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    • 2. 发明授权
    • Multi-vane throttle valve
    • 多叶节流阀
    • US08833383B2
    • 2014-09-16
    • US13549771
    • 2012-07-16
    • Pheng Sin
    • Pheng Sin
    • F16K49/00
    • F16K51/02F16K1/222F16K1/223F16K49/007Y10T137/0318Y10T137/6416Y10T137/6579Y10T137/86936Y10T137/87475
    • A multi-vane throttling valve for a vacuum process chamber includes a throttle chamber body having an inside exposed to the vacuum process chamber and an outside exposed to atmospheric pressure, the chamber body defining a through-opening for controlling vacuum within the vacuum process chamber, a plurality of rotatable vanes mounted within the through-opening for controlling a flow of gases through the through-opening where each rotatable vane includes a cooling flow pathway in fluid communication with and disposed longitudinally along each rotatable vane, and a drive mechanism disposed on and connected to an outside of the throttle chamber body for rotating the plurality of rotatable vanes to vary the flow of process gases.
    • 用于真空处理室的多叶片节流阀包括具有暴露于真空处理室的内部和暴露于大气压力的外部的节流室主体,所述室主体限定用于控制真空处理室内的真空的通孔, 安装在所述通孔内的多个可旋转叶片,用于控制通过所述通孔的气体流,其中每个可旋转叶片包括与每个可旋转叶片流体连通并纵向设置的冷却流动路径,以及驱动机构, 连接到节流室主体的外部,用于旋转多个可旋转叶片以改变工艺气体的流动。
    • 3. 发明申请
    • PRESSURE CONTROL VALVE ASSEMBLY OF PLASMA PROCESSING CHAMBER AND RAPID ALTERNATING PROCESS
    • 等离子体加工室的压力控制阀组件和快速交替过程
    • US20130203259A1
    • 2013-08-08
    • US13367951
    • 2012-02-07
    • Jaroslaw W Winniczek
    • Jaroslaw W Winniczek
    • H01L21/3065E21B34/10H01L21/30
    • H01L21/30655H01J37/32834Y10T137/86936
    • A pressure control valve assembly of a plasma processing chamber in which semiconductor substrates are processed includes a housing having an inlet, an outlet and a conduit extending between the inlet and the outlet, the inlet adapted to be connected to an interior of the plasma processing chamber and the outlet adapted to be connected to a vacuum pump which maintains the plasma processing chamber at desired pressure set points during rapid alternating phases of processing a semiconductor substrate in the chamber. A drive mechanism attached to first and second valve plates effects rotation of the first and second valve plates to switch the valve plates between first and second angular orientations to change the degree of alignment of first and second open areas of the valve plates and thereby increase or decrease conductance to achieve desired pressure settings in the chamber.
    • 其中处理半导体衬底的等离子体处理室的压力控制阀组件包括具有入口,出口和在入口和出口之间延伸的导管的壳体,入口适于连接到等离子体处理室的内部 并且所述出口适于连接到真空泵,所述真空泵在处理所述室中的半导体衬底的快速交替阶段期间将所述等离子体处理室维持在期望的压力设定点。 附接到第一和第二阀板的驱动机构实现第一和第二阀板的旋转,以在第一和第二角度取向之间切换阀板,以改变阀板的第一和第二开放区域的对准程度,从而增加或 降低电导以在腔室中实现所需的压力设置。
    • 8. 发明申请
    • Gas control valve
    • 气控阀
    • US20060130906A1
    • 2006-06-22
    • US11354157
    • 2006-02-15
    • Dale James
    • Dale James
    • F16K1/52
    • F16K1/52F16K3/265F16K31/055F16K31/524F16K31/52408F23N1/007F23N2035/24Y10T137/86936Y10T137/87088Y10T137/87378
    • The present invention provides gas control valve including a valve body having a gas inlet, a gas outlet, and a gas passage between the inlet and outlet, and including a valve control element for controlling the flow of gas between the inlet and the outlet. The valve control element includes valve stem have a cam follower in the form of a pin projecting laterally there-from, and a bead 8 at one end of the stem bearing an O-ring that is able to seal against an inside wall surface of the body to seal the gas outlet. The cam follower pin on the stem engages with a cam surface of the valve body. Rotation of the valve control element causes the cam follower pin to co-operate with the cam surface and displace the valve control element to open or close the valve. The present invention also provides a gas appliance having one or more gas burners and a gas control including at least one control value according to the invention.
    • 本发明提供了一种气体控制阀,其包括具有气体入口,气体出口和入口与出口之间的气体通道的阀体,并且包括用于控制入口和出口之间的气体流动的阀控制元件。 阀控制元件包括阀杆,其具有在其侧面突出的销的形式的凸轮从动件,以及在杆的一端处的凸缘8,其具有O形环,所述O形环能够密封在其的内壁表面 身体密封出气口。 杆上的凸轮从动销与阀体的凸轮表面接合。 阀门控制元件的旋转导致凸轮从动销与凸轮表面配合,并使阀门控制元件移位以打开或关闭阀门。 本发明还提供一种具有一个或多个气体燃烧器和包括根据本发明的至少一个控制值的气体控制的燃气器具。
    • 9. 发明申请
    • Throttle valve device for a pneumatic power tool
    • 节气门装置用于气动电动工具
    • US20050006615A1
    • 2005-01-13
    • US10880932
    • 2004-06-30
    • Anders Jansson
    • Anders Jansson
    • F16K1/14F16K39/02F16K31/44
    • F16K1/14F16K39/026Y10T137/86936Y10T137/87265
    • A throttle valve device for a pneumatic power tool comprises a casing (10) with an air inlet passage (11), an air outlet passage (12), a valve chamber (13) with a main valve seat (14) and a main valve element (15), and a manually shiftable activating rod (21) which is sealingly guided in a lateral guide way (19) and arranged to engage and displace the main valve element (15) off the main seat (14), wherein the activating rod (21) has a valve portion (27,28) for co-operation with a secondary valve seat (24) in the guide way (19) for controlling a bypass passage (23,24,29) extending between the inlet passage (11) and the outlet passage (12) such that the activation rod valve portion (27,28) is separated from the secondary valve seat (24) and opens up the bypass passage (23,24,29) before the activation rod (21) engages and displaces the main valve element (15) off the main seat (14) when operating the activation rod (21) in the opening direction.
    • 一种用于气动动力工具的节流阀装置包括具有进气通道(11)的壳体(10),空气出口通道(12),具有主阀座(14)的阀室(13)和主阀 元件(15)以及以横向引导方式(19)密封地引导并被布置成使主阀元件(15)从主座(14)接合并移位的手动可移动启动杆(21),其中激活 杆(21)具有用于与引导方式(19)中的辅助阀座(24)相配合的阀部分(27,28),用于控制在入口通道(23,24,29)之间延伸的旁通通道(23,24,29) 11)和出口通道(12),使得致动杆阀部分(27,28)与次阀座(24)分离,并在启动杆(21)之前打开旁通通道(23,24,29) )当沿着打开方向操作激活杆(21)时将主阀元件(15)从主座(14)移出并移位。
    • 10. 发明授权
    • Filler neck for the fuel tank of a motor vehicle
    • 用于汽车燃油箱的填充颈部
    • US06637477B1
    • 2003-10-28
    • US09936448
    • 2002-04-05
    • Bernhard Maier
    • Bernhard Maier
    • B65B104
    • B60K15/03519B60K15/04Y10T137/86332Y10T137/86936
    • A filler neck for the fuel tank of a motor vehicle. The inventive filler neck comprises a housing (12, 14) which has an outer closure (30) that can pivot between a closed and opened position and which has a second closure element (50) that is accommodated inside the housing. Said second closure element is interactively connected to a ventilating valve (16) which, in order to equalize pressure, automatically opens in the instance of excess pressure inside the fuel tank and opens when inserting the dispensing nozzle (100), said dispensing nozzle causing the closure element (50) to swivel open. The inventive filler neck is characterized by a lever (1) which is pivotally mounted on the housing (12). Said lever is actuated by the dispensing nozzle (100) when the same is inserted, and opens the ventilating valve (16) before the dispensing nozzle (100) causes the second closure element (50) to swivel open.
    • 用于汽车燃油箱的加注口。 本发明的填充颈部包括具有能够在闭合和打开位置之间枢转的外部封闭件(30)的壳体(12,14),并且具有容纳在壳体内的第二闭合元件(50)。 所述第二闭合元件交互地连接到通气阀(16),为了均衡压力,在燃料箱内部的过压的情况下自动打开,并且当插入分配喷嘴(100)时打开,所述分配喷嘴使得 闭合元件(50)旋转打开。 本发明的填充颈部的特征在于可枢转地安装在壳体(12)上的杆(1)。 当分配喷嘴(100)插入时,所述杆由分配喷嘴(100)致动,并且在分配喷嘴(100)使第二闭合元件(50)旋转打开之前打开通气阀(16)。