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1. 发明授权

US07109634B2 End surface reflection type surface acoustic wave device 有权
标题翻译：端面反射型声表面波装置
公开(公告)号：US07109634B2
公开(公告)日：2006-09-19
申请号：US10734228
申请日：2003-12-15
申请人： Takeshi Nakao , Kenji Nishiyama , Tetsuya Kimura , Michio Kadota
发明人： Takeshi Nakao , Kenji Nishiyama , Tetsuya Kimura , Michio Kadota
IPC分类号： H03H9/25
CPC分类号： H03H9/02834 , H03H9/02677
摘要： A surface acoustic wave device with improved reflection characteristics, in which an insulating film is formed so as to cover an electrode film, and the electrode film is made from Al or an Al alloy, includes a piezoelectric substrate, an electrode film which is formed of Al or an alloy including Al as a major component on the piezoelectric substrate and which defines at least one interdigital transducer, and an insulating film arranged on the piezoelectric substrate so as to cover the electrode film, the average density of the electrode film is less than or equal to about 1.5 times the density of the insulating film, wherein the top surface of the insulating film is planarized.
摘要翻译：具有改善的反射特性的表面声波器件，其中形成绝缘膜以覆盖电极膜，并且所述电极膜由Al或Al合金制成，包括压电基片，电极膜，由 Al或包含Al作为主要成分的合金，并且限定至少一个叉指换能器，以及布置在压电基板上以覆盖电极膜的绝缘膜，电极膜的平均密度小于或等于绝缘膜密度的约1.5倍，其中绝缘膜的顶表面被平坦化。

2. 发明授权

US10615772B2 Acoustic wave resonators having Fresnel surfaces 有权
公开(公告)号：US10615772B2
公开(公告)日：2020-04-07
申请号：US15639478
申请日：2017-06-30
申请人： Texas Instruments Incorporated
发明人： Ting-Ta Yen
IPC分类号： H03H9/02 , H03H9/25 , H03H9/00
CPC分类号： H03H9/02677 , H03H9/0009 , H03H9/02543 , H03H9/02574 , H03H9/02629 , H03H9/25
摘要： Acoustic wave resonators having Fresnel features are disclosed. An example integrated circuit package includes an acoustic wave resonator, the acoustic wave resonator including a Fresnel surface. In some examples, the Fresnel surface includes a plurality of recessed features and/or protruding features at different locations on the Fresnel surface, each of the plurality of features to confine main mode acoustic energy from a respective portion of the Fresnel surface in a central portion of the acoustic wave resonator.

3. 发明申请

US20040140734A1 End surface reflection type surface acoustic wave device 有权
标题翻译：端面反射型声表面波装置
公开(公告)号：US20040140734A1
公开(公告)日：2004-07-22
申请号：US10734228
申请日：2003-12-15
申请人： Murata Manufacturing Co., Ltd.
发明人： Takeshi Nakao , Kenji Nishiyama , Tetsuya Kimura , Michio Kadota
IPC分类号： H03H009/25
CPC分类号： H03H9/02834 , H03H9/02677
摘要： A surface acoustic wave device with improved reflection characteristics, in which an insulating film is formed so as to cover an electrode film, and the electrode film is made from Al or an Al alloy, includes a piezoelectric substrate, an electrode film which is formed of Al or an alloy including Al as a major component on the piezoelectric substrate and which defines at least one interdigital transducer, and an insulating film arranged on the piezoelectric substrate so as to cover the electrode film, the average density of the electrode film is less than or equal to about 1.5 times the density of the insulating film, wherein the top surface of the insulating film is planarized.
摘要翻译：具有改善的反射特性的表面声波器件，其中形成绝缘膜以覆盖电极膜，并且所述电极膜由Al或Al合金制成，包括压电基片，电极膜，由 Al或包含Al作为主要成分的合金，并且限定至少一个叉指换能器，以及布置在压电基板上以覆盖电极膜的绝缘膜，电极膜的平均密度小于或等于绝缘膜密度的约1.5倍，其中绝缘膜的顶表面被平坦化。

4. 发明申请

US20030071539A1 Edge reflection type surface acoustic wave device and manufacturing method for the same 有权
标题翻译：边缘反射型声表面波装置及其制造方法
公开(公告)号：US20030071539A1
公开(公告)日：2003-04-17
申请号：US10242602
申请日：2002-09-13
发明人： Yasuhiro Kuratani , Takao Mukai , Tomoyasu Miyata , Hideharu Yoshikawa
IPC分类号： H03H009/25
CPC分类号： H03H9/02677 , H03H3/08 , H03H9/02629 , H03H9/02669 , Y10T29/42 , Y10T29/49005 , Y10T29/49007 , Y10T29/4908 , Y10T29/49133 , Y10T29/49135 , Y10T83/0215 , Y10T83/0222 , Y10T83/0319
摘要： A method of manufacturing an edge reflection type surface acoustic wave device using a Shear Horizontal type surface acoustic wave includes the steps of making a first half cut defining first end surface portions having a smooth surface, that is, opposing two end surfaces which function as reflection end surfaces, from the upper surface of a piezoelectric substrate after at least one of a plurality of IDTs has been formed on the upper surface of the piezoelectric substrate, making a second half cut for forming second end surface portions having a rough surface after making the first cut, and making a full cut for cutting the piezoelectric substrate so as to reach the lower surface of the piezoelectric substrate outside of the second end surface portions in the surface acoustic wave propagation direction.
摘要翻译：使用剪切水平型表面声波制造边缘反射型弹性表面波器件的方法包括以下步骤：制作具有平滑表面的第一端面部分的第一半切口，即相反的两个反射面在压电基板的上表面上形成有多个IDT中的至少一个之后，在压电基板的上表面之后形成第二半切口，以形成具有粗糙表面的第二端面部分，首先切割，并进行切割，以便在压电基片的表面声波传播方向上的第二端面部分的外侧到达压电基板的下表面。

5. 发明授权

US06373167B1 Surface acoustic wave filter 失效
标题翻译：表面声波滤波器
公开(公告)号：US06373167B1
公开(公告)日：2002-04-16
申请号：US09706745
申请日：2000-11-07
申请人： Susumu Yoshimoto , Yasushi Yamamoto
发明人： Susumu Yoshimoto , Yasushi Yamamoto
IPC分类号： H01L4104
CPC分类号： H03H9/02677 , H03H9/02622 , H03H9/02716 , H03H9/02779 , H03H9/02795 , H03H9/6433 , H03H9/6436
摘要： The present invention disclosed a SAW filter in which unnecessary space on a chip can be reduced in comparison with the prior art, and in which a smaller chip can be realized. Because oblique step shaped reflection surfaces are provided in order to reflect the SAW, a smaller SAW filter than that used in the prior art can be realized.
摘要翻译：本发明公开了一种SAW滤波器，其与现有技术相比可以减少芯片上的不必要的空间，并且可以实现更小的芯片。由于为了反射SAW而设置倾斜的台阶形反射面，因此可以实现比现有技术中使用的SAW滤波器更小的SAW滤波器。

6. 发明授权

US5684437A End face reflection type surface wave resonator 失效
标题翻译：端面反射型表面波谐振器
公开(公告)号：US5684437A
公开(公告)日：1997-11-04
申请号：US623631
申请日：1996-03-28
申请人： Junya Ago , Michio Kadota
发明人： Junya Ago , Michio Kadota
IPC分类号： H03H9/25 , H03H9/02 , H03H9/08 , H03H9/15 , H03H9/64
CPC分类号： H03H9/02669 , H03H9/02653 , H03H9/02677
摘要： An end face reflection type surface wave resonator utilizing a surface wave of an SH type is constructed by forming comb electrodes on one major surface of a piezoelectric substrate, which constitute an IDT, and forming grooves extending from one major surface to the other major surface to form a pair of end faces on which a surface wave is to be reflected the resonator having piezoelectric plate portions outside the grooves.
摘要翻译：利用SH型表面波的端面反射型表面波谐振器通过在构成IDT的压电基板的一个主表面上形成梳状电极，并且形成从一个主表面延伸到另一主表面的凹槽形成一对端面，使表面波在凹槽外侧具有压电板部分的谐振器被反射。

7. 发明授权

US10879870B2 Elastic wave device, front-end circuit, and communication device 有权
公开(公告)号：US10879870B2
公开(公告)日：2020-12-29
申请号：US16375871
申请日：2019-04-05
申请人： Murata Manufacturing Co., Ltd.
发明人： Yutaka Kishimoto , Tetsuya Kimura
IPC分类号： H03H9/02 , H03H9/25 , H03H9/145 , H03H9/64
CPC分类号： H03H9/02653 , H03H9/02007 , H03H9/02574 , H03H9/02622 , H03H9/02669 , H03H9/02677 , H03H9/145 , H03H9/25 , H03H9/64
摘要： An elastic wave device includes a piezoelectric substrate and an IDT electrode provided on the piezoelectric substrate. The IDT electrode includes a busbar electrode extending in an elastic wave propagation direction and electrode fingers connected to the busbar electrode and extending in a direction perpendicular or substantially perpendicular to the elastic wave propagation direction. The piezoelectric substrate includes a groove extending along the elastic wave propagation direction. The groove is provided on a side across the busbar electrode in the perpendicular or substantially perpendicular direction from a side at which the electrode fingers are located.

8. 发明授权

US09825609B2 Laterally coupled multi-mode monolithic filter 有权
公开(公告)号：US09825609B2
公开(公告)日：2017-11-21
申请号：US14879808
申请日：2015-10-09
申请人： TAIYO YUDEN CO., LTD.
发明人： Masafumi Iwaki , Takashi Matsuda
IPC分类号： H03H9/02 , H03H9/64 , H03H9/56
CPC分类号： H03H9/02228 , H03H9/02677 , H03H9/564 , H03H9/64
摘要： A laterally coupled multi-mode monolithic filter includes: a substrate; a piezoelectric film formed on the substrate; a ground electrode formed on a first surface of the piezoelectric film; and signal electrodes formed on a second surface of the piezoelectric film and arranged in parallel to each other, the second surface being opposite to the first surface, each of the signal electrodes including a first electrode finger and a second electrode finger, wherein the first electrode finger and the second electrode finger have different electric potentials; adjacent signal electrodes of the signal electrodes are at a distance from each other, the distance being greater than a pitch of the first electrode finger and the second electrode finger.

9. 发明授权

US09088263B2 Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus 有权
标题翻译：表面声波谐振器，表面声波振荡器和电子设备
公开(公告)号：US09088263B2
公开(公告)日：2015-07-21
申请号：US13162162
申请日：2011-06-16
申请人： Kunihito Yamanaka
发明人： Kunihito Yamanaka
IPC分类号： H03H9/25 , H03H9/125 , H03B5/32 , H03H9/02 , H03H9/00
CPC分类号： H03H9/02551 , H03B5/326 , H03H9/02653 , H03H9/02661 , H03H9/02669 , H03H9/02677 , H03H9/64 , H03H2009/0019
摘要： A surface acoustic wave (SAW) resonator and a SAW oscillator and an electronic apparatus including the resonator are to be provided. A SAW resonator includes: an IDT exciting a SAW using a quartz crystal substrate of Euler angles (−1.5°≦φ≦1.5°, 117°≦θ≦142°, 42.79°≦|ψ|≦49.57°); one pair of reflection units arranged so as allow the IDT to be disposed therebetween; and grooves acquired by depressing the quartz crystal substrate located between electrode fingers. When a wavelength of the SAW is λ, and a depth of the grooves is G, “0.01λ≦G” is satisfied.
摘要翻译：提供表面声波（SAW）谐振器和SAW振荡器以及包括谐振器的电子设备。一种SAW谐振器包括：使用欧拉角（-1.5°＆amp; nlE; 1.5°，117°＆nlE;＆amp; Thetas;＆nlE; 142°，42.79°＆nlE; |ψ|＆nlE的石英晶体基板激励SAW的IDT ; 49.57°）; 一对反射单元布置成允许IDT设置在其间; 以及通过按压位于电极指之间的石英晶体衬底获得的凹槽。当SAW的波长为λ，凹槽的深度为G时，满足“0.01λ＆nlE; G”。

10. 发明授权

US06377139B1 Edge reflection type surface acoustic wave device with grooves or steps at the reflection edges 有权
标题翻译：边缘反射型表面声波装置，在反射边缘具有凹槽或台阶
公开(公告)号：US06377139B1
公开(公告)日：2002-04-23
申请号：US09521829
申请日：2000-03-09
申请人： Hideya Horiuchi , Michio Kadota , Junya Ago , Takao Mukai
发明人： Hideya Horiuchi , Michio Kadota , Junya Ago , Takao Mukai
IPC分类号： H03H925
CPC分类号： H03H9/6436 , H03H9/02669 , H03H9/02677 , H03H9/6433 , H03H9/6463
摘要： An edge reflection type surface acoustic wave device utilizes a Shear Horizontal type surface acoustic wave and includes a surface acoustic wave substrate, and at least two interdigital transducers provided on one main surface of the surface acoustic wave substrate. First and second grooves are formed on the opposite ends in the surface acoustic wave propagation direction of the area where the interdigital transducer is provided. The first and second grooves extend from the one main surface of the surface acoustic wave substrate toward the other main surface thereof without reaching the other main surface. The grooves extend substantially perpendicularly to the surface acoustic wave propagation direction so as to define first and second edges for reflecting the surface acoustic wave. The first and second edges are defined by the inner sideively. walls of the first and second grooves, respectively.
摘要翻译：边缘反射型声表面波装置利用剪切水平型弹性表面波，并且包括表面声波基板和设置在弹性表面波基板的一个主表面上的至少两个叉指式换能器。第一和第二槽形成在设置叉指换能器的区域的表面声波传播方向的相对端。第一和第二槽从声表面波衬底的一个主表面向另一个主表面延伸而不到达另一个主表面。凹槽基本上垂直于声表面波传播方向延伸，以便限定用于反射表面声波的第一和第二边缘。第一和第二边缘由内侧确定。第一和第二槽的壁分别。

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