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    • 10. 发明申请
    • ONE-DIMENSIONAL TITANIUM NANOSTRUCTURE AND METHOD FOR FABRICATING THE SAME
    • 一维钛纳米结构及其制备方法
    • US20140193289A1
    • 2014-07-10
    • US13846047
    • 2013-03-18
    • NATIONAL CHIAO TUNG UNIVERSITY
    • Tze-Lung CHENHsin-Tien CHIUChi-Young LEE
    • C23C16/44
    • C30B29/02B22F1/0025B22F9/30B22F2201/40C23C16/08C23C16/46C30B25/005C30B25/16C30B29/60C30B29/602
    • A one-dimensional titanium nanostructure and a method for fabricating the same are provided. A titanium metal reacts with titanium tetrachloride to form the one-dimensional titanium nanostructure on a heat-resistant substrate in a CVD method and under a reaction condition of a reaction temperature of 300-900° C., a deposition temperature of 200-850° C., a flow rate of the carrier gas of 0.1-50 sccm and a reaction time of 5-60 hours. The titanium nanostructure includes titanium nanowires, titanium nanobelts, flower-shaped titanium nanowires, titanium nanorods, titanium nanotubes, and titanium-titanium dioxide core-shell structures. The titanium nanostructure can be densely and uniformly grown on the heat-resistant substrate. The present invention neither uses a template nor uses the complicated photolithographic process, solution preparation process, and mixing-coating process. Therefore, the process scale-up, cost down, and the simplified production process are achieved.
    • 提供一维钛纳米结构及其制造方法。 钛金属与四氯化钛反应,在CVD法中在耐热基材上形成一维钛纳米结构,在反应温度为300-900℃,沉积温度为200-850℃的反应条件下 C.,载气的流速为0.1-50sccm,反应时间为5-60小时。 钛纳米结构包括钛纳米线,钛纳米带,花形钛纳米线,钛纳米棒,钛纳米管和钛 - 二氧化钛核 - 壳结构。 钛纳米结构可以在耐热基材上密集均匀地生长。 本发明既不使用模板也不使用复杂的光刻工艺,溶液制备工艺和混合涂布工艺。 因此,实现了过程规模化,成本降低和简化生产过程。