绝缘层图案上形成具有相对宽的宽度的电感器金属互连。 当沉积覆盖电感器金属互连的顶部保护层时,在电感器金属互连的突出部分之下形成空气层。 因为具有较低介电常数的空气层可能存在于电感器金属互连和硅衬底之间,所以寄生电容可能减小,并且自谐振频率可能增加,并且可能扩展可用的频带。