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    • 8. 发明申请
    • FILM CRACK DETECTING APPARATUS AND FILM FORMING APPARATUS
    • 薄膜检测设备和薄膜成型设备
    • US20140020626A1
    • 2014-01-23
    • US13943981
    • 2013-07-17
    • TOKYO ELECTRON LIMITED
    • Yudo SUGAWARAKazuhide HASEBE
    • G01N29/14
    • G01N29/14G01N29/11G01N29/40G01N29/42G01N29/4427G01N2291/0237
    • Provided is a film crack detecting apparatus capable of recognizing a possibility of occurrence of particles in real time by detecting film cracks of an unnecessary film adhered to a probe unit provided in a processing container. The film crack detecting apparatus is provided in a film forming apparatus, which includes a processing container configured to accommodate an object to be processed and forms a thin film on a surface of the object, to perform a film crack detection operation. The film crack detecting apparatus includes a probe unit installed within the processing container, an elastic wave detecting unit attached to an end of the probe unit to detect an elastic wave, and a determination unit configured to determine whether the maintenance of the processing container is necessary based on a detection result of the elastic wave detecting unit.
    • 本发明提供一种薄膜裂纹检测装置,其能够通过检测附着在设置在处理容器中的探针单元上的不需要的膜的薄膜裂纹来实时识别颗粒发生的可能性。 薄膜破裂检测装置设置在成膜装置中,该成膜装置包括处理容器,该处理容器构造成容纳待处理物体,并在物体的表面上形成薄膜,以进行膜裂纹检测操作。 薄膜破裂检测装置包括安装在处理容器内的探针单元,弹性波检测单元,安装在探针单元的一端以检测弹性波;以及确定单元,其被配置为确定处理容器的维护是否需要 基于弹性波检测单元的检测结果。