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    • 10. 发明申请
    • LAMINATE
    • 层压板
    • US20140091678A1
    • 2014-04-03
    • US14043135
    • 2013-10-01
    • NGK Insulators, Ltd.
    • Takaaki KOIZUMITakashi EBIGASEShinya TAKEMURA
    • H01L41/08
    • H01L41/0805B41J2/161B41J2/1626B41J2/1631B41J2/1643B41J2/1645B41J2/1646H01L41/0973H01L41/332
    • A piezoelectric/electrostrictive film type element includes a lower electrode, a piezoelectric layer, and an upper electrode laminated in order on a support. An average particle diameter of each of particles of a piezoelectric material forming the piezoelectric layer falls within a range of 0.5 μm to 10 μm. The sectional shape of the piezoelectric layer is a “quadrilateral (substantially rectangular shape) having a height of from 0.5 μm to 15 μm and an angle (θ) at an end point of a base of from 85° to 105°.” A surface roughness of a side surface of the piezoelectric layer is 0.05 dμm to 0.5 dμm at the maximum height roughness Rz (defined by JIS B 0601:2001). Both “generation of a leak current that flows through the piezoelectric layer” and “occurrence of particle shedding from a side surface of the piezoelectric layer” can be prevented.
    • 压电/电致伸缩膜型元件包括依次层叠在载体上的下电极,压电层和上电极。 形成压电层的压电材料的每个颗粒的平均粒径在0.5μm至10μm的范围内。 压电层的截面形状是“85”到105°的底部的端部的角度(& H“)的高度为0.5〜15μm的四边形(大致矩形)。”A 在最大高度粗糙度Rz(JIS B 0601:2001定义)下,压电体层的侧面的表面粗糙度为0.05dμm〜0.5dμm。 可以防止“通过压电层流过的漏电流”和“从压电体层的侧面发生粒子脱落”。