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    • 7. 发明申请
    • CMOS-BASED PLANAR TYPE SILICON AVALANCHE PHOTO DIODE USING SILICON EPITAXIAL LAYER AND METHOD OF MANUFACTURING THE SAME
    • 使用硅外延层的基于CMOS的平面型硅氧化物照相二极管及其制造方法
    • US20090146238A1
    • 2009-06-11
    • US12195166
    • 2008-08-20
    • Yong Sun YoonKun Sik ParkJong Moon ParkBo Woo KimJin Yeong Kang
    • Yong Sun YoonKun Sik ParkJong Moon ParkBo Woo KimJin Yeong Kang
    • H01L31/103H01L31/18
    • H01L31/107
    • A complementary metal-oxide semiconductor (CMOS)-based planar type avalanche photo diode (APD) using a silicon epitaxial layer and a method of manufacturing the APD, the photo diode including: a substrate; a well layer of a first conductivity type formed in the substrate; an avalanche embedded junction formed in the well layer of the first conductivity type by low energy ion implantation; the silicon epitaxial layer formed in the avalanche embedded junction; a doping area of a second conductivity type opposite to the first conductive type, formed from a portion of a surface of the well layer of the first conductivity type in the avalanche embedded junction and forming a p-n junction; positive and negative electrodes formed on the doping area of the second conductivity type and the well layer of the first conductivity type separated from the doping area of the second conductivity type, respectively; and an oxide layer formed on an overall surface excluding a window where the positive and negative electrodes are formed.
    • 使用硅外延层的基于互补金属氧化物半导体(CMOS)的平面型雪崩光电二极管(APD)和制造该APD的方法,所述光电二极管包括:衬底; 在衬底中形成的第一导电类型的阱层; 通过低能离子注入形成在第一导电类型的阱层中的雪崩嵌入结; 形成在雪崩嵌入结的硅外延层; 由所述第一导电类型的阱层的表面的一部分形成在所述雪崩嵌入结中并形成p-n结的与所述第一导电类型相反的第二导电类型的掺杂区域; 分别形成在第二导电类型的掺杂区域上的正极和负极以及从第二导电类型的掺杂区域分离的第一导电类型的阱层; 以及形成在除了形成正极和负极的窗口之外的整个表面上的氧化物层。
    • 8. 发明授权
    • CMOS-based planar type silicon avalanche photo diode using silicon epitaxial layer and method of manufacturing the same
    • 使用硅外延层的CMOS基平面型硅雪崩光电二极管及其制造方法
    • US07994553B2
    • 2011-08-09
    • US12195166
    • 2008-08-20
    • Yong Sun YoonKun Sik ParkJong Moon ParkBo Woo KimJin Yeong Kang
    • Yong Sun YoonKun Sik ParkJong Moon ParkBo Woo KimJin Yeong Kang
    • H01L31/062
    • H01L31/107
    • A complementary metal-oxide semiconductor (CMOS)-based planar type avalanche photo diode (APD) using a silicon epitaxial layer and a method of manufacturing the APD, the photo diode including: a substrate; a well layer of a first conductivity type formed in the substrate; an avalanche embedded junction formed in the well layer of the first conductivity type by low energy ion implantation; the silicon epitaxial layer formed in the avalanche embedded junction; a doping area of a second conductivity type opposite to the first conductive type, formed from a portion of a surface of the well layer of the first conductivity type in the avalanche embedded junction and forming a p-n junction; positive and negative electrodes formed on the doping area of the second conductivity type and the well layer of the first conductivity type separated from the doping area of the second conductivity type, respectively; and an oxide layer formed on an overall surface excluding a window where the positive and negative electrodes are formed.
    • 使用硅外延层的基于互补金属氧化物半导体(CMOS)的平面型雪崩光电二极管(APD)和制造该APD的方法,所述光电二极管包括:衬底; 在衬底中形成的第一导电类型的阱层; 通过低能离子注入形成在第一导电类型的阱层中的雪崩嵌入结; 形成在雪崩嵌入结的硅外延层; 由所述第一导电类型的阱层的表面的一部分形成在所述雪崩嵌入结中并形成p-n结的与所述第一导电类型相反的第二导电类型的掺杂区域; 分别形成在第二导电类型的掺杂区域上的正极和负极以及从第二导电类型的掺杂区域分离的第一导电类型的阱层; 以及形成在除了形成正极和负极的窗口之外的整个表面上的氧化物层。
    • 10. 发明授权
    • Method for fabricating semiconductor memory
    • 半导体存储器的制造方法
    • US06297084B1
    • 2001-10-02
    • US09383635
    • 1999-08-26
    • Ku Chul JoungWouns YangKun Sik Park
    • Ku Chul JoungWouns YangKun Sik Park
    • H01L218234
    • H01L27/11526H01L27/0629H01L27/105H01L27/11546
    • A method for fabricating a semiconductor memory, in which a resistive layer is formed of a material identical to a material of a cell plug layer at a time of formation of the cell plug layer. In addition, a contact pad layer formed of a salicide layer on the cell plug layer is formed with an area larger than the plug layer for simplifying the fabrication process and securing an adequate fabrication allowance, including the steps of (1) forming metal gate electrodes on a semiconductor substrate inclusive of a cell region and a peripheral circuit region, (2) forming gate sidewalls at sides of the gate electrode layers on the cell region and forming a material layer for forming a plug on an entire surface, (3) patterning the material layer for forming a plug on the peripheral circuit region, to form a resistive layer, (4) planarizing the material layer for forming a plug on the cell region, to form a plug layer which stuffs spaces between the gate electrode layers, and (5) selectively forming contact pad layers on a top of the plug layer on the cell region and a portion of the peripheral circuit region and converting into silicide.
    • 一种制造半导体存储器的方法,其中在形成电池插头层时电阻层由与电池插塞层的材料相同的材料形成。 此外,在电池插塞层上由自对准硅层形成的接触焊盘层形成有比插塞层大的区域,以简化制造工艺并确保足够的制造余量,包括以下步骤:(1)形成金属栅电极 在包括单元区域和外围电路区域的半导体衬底上,(2)在单元区域的栅极电极层的侧面形成栅极侧壁,并在整个表面上形成用于形成插塞的材料层,(3)图案化 用于在外围电路区域上形成插塞的材料层,以形成电阻层;(4)平坦化用于在电池区域形成插塞的材料层,以形成填充栅电极层之间的空间的插塞层;以及 (5)在电池区域上的插塞层的顶部和外围电路区域的一部分上选择性地形成接触焊盘层,并转化为硅化物。