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1. 发明公开

US20230160924A1 PROBE, METHOD OF MANUFACTURING A PROBE AND SCANNING PROBE MICROSCOPY SYSTEM 审中-公开
公开(公告)号：US20230160924A1
公开(公告)日：2023-05-25
申请号：US16760210
申请日：2018-10-31
申请人： Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
发明人： Roelof Willem HERFST , Albert DEKKER , Anton Adriaan BIJNAGTE , Jan Jacobus Benjamin BIEMOND
IPC分类号： G01Q70/02 , G01Q70/10 , G01Q70/16
CPC分类号： G01Q70/02 , G01Q70/10 , G01Q70/16
摘要： This document relates to a probe for use in a scanning probe microscopy device. The probe comprises a cantilever and a probe tip being located at a first end section of the cantilever. The cantilever is configured for bending in a Z-direction perpendicular to a surface of a substrate in use. The cantilever comprises a neck section and a paddle section, and the probe tip is located on the paddle section. The neck section has a width and height in cross section thereof, comprises a base part having a rectangular cross section. The cantilever at least across a length of the neck section comprises a ridge extending in a direction away from the base part. The base part and the ridge together define the width and height of the neck section, and have dimensions such that a vertical bending stiffness of the cantilever for bending in the Z-direction matches a lateral stiffness of the cantilever with respect to forces acting on the probe tip in a direction transverse to the Z-direction. The document further describes a manufacturing method.

2. 发明授权

US10493558B2 Nanoprocessing and heterostructuring of silk 有权
公开(公告)号：US10493558B2
公开(公告)日：2019-12-03
申请号：US16103751
申请日：2018-08-14
申请人： INDIAN INSTITUTE OF SCIENCE EDUCATION AND RESEARCH
发明人： Kamal Priya Singh , Mehra Singh Sidhu , Bhupesh Kumar
IPC分类号： B23K26/00 , B81C1/00 , B23K26/0622 , A61L27/22 , B23K26/03 , B23K26/046 , B23K26/06 , B23K26/22 , B29C65/16 , B29C65/00 , G01Q40/00 , G01Q70/16 , B29K33/00 , B29K83/00 , B29L11/00 , B29L31/40
CPC分类号： B23K26/0006 , A61L27/227 , B23K26/032 , B23K26/046 , B23K26/0624 , B23K26/0626 , B23K26/22 , B29C65/1616 , B29C66/0224 , B29C66/0324 , B29C66/69 , B29C66/712 , B29C66/729 , B81C1/00126 , G01Q40/00 , G01Q70/16 , B29K2033/12 , B29K2083/00 , B29K2089/00 , B29L2011/0041 , B29L2031/40 , B81C2201/038
摘要： The present invention relates to nanoprocessing and heterostructuring of silk. It has been shown that few-cycle femtosecond pulses are ideal for controlled nanoprocessing and heterostructuring of silk in air. Two qualitatively different responses, ablation and bulging, were observed for high and low laser fluence, respectively. Using this approach, new classes of silk-based functional topological microstructures and heterostructures which can be optically propelled in air as well as on fluids remotely with good control have been fabricated.

3. 发明申请

US20190204353A1 METHODS FOR DESIGNING AND PROCESSING A MICROCANTILEVER-BASED PROBE WITH AN IRREGULAR CROSS SECTION APPLIED IN AN ULTRA-LOW FRICTION COEFFICIENT MEASUREMENT AT A NANOSCALE SINGLE-POINT CONTACT 审中-公开
公开(公告)号：US20190204353A1
公开(公告)日：2019-07-04
申请号：US16290981
申请日：2019-03-04
申请人： Southwest Jiaotong University
发明人： Linmao QIAN , Liang JIANG , Bin LIN , Jianbin LUO
IPC分类号： G01Q70/16
CPC分类号： G01Q70/16 , G01N19/02 , G01Q60/26 , G01Q70/10
摘要： A method for designing and processing a microcantilever-based probe with an irregular cross section applied in the ultra-low friction coefficient measurement at a nanoscale single-point contact includes: first, establishing a universal theoretical model of the friction coefficient measurement; then, combined with the structural features of the microcantilever-based probe with the irregular cross section, establishing a specific theoretical model of the friction coefficient measurement suitable for the microcantilever-based probe with the irregular cross section; and based on above, combined with constraint conditions such as the friction coefficient resolution, the loadable maximum positive pressure or the measurable minimum friction force, and the atomic force microscope characteristics, etc., designing the microcantilever-based probe with the irregular cross section meeting the measurement requirements.

4. 发明授权

US10060948B2 Scanning probe and electron microscope probes and their manufacture 有权
公开(公告)号：US10060948B2
公开(公告)日：2018-08-28
申请号：US15235889
申请日：2016-08-12
申请人： Tiptek, LLC
发明人： Joseph W. Lyding , Gregory S. Girolami , Scott P. Lockledge , Jinju Lee
IPC分类号： G01Q70/16 , G01Q70/10 , G01Q60/00 , G01Q60/16
CPC分类号： G01Q70/10 , G01Q60/00 , G01Q60/16 , G01Q70/16 , H01J37/28
摘要： Methods are described for the economical manufacture of Scanning Probe and Electron Microscope (SPEM) probe tips. In this method, multiple wires are mounted on a stage and ion milled simultaneously while the stage and mounted probes are tilted at a selected angle relative to the ion source and rotated. The resulting probes are also described. The method provides sets of highly uniform probe tips having controllable properties for stable and accurate scanning probe and electron microscope (EM) measurements.

5. 发明授权

US09389244B2 Vertical embedded sensor and process of manufacturing thereof 有权
标题翻译：垂直嵌入式传感器及其制造工艺
公开(公告)号：US09389244B2
公开(公告)日：2016-07-12
申请号：US14271344
申请日：2014-05-06
申请人： Applied Nanostructures, Inc.
发明人： Jeremy J. Goeckeritz , Gary D. Aden , Ami Chand , Josiah F. Willard
IPC分类号： G01Q70/14 , G01Q60/58 , G01Q70/16 , B82Y35/00
CPC分类号： G01Q70/14 , B82Y35/00 , G01Q60/58 , G01Q70/16
摘要： A scanning probe assembly having a nanometer sensor element defined at a tip apex and its method of fabrication using micro-electromechanical systems (MEMS) processing techniques. The assembly comprises a probe body, a cantilever extending outward, and a hollow tip at the end of the cantilever. A first conductive material is disposed on the hollow tip, followed by a dielectric layer thus embedding the conductive layer. A nanometer hole is milled through the tip, first conductor and dielectric materials. A metal sensor element is deposited by means of electrochemical deposition in the through-hole. A second conductor is deposited on a lower layer. The first and second conductors form electrical connections to the sensor element in the tip. The intra-tip metal, in combination with other layers, may form a thermocouple, thermistor, Schottky diode, ultramicroelectrode, or Hall Effect sensor, and used as a precursor to grow spikes such a nanotubes.
摘要翻译：具有限定在顶端顶点处的纳米传感器元件的扫描探针组件及其使用微机电系统（MEMS）处理技术的制造方法。组件包括探针主体，向外延伸的悬臂和悬臂末端的中空尖端。第一导电材料设置在中空尖端上，随后是介电层从而嵌入导电层。通过尖端，第一导体和电介质材料研磨纳米孔。金属传感器元件通过电化学沉积沉积在通孔中。第二导体沉积在下层上。第一和第二导体与尖端中的传感器元件形成电连接。尖端金属与其他层结合可形成热电偶，热敏电阻，肖特基二极管，超微电极或霍尔效应传感器，并用作生长诸如纳米管的尖峰的前体。

6. 发明申请

US20150309073A1 MULTIFUNCTIONAL GRAPHENE COATED SCANNING TIPS 审中-公开
标题翻译：多功能石墨涂层扫描提示
公开(公告)号：US20150309073A1
公开(公告)日：2015-10-29
申请号：US14414042
申请日：2013-07-12
申请人： NORTHWESTERN UNIVERSITY
发明人： Chad A. Mirkin , Wooyoung Shim , Keith A. Brown , Boris Rasin , Xing Liao , Xiaozhu Zhou
IPC分类号： G01Q70/06 , G01Q70/16 , G01Q80/00 , G01Q70/14
CPC分类号： G01Q70/06 , G01Q70/14 , G01Q70/16 , G01Q80/00 , G03F7/0002
摘要： A coat micro tip can include a tip having a base and an oppositely disposed tip end having a radius of curvature of less than 1 μm and a graphene film conformally coated on the tip. A method of making a graphene coated tip can include immersing a tip in a fluid comprising a graphene film floating on a surface of the fluid over the tip, disposing the immersed tip at an angle relative to the graphene film floating on the surface of the fluid as measured from a plane parallel to the base of the tip, and coating the tip with the graphene film by gradually bringing the graphene film into contact with the tip while maintaining the relative angle between the floating portion of the film and the tip during coating
摘要翻译：涂层微尖端可以包括具有基部和相对设置的具有小于1μm的曲率半径的尖端的尖端和在尖端上共形涂覆的石墨烯膜。制造石墨烯涂覆的尖端的方法可以包括将尖端浸入包含漂浮在流体的表面上的石墨烯膜的流体超过尖端，将浸没的尖端相对于漂浮在流体表面上的石墨烯膜设置成一定角度从平行于尖端的基底的平面测量，并且通过逐渐使石墨烯膜与尖端接触而涂覆具有石墨烯膜的尖端，同时在涂覆期间保持膜的浮动部分与尖端之间的相对角度

7. 发明申请

US20150204903A1 MEASUREMENT OF SURFACE ENERGY COMPONENTS AND WETTABILITY OF RESERVOIR ROCK UTILIZING ATOMIC FORCE MICROSCOPY 有权
标题翻译：表面能量组分的测量和使用原子力显微镜的储层岩石的湿度
公开(公告)号：US20150204903A1
公开(公告)日：2015-07-23
申请号：US14158359
申请日：2014-01-17
申请人： SCHLUMBERGER TECHNOLOGY CORPORATION , SAUDI ARAMCO
发明人： AHMED GMIRA , WAEL ABDALLAH , Mikhail Stukan , JOHANNES J. M. BUITING
IPC分类号： G01Q60/38
CPC分类号： G01Q60/38 , G01Q30/04 , G01Q30/14 , G01Q60/24 , G01Q60/28 , G01Q70/02 , G01Q70/08 , G01Q70/14 , G01Q70/16
摘要： An instrument (and corresponding method) performs AFM techniques to characterize properties of a sample of reservoir rock. The AFM instrument is configured to have a probe with a tip realized from reservoir rock that corresponds to the reservoir rock of the sample. The AFM instrument is operated to derive and store data representing adhesion forces between the tip and the sample at one or more scan locations in the presence of a number of different fluids disposed between the tip and the sample. The AFM instrument is further configured to perform computational operations that process the data representing the adhesion forces for a given scan location in order to characterize at least one property of the rock sample at the given scan location. The properties can include total surface energy of the rock sample as well as wettability of the rock sample.
摘要翻译：仪器（和相应的方法）执行AFM技术来表征储层岩石样品的性质。 AFM仪器被配置为具有从储层岩石实现的具有对应于样品的储层岩石的尖端的探针。操作AFM仪器以在存在位于尖端和样品之间的许多不同流体的情况下在一个或多个扫描位置导出和存储表示尖端和样品之间的粘附力的数据。 AFM仪器还被配置为执行计算操作，其处理表示给定扫描位置的粘附力的数据，以便表征给定扫描位置处的岩石样品的至少一个性质。这些性质可以包括岩石样品的总表面能以及岩石样品的润湿性。

8. 发明申请

US20150185249A1 PROBE CONFIGURATION AND METHOD OF FABRICATION THEREOF 有权
标题翻译：探头配置及其制造方法
公开(公告)号：US20150185249A1
公开(公告)日：2015-07-02
申请号：US14527526
申请日：2014-10-29
申请人： IMEC , Katholieke Universiteit Leuven
发明人： Thomas HANTSCHEL , Menelaos TSIGKOURAKOS , Wilfried VANDERVORST
IPC分类号： G01Q70/14 , G01Q70/16
CPC分类号： G01Q70/14 , B82Y35/00 , G01Q70/16
摘要： The disclosed technology relates generally to probe configurations, and more particularly to probe configurations and methods of making probe configurations that have a diamond body and a diamond layer covering at least an apex region of the diamond body. In one aspect, a method of fabricating a probe configuration includes forming a probe tip. Forming the probe tip includes providing a substrate and forming a recessed mold into the substrate on a first side of the substrate, wherein the recessed mold is shaped to form a probe body having an apex region. Forming the probe tip additionally includes forming a first diamond layer on the substrate on the first side, wherein forming the first diamond layer includes at least partially filling the recessed mold with the first diamond layer such that a probe body having an apex region is formed in the recessed mold. Forming the probe tip additionally includes patterning to remove at least partially the first diamond layer which surrounds the probe body, removing a substrate material surrounding at least the apex region of the probe body, and forming a second diamond layer covering at least the apex region of the probe body. The method additionally includes attaching the probe tip to a first end of a cantilever and attaching the second end of the cantilever to a holder.
摘要翻译：所公开的技术通常涉及探针结构，更具体地涉及制造具有金刚石体和金刚石层的探针构型的探针结构和方法，所述探针构型覆盖金刚石体的至少顶点区域。一方面，制造探针构型的方法包括形成探针尖端。形成探针尖端包括提供衬底并在衬底的第一侧上将衬底形成凹入的模具，其中凹形模具被成形为形成具有顶点区域的探针体。形成探针尖端还包括在第一侧上在基底上形成第一金刚石层，其中形成第一金刚石层包括用第一金刚石层至少部分地填充凹模，使得具有顶点区域的探针体形成在凹进的模具。形成探针尖端另外包括图案化以至少部分去除围绕探针体的第一金刚石层，去除围绕探针体的至少顶点区域的基底材料，以及形成覆盖至少顶点区域的第二金刚石层探头体。该方法还包括将探针尖端附接到悬臂的第一端并且将悬臂的第二端附接到保持器。

9. 发明申请

US20140366230A1 MINIATURIZED CANTILEVER PROBE FOR SCANNING PROBE MICROSCOPY AND FABRICATION THEREOF 有权
标题翻译：微型扫描仪扫描探针显微镜及其制作方法
公开(公告)号：US20140366230A1
公开(公告)日：2014-12-11
申请号：US14305588
申请日：2014-06-16
申请人： Bruker-Nano, Inc.
发明人： Weijie Wang , Chanmin Su
IPC分类号： G01Q70/08 , G01Q70/16
CPC分类号： G01Q60/38 , G01Q70/00 , G01Q70/02 , G01Q70/08 , G01Q70/14 , G01Q70/16 , G01R1/06727
摘要： Cantilever probes are formed from a multilayer structure comprising an upper substrate, a lower substrate, an interior layer, a first separation layer, and a second separation layer, wherein the first separation layer is situated between the upper substrate and the interior layer, the second separation layer is situated between the lower substrate and the interior layer, and wherein the first and the second separation layers are differentially etchable with respect to the first and the second substrates, the interior layer. The upper substrate is a first device layer from which a probe tip is formed. The interior layer is a second device layer from which a cantilever arm is formed. The lower substrate is a handle layer from which a handle, or base portion, is formed. Patterning and etching processing of any layer is isolated from the other layers by the separation layers.
摘要翻译：悬臂探针由包括上基板，下基板，内层，第一分离层和第二分离层的多层结构形成，其中第一分离层位于上基板和内层之间，第二分离层分离层位于下基板和内层之间，并且其中第一和第二分离层相对于第一和第二基板（内层）可差分蚀刻。上基板是形成探针尖端的第一器件层。内层是形成悬臂的第二装置层。下基板是手柄层，从该手柄层形成手柄或基部。任何层的图案化和蚀刻处理通过分离层与其他层隔离。

10. 发明申请

US20140242805A1 LASER-ENHANCED CHEMICAL ETCHING OF NANOTIPS 有权
标题翻译：激光增强化学蚀刻NANOTIPS
公开(公告)号：US20140242805A1
公开(公告)日：2014-08-28
申请号：US14097211
申请日：2013-12-04
申请人： GLOBALFOUNDRIES Singapore Pte. Ltd.
发明人： ZhiHong MAI , Jeffrey C. LAM , Mohammed Khalid BIN DAWOOD , Tsu Hau NG
IPC分类号： G01Q70/16 , C25F3/02 , H01L21/3213
CPC分类号： G01Q70/16 , B82Y35/00 , C25F3/08 , G01R3/00
摘要： A method for sharpening a nanotip involving a laser-enhanced chemical etching is provided. The method includes immersing a nanotip in an etchant solution. The nanotip includes a base and an apex, the apex having a diameter smaller than a diameter of the base. The method also includes irradiating the nanotip with laser fluence to establish a temperature gradient in the nanotip along a direction from the apex to the base of the nanotip such that the apex and base are etched at different rates.
摘要翻译：提供了一种锐化涉及激光增强化学蚀刻的纳米尖端的方法。该方法包括将纳米尖端浸入蚀刻剂溶液中。纳米尖端包括基部和顶点，该顶点的直径小于基部的直径。该方法还包括用激光能量密度照射纳米尖端，以在纳米尖端沿着从纳米尖端的顶点到底部的方向建立温度梯度，使得顶点和底座以不同的速率被蚀刻。

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