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    • 4. 发明授权
    • Dual beamsplitting element based excimer laser pulse stretching device
    • 基于双分光元件的准分子激光脉冲拉伸装置
    • US09537280B2
    • 2017-01-03
    • US14925197
    • 2015-10-28
    • The Institute of Optics and Electronics, The Chinese Academy of Sciences
    • Bincheng LiQiang WangYanling Han
    • H01S3/223H01S3/081H01S3/00H01S3/225
    • H01S3/0817H01S3/0057H01S3/0813H01S3/225
    • The present invention discloses a dual beamsplitting element based excimer laser pulse stretching device comprising two beam splitting elements and one confocal resonator. The first beamsplitting element splits incident laser beam into two beams, one beam enters the confocal resonator, generates a certain time delay and then is incident on the second beamsplitting element, and the second beam is directly incident on the second beamsplitting element. The second beamsplitting element further splits each of the incident laser beams into two beams, one of the two beams enters the confocal resonator, generates a certain time delay and is returned back to the first beamsplitting element to be further split, and the other of the two beams is combined with other beams which are direct outputs after being split by the beamsplitting elements or being optically delayed by the confocal resonator to form a stretched output beam. The present invention may effectively enhance the efficiency of the pulse stretching, decrease the peak power of the stretched beam, and increase the lifetime of optical elements used in the excimer laser photolithography systems.
    • 本发明公开了一种基于双分束元件的准分子激光脉冲拉伸装置,包括两个分束元件和一个共焦共振器。 第一分束元件将入射激光束分成两束,一束光进入共焦共振器,产生一定的时间延迟,然后入射到第二分光元件上,第二光束直接入射到第二分光元件上。 第二分束元件进一步将每个入射的激光束分成两束,两束光中的一束进入共焦共振器,产生一定的时间延迟并返回到第一分光元件进一步分裂,另一个 两个光束与由分束元件分裂之后的直接输出的其他光束组合,或被共焦共振器光学延迟以形成延伸的输出光束。 本发明可以有效地提高脉冲拉伸的效率,降低拉伸光束的峰值功率,并且增加在准分子激光光刻系统中使用的光学元件的寿命。