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1. 发明授权

US09153413B2 Multi-beam scanning electron beam device and methods of using the same 有权
标题翻译：多光束扫描电子束装置及其使用方法
公开(公告)号：US09153413B2
公开(公告)日：2015-10-06
申请号：US12528307
申请日：2008-02-22
申请人： Gilad Almogy , Avishai Bartov , Juergen Frosien , Pavel Adamec , Helmut Banzhof
发明人： Gilad Almogy , Avishai Bartov , Juergen Frosien , Pavel Adamec , Helmut Banzhof
IPC分类号： G21K7/00 , H01J37/05 , H01J37/10 , H01J37/147 , H01J37/28
CPC分类号： H01J37/05 , H01J37/10 , H01J37/147 , H01J37/28 , H01J2237/0635 , H01J2237/1508 , H01J2237/2449 , H01J2237/2817
摘要： A multi-beam scanning electron beam device (100) is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter (110) for emitting a plurality of electron beams (12,13,14), at least one common electron beam optical element (130) having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element (140) for individually influencing the plurality of electron beams, a common objective lens assembly (150) for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen (20) for generation of a plurality of signal beams (121, 131,141), and a detection assembly (170) for individually detecting each signal beam on a corresponding detection element.
摘要翻译：描述了多光束扫描电子束装置（100）。具有列的多头扫描电子束装置包括用于发射多个电子束（12,13,14）的多光束发射器（110），至少一个共同的电子束光学元件（130）用于多个电子束中的至少两个的开口，并适用于共同影响多个电子束中的至少两个，用于单独影响多个电子束的至少一个单独的电子束光学元件（140），共同的目标透镜组件（150），用于聚焦具有用于聚焦多个电子束中的至少两个的共同激发的多个电子束，并且适于将多个电子束聚焦到样本（20）上以产生多个信号光束（121,131,141）和检测组件（170），用于分别检测相应检测元件上的每个信号光束。

2. 发明授权

US08878148B2 Method and apparatus of pretreatment of an electron gun chamber 有权
标题翻译：电子枪室预处理方法及装置
公开(公告)号：US08878148B2
公开(公告)日：2014-11-04
申请号：US12888978
申请日：2010-09-23
申请人： Pavel Adamec , Ivo Li{hacek over (s)}ka , Gennadij Gluchman , Milan Snabl
发明人： Pavel Adamec , Ivo Li{hacek over (s)}ka , Gennadij Gluchman , Milan Snabl
IPC分类号： G21K5/00 , H01J37/06
CPC分类号： H01J37/06 , H01J2237/022 , H01J2237/06316 , H01J2237/06341
摘要： A method of pre-treating an ultra high vacuum charged particle gun chamber by ion stimulated desorption is provided. The method includes generating a plasma for providing a plasma ion source, and applying a negative potential to at least one surface in the gun chamber, wherein the negative potential is adapted for extracting an ion flux from the plasma ion source to the at least one surface for desorbing contamination particles from the at least one surface by the ion flux impinging on the at least one surface.
摘要翻译：提供了一种通过离子刺激解吸预处理超高真空带电粒子枪室的方法。该方法包括产生用于提供等离子体离子源的等离子体，以及向枪室中的至少一个表面施加负电位，其中负电位适于将离子通量从等离子体离子源提取到至少一个表面用于通过撞击在至少一个表面上的离子通量从至少一个表面解吸污染颗粒。

3. 发明申请

US20110163229A1 HIGH THROUGHPUT SEM TOOL 审中-公开
标题翻译：高通量扫描仪刀具
公开(公告)号：US20110163229A1
公开(公告)日：2011-07-07
申请号：US12528306
申请日：2008-02-22
申请人： Juergen Frosien , Helmut Banzhof , Pavel Adamec
发明人： Juergen Frosien , Helmut Banzhof , Pavel Adamec
IPC分类号： G01N23/225 , G01N23/227 , G01N23/22 , G01N23/203 , H01J1/50
CPC分类号： H01J37/05 , H01J37/10 , H01J37/147 , H01J37/28 , H01J2237/0635 , H01J2237/1508 , H01J2237/2449 , H01J2237/2817
摘要： A scanning charged particle beam device (100) is described. The scanning charged particle beam device includes a beam emitter (102) for emitting a primary electron beam, a first scan stage for scanning the beam over a specimen, an achromatic beam separator (130) adapted for separating a signal electron beam from the primary electron beam, and a detection unit (172,174,178) for detecting signal electrons.
摘要翻译：描述扫描带电粒子束装置（100）。扫描带电粒子束装置包括用于发射一次电子束的射束发射器（102），用于扫描试样上的束的第一扫描级，适于从一次电子分离信号电子束的消色束分离器（130）以及用于检测信号电子的检测单元（172,174,178）。

4. 发明授权

US07872239B2 Electrostatic lens assembly 有权
标题翻译：静电透镜组件
公开(公告)号：US07872239B2
公开(公告)日：2011-01-18
申请号：US12181171
申请日：2008-07-28
申请人： Pavel Adamec , Carlo Salvesen , Ivo Liska
发明人： Pavel Adamec , Carlo Salvesen , Ivo Liska
IPC分类号： H01J37/28 , H01J37/244 , G01R31/305
CPC分类号： H01J37/12 , H01J37/145 , H01J2237/032 , H01J2237/038 , H01J2237/121 , H01J2237/1405 , H01J2237/28
摘要： A lens assembly having an electrostatic lens component for a charged particle beam system is provided. The assembly includes: a first electrode having a conically shaped portion, a second electrode having a conically shaped portion, and a first insulator having a conically shaped portion, wherein the first insulator comprises two extending portions towards each of its ends, and wherein the two extending portions are formed to generate a gap between the insulator and each of the adjacent electrodes.
摘要翻译：提供一种具有用于带电粒子束系统的静电透镜部件的透镜组件。组件包括：具有锥形部分的第一电极，具有锥形部分的第二电极和具有锥形部分的第一绝缘体，其中第一绝缘体包括朝向其每个端部的两个延伸部分，并且其中两个形成延伸部分以在绝缘体和每个相邻电极之间产生间隙。

5. 发明申请

US20100320382A1 HIGH THROUGHPUT SEM TOOL 有权
标题翻译：高通量扫描仪刀具
公开(公告)号：US20100320382A1
公开(公告)日：2010-12-23
申请号：US12528307
申请日：2008-02-22
申请人： Gilad Almogy , Avishai Bartov , Jürgen Frosien , Pavel Adamec , Helmut Banzhof
发明人： Gilad Almogy , Avishai Bartov , Jürgen Frosien , Pavel Adamec , Helmut Banzhof
IPC分类号： G01N23/00 , H01J37/147
CPC分类号： H01J37/05 , H01J37/10 , H01J37/147 , H01J37/28 , H01J2237/0635 , H01J2237/1508 , H01J2237/2449 , H01J2237/2817
摘要： A multi-beam scanning electron beam device (100) is described. The multi-bea scanning electron beam device having a column, includes a multi-beam emitter (110) for emitting a plurality of electron beams (12,13,14), at least one common electron beam optical element (130) having a common opening for at least two of the plurality of electron beams and being adapted for commonly influencing at least two of the plurality of electron beams, at least one individual electron beam optical element (140) for individually influencing the plurality of electron beams, a common objective lens assembly (150) for focusing the plurality of electrons beams having a common excitation for focusing at least two of the plurality of electron beams, and adapted for focusing the plurality of electron beams onto a specimen (20) for generation of a plurality of signal beams (121, 131,141), and a detection assembly (170) for individually detecting each signal beam on a corresponding detection element.
摘要翻译：描述了多光束扫描电子束装置（100）。具有列的多头扫描电子束装置包括用于发射多个电子束（12,13,14）的多光束发射器（110），至少一个共同的电子束光学元件（130）用于多个电子束中的至少两个的开口，并适用于共同影响多个电子束中的至少两个，用于单独影响多个电子束的至少一个单独的电子束光学元件（140），共同的目标透镜组件（150），用于聚焦具有用于聚焦多个电子束中的至少两个的共同激发的多个电子束，并且适于将多个电子束聚焦到样本（20）上以产生多个信号光束（121,131,141）和检测组件（170），用于分别检测相应检测元件上的每个信号光束。

6. 发明授权

US07595490B2 Charged particle beam emitting device and method for operating a charged particle beam emitting device 有权
标题翻译：带电粒子束发射装置和用于操作带电粒子束发射装置的方法
公开(公告)号：US07595490B2
公开(公告)日：2009-09-29
申请号：US11469728
申请日：2006-09-01
申请人： Fang Zhou , Pavel Adamec , Jürgen Frosien , Jimmy Vishnipolsky
发明人： Fang Zhou , Pavel Adamec , Jürgen Frosien , Jimmy Vishnipolsky
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： H01J37/073 , H01J2237/022 , H01J2237/06325
摘要： A method for operating a charged particle beam emitting device and, in particular, an electron beam emitting device including a cold field emitter is provided. The method includes the steps of placing the cold field emitter in a vacuum of a given pressure, the emitter exhibiting a high initial emission current I0 and a lower stable mean emission current IS under a given electric extraction field; applying the given electric extraction field to the emitter for emitting electrons from the emitter surface; performing a cleaning process by applying at least one heating pulse to the cold field emitter for heating the emitter surface, whereby the cleaning process is performed before the emission current of the cold field emitter has declined to the lower stable mean emission value IS; and repeating the cleaning process to keep the emission current of the emitter continuously above the substantially stable emission value IS.
摘要翻译：提供了一种用于操作带电粒子束发射器件的方法，特别是包括冷场发射器的电子束发射器件。该方法包括以下步骤：将冷场发射器置于给定压力的真空中，发射体在给定的电提取场下表现出高的初始发射电流I0和较低的稳定平均发射电流IS; 将给定的电提取场施加到发射器以从发射器表面发射电子; 通过向冷场发射器施加至少一个加热脉冲来加热发射体表面来执行清洁处理，由此在冷场发射器的发射电流已经下降到较低的稳定平均发射值IS之前进行清洁处理; 并重复清洁处理以将发射极的发射电流连续地保持在基本上稳定的发射值IS上。

7. 发明授权

US07268361B2 Electron emission device 有权
标题翻译：电子发射装置
公开(公告)号：US07268361B2
公开(公告)日：2007-09-11
申请号：US10483114
申请日：2002-07-01
申请人： Pavel Adamec , Dieter Winkler
发明人： Pavel Adamec , Dieter Winkler
IPC分类号： H01L29/06 , H01L21/00
CPC分类号： H01J1/3044 , H01J2201/319
摘要： The invention provides an electron beam device 1 comprising at least one field emission cathode 3 and at least one extracting electrode 5, whereby the field emission cathode 5 comprises a p-type semiconductor region 7 connected to an emitter tip 9 made of a semiconductor material, an n-type semiconductor region 11 forming a pn-diode junction 13 with the p-type semiconductor region 7 a first electric contact 15 on the p-type semiconductor region 7 and a second electric contact 17 on the n-type semiconductor region 11. The p-type semiconductor region 7 prevents the flux of free electrons to the emitter unless electrons are injected into the p-type semiconductor region 7 by the pn-diode junction 13. This way, the field emission cathode 3 can generate an electron beam where the electron beam current is controlled by the forward biasing second voltage V2 across the pn-diode junction. Such electron beam current has an improved current value stability. In addition the electron beam current does not have to be stabilized anymore by adjusting, the voltage between emitter tip 9 and extracting electrode 5 which would interfere with the electric field of electron beam optics. The present invention further provides the field emission cathode as described above and an array of field emission cathodes. The invention further provides a method to generate at least one electron beam.
摘要翻译：本发明提供一种包括至少一个场发射阴极3和至少一个提取电极5的电子束装置1，由此场发射阴极5包括连接到由半导体材料制成的发射极尖端9的p型半导体区域7，在p型半导体区域7上形成p型二极管结13的n型半导体区域11，p型半导体区域7上的第一电接触15和n型半导体区域11上的第二电接触17。 p型半导体区域7防止自由电子束流到发射极，除非电子被pn二极管结13注入到p型半导体区域7中。这样，场发射阴极3可以产生电子束，其中电子束电流由跨越pn二极管结的正向偏置第二电压V 2控制。这种电子束电流具有改善的电流值稳定性。此外，电子束电流不必通过调节发射极尖端9和提取电极5之间的电压，这将干扰电子束光学器件的电场。本发明还提供如上所述的场致发射阴极和场发射阴极阵列。本发明还提供了一种产生至少一个电子束的方法。

8. 发明申请

US20060192145A1 Charged particle beam apparatus and method for operating the same 有权
标题翻译：带电粒子束装置及其操作方法
公开(公告)号：US20060192145A1
公开(公告)日：2006-08-31
申请号：US11396751
申请日：2006-04-03
申请人： Pavel Adamec , Ralf Degenhardt , Hans-Peter Feuerbaum , Harry Munack , Dieter Winkler
发明人： Pavel Adamec , Ralf Degenhardt , Hans-Peter Feuerbaum , Harry Munack , Dieter Winkler
IPC分类号： G21G5/00
CPC分类号： H01J37/285 , H01J37/265 , H01J37/28 , H01J2237/0435 , H01J2237/049 , H01J2237/2855 , H01J2237/2857
摘要： A charged particle beam apparatus is provided which comprises a charged particle source for producing a primary beam of charged particles, aperture means for collimating said primary beam of charged particles, wherein said aperture means is adapted to switch between a collimation of said primary beam resulting in a width appropriate for serial imaging of a sample as well as a collimation of said primary beam to a width appropriate for parallel imaging of said sample, a condenser lens for condensing said primary beam of charged particles, scanning means for deflecting said primary beam of charged particles, an objective lens for focusing said condensed primary beam, a sectorized detector for detecting a secondary charged particles. Also, several different operation modes of the beam apparatus are described allowing for serial imaging as well as parallel imaging.
摘要翻译：提供一种带电粒子束装置，其包括用于产生带电粒子的一次束的带电粒子源，用于准直所述带电粒子的一次束的孔径装置，其中所述孔口装置适于在所述主束的准直之间切换，导致适合于样本的串行成像的宽度以及所述主光束的准直到适合于所述样品的平行成像的宽度;用于聚集所述带电粒子的一次束的聚光透镜;用于偏转所述主要束带电的扫描装置颗粒，用于聚焦所述冷凝的主光束的物镜，用于检测次级带电粒子的扇形检测器。此外，描述了束装置的几种不同的操作模式，允许串行成像以及平行成像。

9. 发明授权

US07928405B2 Magnetic lens assembly 有权
标题翻译：磁性透镜组件
公开(公告)号：US07928405B2
公开(公告)日：2011-04-19
申请号：US12181199
申请日：2008-07-28
申请人： Pavel Adamec , Carlo Salvesen , Ivo Liska
发明人： Pavel Adamec , Carlo Salvesen , Ivo Liska
IPC分类号： H01J1/50
CPC分类号： H01J37/141 , H01J2237/1405 , Y10T29/4902
摘要： A lens assembly having a magnetic lens assembly for a charged particle beam system is provided. The lens assembly includes: a first pole piece having a connecting portion of the first pole piece and a gap portion of the first pole piece, a second pole piece having a connecting portion of the second pole piece and a gap portion of the second pole piece, wherein the first pole piece and the second pole piece provide a gap at the respective gap portions, a coil for exciting the magnetic lens assembly, a centering element comprising a material that has a smaller Young's modulus than the material of the first and the material of the second pole piece, wherein the pole pieces are connected with each other at the respective connecting portions and have a centering element receiving portion towards the respective gap portion ends of the pole pieces.
摘要翻译：提供了一种具有用于带电粒子束系统的磁性透镜组件的透镜组件。透镜组件包括：第一极片，其具有第一极靴的连接部分和第一极靴的间隙部分，第二极靴具有第二极靴的连接部分和第二极靴的间隙部分，其中所述第一极靴和所述第二极靴在相应的间隙部分处提供间隙，用于激发所述磁性透镜组件的线圈;定心元件，包括具有比所述第一材料和材料的材料更小的杨氏模量的材料所述极片在相应的连接部分处彼此连接并且具有朝向所述极片的相应间隙部分端部的定心元件接收部分。

10. 发明授权

US07919749B2 Energy filter for cold field emission electron beam apparatus 有权
标题翻译：用于冷场发射电子束装置的能量滤波器
公开(公告)号：US07919749B2
公开(公告)日：2011-04-05
申请号：US12234453
申请日：2008-09-19
申请人： Fang Zhou , Juergen Frosien , Pavel Adamec
发明人： Fang Zhou , Juergen Frosien , Pavel Adamec
IPC分类号： H01J37/244
CPC分类号： H01J37/05 , H01J37/073 , H01J37/153 , H01J2237/057 , H01J2237/06341 , H01J2237/1207 , H01J2237/1534 , H01J2237/28
摘要： An electron beam apparatus and a method for providing an energy-filtered primary electron beam are described. Therein, a primary electron beam having an asymmetric first energy distribution is generated by means of an electron source. The primary electron beam is high-pass energy filtered using a retarding lens.
摘要翻译：描述了一种用于提供能量过滤的一次电子束的电子束装置和方法。其中，通过电子源产生具有不对称的第一能量分布的一次电子束。一次电子束是使用延迟透镜进行高通能量滤波。

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