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    • 3. 发明授权
    • Retainer and substrate storage container
    • 保持器和基板储存容器
    • US08356713B2
    • 2013-01-22
    • US12741168
    • 2008-10-30
    • Osamu Ogawa
    • Osamu Ogawa
    • B65D85/48
    • H01L21/67369
    • A retainer includes a frame, a pair of first elastic parts projected from a pair of opposing parts of the frame so as to approach to each other, and a second elastic part that is supported at the bent free ends of the paired first elastic parts to hold a substrate. The outside end of the second elastic part is positioned outside the free end of the first elastic part and closer to the opposing part of the frame. Also, first and second holds for holding the rim of the substrate are formed apart from each other. The second hold is positioned on the outer end side of the second elastic part from the first hold.
    • 保持器包括框架,从框架的一对相对部分突出以使得彼此接近的一对第一弹性部件和被支撑在成对的第一弹性部件的弯曲自由端处的第二弹性部件, 握住底物。 第二弹性部分的外端位于第一弹性部分的自由端的外侧并且更靠近框架的相对部分。 此外,用于保持基板的边缘的第一和第二保持部彼此分开地形成。 第二保持件从第一保持件定位在第二弹性部件的外端侧。
    • 4. 发明申请
    • HERMETIC COMPRESSOR
    • HERMETIC压缩机
    • US20120269667A1
    • 2012-10-25
    • US13497620
    • 2011-08-10
    • Fuminori SakimaOsamu OgawaAtsuo OkaichiNoboru IidaShingo Oyagi
    • Fuminori SakimaOsamu OgawaAtsuo OkaichiNoboru IidaShingo Oyagi
    • F04B17/03
    • F04B39/04F04C18/356F04C23/008F04C23/02F04C29/0021F04C29/026F04C29/045F04C29/12F04C2240/807
    • A hermetic compressor (100) includes a closed casing (2), a compression mechanism (4), a motor (6), a discharge pipe (8), a first balance weight (18), a swirl flow generating portion (21), and a second balance weight (19). The motor (6) has a stator (14) and a rotor (15). A communication passage (20) is formed in the rotor (15) so as to introduce, into an upper space (7), a working fluid compressed in the compression mechanism (4) and discharged to a lower space (5) of the closed casing (2). A baffle plate (122) is provided as a discharge direction deflecting portion for causing the compressed working fluid to travel from the communication passage (20) to the upper space (7), while deflecting the working fluid in a direction inclined with respect to a direction parallel to a rotational axis O. The baffle plate (122) may be constituted by a part of the swirl flow generating portion (21).
    • 封闭式压缩机(100)包括封闭壳体(2),压缩机构(4),马达(6),排放管(8),第一平衡重(18),涡流产生部分(21) ,和第二平衡重(19)。 电动机(6)具有定子(14)和转子(15)。 连通通道(20)形成在转子(15)中,以便在上部空间(7)中将压缩机构(4)中压缩的工作流体引入到封闭的压缩机构(4)的下部空间(5)中 套管(2)。 设置挡板(122)作为排出方向偏转部分,用于使压缩的工作流体从连通通道(20)行进到上部空间(7),同时使工作流体沿相对于 方向平行于旋转轴线O.挡板(122)可以由旋流产生部分(21)的一部分构成。
    • 9. 发明申请
    • SUBSTRATE STORAGE CONTAINER
    • 基板存储容器
    • US20120298549A1
    • 2012-11-29
    • US13577448
    • 2011-02-14
    • Yoshiaki FujimoriOsamu Ogawa
    • Yoshiaki FujimoriOsamu Ogawa
    • B65D85/00
    • H01L21/67772H01L21/67373H01L21/67379H01L21/67396
    • A substrate storage container is disclosed that includes: a container body that stores semiconductor wafers W being supported by pairs of left and right supporting pieces; a removable door that opens and closes an open front of container body; and interface portions that are provided in the container body and the door and are connected to a load port apparatus of processing equipment. The door is positioned and connected to the load port apparatus when the open front of container body is opened and closed by the door. The container body, its paired supporting pieces, the door and the interface portions are all formed of conductive materials so that their surface resistance values are specified to fall within the range of 103 to 1012Ω, to thereby inhibit adherence of particles to these due to electrification of static electricity.
    • 公开了一种基板储存容器,其包括:储存体,其存储由左右支撑件对支撑的半导体晶片W; 打开和关闭容器主体开口前部的可拆卸门; 以及设置在容器主体和门中并且连接到处理设备的负载端口装置的接口部分。 当容器主体的敞开的前部被门打开和关闭时,门被定位并连接到负载端口装置。 容器主体,其成对的支撑件,门和接口部分都由导电材料形成,使得它们的表面电阻值被规定在103至1012Ω和OHgr的范围内,从而抑制由于 静电电气化。
    • 10. 发明申请
    • SUBSTRATE-STORING CONTAINER
    • 基板储存容器
    • US20120103860A1
    • 2012-05-03
    • US13382439
    • 2010-06-28
    • Hidehiro MasukoHiroshi MimuraOsamu Ogawa
    • Hidehiro MasukoHiroshi MimuraOsamu Ogawa
    • B65D85/00
    • G03F1/66H01L21/67366H01L21/67373H01L21/67389
    • A substrate storing container has a container body for accommodating substrates; and a door that is detachably fitted to an opening of the container body with a gasket interposed therebetween. The container body and door are separately formed of molding material containing synthetic resin having a water absorption of 0.1% or lower and outgassing in a total amount of 15 ppm or lower when measured after a 24 hour heating at 80 deg. C. by the dynamic headspace technique. The synthetic resin in the molding material is at least one kind selected from cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, polyethylene terephthalate, and an alloy resin of cycloolefin polymer, liquid crystal polymer, polyetheretherketone, polybutylene terephthalate, or polyethylene terephthalate.
    • 基板收纳容器具有用于容纳基板的容器体; 以及可拆卸地装配到容器主体的开口的门,其间插入垫圈。 容器主体和门由在80度下加热24小时后测量时含有吸水率为0.1%以下的合成树脂的成型材料和总量为15ppm以下的除气分开形成。 C.通过动态顶空技术。 成型材料中的合成树脂是选自环烯烃聚合物,液晶聚合物,聚醚醚酮,聚对苯二甲酸丁二醇酯,聚对苯二甲酸乙二醇酯,环烯烃聚合物,液晶聚合物,聚醚醚酮,聚对苯二甲酸丁二醇酯或聚对苯二甲酸乙二醇酯的合金树脂中的至少一种。