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    • 4. 发明授权
    • Photodetector using a graphene thin film and nanoparticles, and method for producing the same
    • 使用石墨烯薄膜和纳米颗粒的光电检测器及其制造方法
    • US08598568B2
    • 2013-12-03
    • US13392176
    • 2010-08-24
    • Tae-Whan KimJae-Hun JungDong-Ick SonJung-Min LeeHee-Yeon YangWon-Il Park
    • Tae-Whan KimJae-Hun JungDong-Ick SonJung-Min LeeHee-Yeon YangWon-Il Park
    • H01L31/0256
    • H01L31/035209H01L31/112H01L51/428
    • Provided are a photodetector (PD) using a graphene thin film and nanoparticles and a method of fabricating the same. The PD includes a graphene thin film having a sheet shape formed by means of a graphene deposition process using a vapor-phase carbon (C) source and a nanoparticle layer formed on the graphene thin film and patterned to define an electrode region of the graphene thin film, the nanoparticle layer being formed of nanoparticles without a matrix material. The PD has a planar structure using the graphene thin film as a channel and an electrode and using nanoparticles as a photovoltaic material (capable of forming electron-hole pairs due to photoelectron-motive force caused by ultraviolet (UV) light). Since the PD has a very simple structure, the PD may be fabricated at low cost with high productivity. Also, the PD includes the graphene thin film to reduce power consumption.
    • 提供了使用石墨烯薄膜和纳米颗粒的光电检测器(PD)及其制造方法。 PD包括具有通过使用气相碳(C)源的石墨烯沉积方法和形成在石墨烯薄膜上的纳米颗粒层形成的片状的石墨烯薄膜,并且被图案化以限定石墨烯薄膜的电极区域 膜,纳米颗粒层由不含基质材料的纳米颗粒形成。 PD具有使用石墨烯薄膜作为通道和电极的平面结构,并且使用纳米颗粒作为光伏材料(由于由紫外(UV)光引起的光电子运动能力而能够形成电子 - 空穴对)。 由于PD具有非常简单的结构,所以可以以低成本,高生产率制造PD。 此外,PD包括石墨烯薄膜以降低功耗。
    • 9. 发明授权
    • Organic light-emitting display device and thin film deposition apparatus for manufacturing the same
    • 有机发光显示装置及其制造用薄膜蒸镀装置
    • US08907326B2
    • 2014-12-09
    • US12814816
    • 2010-06-14
    • Jung-Min LeeChoong-Ho Lee
    • Jung-Min LeeChoong-Ho Lee
    • H01L29/08C23C14/04C23C14/24H01L51/00H01L27/32H01L51/56
    • H01L51/0011C23C14/042C23C14/044C23C14/243H01L27/3244H01L51/56
    • A thin film deposition apparatus that can be used to manufacture large substrates on a mass scale and that improves manufacturing yield, and an organic light-emitting display device manufactured using the thin film deposition apparatus. The organic light-emitting display device includes: a substrate including a plurality of sub-deposition areas arranged parallel to each other; at least one thin film transistor formed on the substrate, the at least one thin film transistor comprising a semiconductor active layer, a gate electrode insulated from the semiconductor active layer, and source and drain electrodes contacting the semiconductor active layer; a plurality of pixel electrodes formed on the thin film transistor; a plurality of organic layers formed on each of the pixel electrodes; and a counter electrode formed on the organic layers, wherein the plurality of organic layers lie in each of the sub-deposition areas and have a larger shadow zone the further a distance from a center of the corresponding deposition area.
    • 可以用于大规模制造大型基板并提高制造成品率的薄膜沉积装置以及使用薄膜沉积装置制造的有机发光显示装置。 有机发光显示装置包括:包括彼此平行布置的多个次沉积区域的基板; 形成在所述基板上的至少一个薄膜晶体管,所述至少一个薄膜晶体管包括半导体有源层,与半导体有源层绝缘的栅极电极以及与半导体活性层接触的源极和漏极; 形成在所述薄膜晶体管上的多个像素电极; 形成在每个像素电极上的多个有机层; 以及形成在所述有机层上的对电极,其中所述多个有机层位于每个所述次沉积区域中,并且具有比相应的沉积区域的中心更远的阴影区域。
    • 10. 发明授权
    • Method and apparatus for cleaning organic deposition materials
    • 用于清洁有机沉积材料的方法和装置
    • US08802200B2
    • 2014-08-12
    • US12795896
    • 2010-06-08
    • Jung-Min LeeChoong-Ho LeeYoon-Chan OhHee-Seong Jeong
    • Jung-Min LeeChoong-Ho LeeYoon-Chan OhHee-Seong Jeong
    • B05D3/00
    • C23C14/042B08B7/0035B08B7/0042C23C14/564H01L51/56
    • A method of cleaning off organic deposition material accumulated on a mask includes forming an organic deposition material pattern on a substrate using the mask, which includes a plurality of slots, in a deposition chamber including a deposition source; transporting the mask to a stock chamber that is maintained at a vacuum and adjacent to the deposition chamber; and partially cleaning off the organic deposition material accumulated along the boundaries of the slots of the mask in the stock chamber. A system to clean off an organic deposition material accumulated on a mask having a plurality of slots, includes a deposition chamber including a deposition source; and a stock chamber that is maintained at substantially the same vacuum as the deposition chamber and includes a cleaning device that cleans off the organic deposition material accumulated on the mask.
    • 清理积聚在掩模上的有机沉积材料的方法包括:在包括沉积源的沉积室中,使用包括多个槽的掩模在基板上形成有机沉积材料图案; 将掩模运送到保持在真空并邻近沉积室的储存室; 并且部分地清除沿着储存室中的掩模的槽的边界积聚的有机沉积材料。 一种清除积聚在具有多个狭缝的掩模上的有机沉积材料的系统,包括:沉积室,包括沉积源; 以及保持在与沉积室基本相同的真空的储存室,并且包括清除积聚在掩模上的有机沉积材料的清洁装置。