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1. 发明授权

US11987493B2 Damascene interconnect structure, actuator device, and method of manufacturing damascene interconnect structure 有权
公开(公告)号：US11987493B2
公开(公告)日：2024-05-21
申请号：US17288250
申请日：2019-10-30
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Daiki Suzuki , Nao Inoue , Katsumi Shibayama
IPC分类号： G02B26/08 , B81B3/00 , B81C1/00
CPC分类号： B81B3/0072 , B81C1/00666 , G02B26/0833 , B81B2201/042 , B81B2207/07 , B81C2201/0104 , B81C2201/0181
摘要： The damascene wiring structure includes a base including a main surface provided with a groove, an insulating layer including a first portion provided on an inner surface of the groove and a second portion provided on the main surface, a metal layer provided on the first portion, a wiring portion embedded in the groove, and a cap layer provided to cover the second portion, an end portion of the metal layer, and the wiring portion. A surface of a boundary part between the first portion and the second portion includes an inclined surface inclined with respect to a direction perpendicular to the main surface. The end portion of the metal layer enters between the cap layer and the inclined surface, and in the end portion, a first surface along the cap layer and a second surface along the inclined surface form an acute angle.

2. 发明授权

US11782267B2 Mirror unit 有权
公开(公告)号：US11782267B2
公开(公告)日：2023-10-10
申请号：US17749697
申请日：2022-05-20
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Daiki Suzuki , Tomoyuki Ide , Yuki Morinaga
IPC分类号： G02B26/08 , G02B27/00 , G02B26/10
CPC分类号： G02B27/0031 , G02B26/085 , G02B26/0833 , G02B26/10 , G02B26/101 , G02B27/0006
摘要： A mirror unit includes an optical scanning device, a frame member, and a window member. The frame member includes first and second wall portions facing each other in an X-axis direction. The first wall portion is higher than the second wall portion. The window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface of the optical scanning device. In a cross-section parallel to the X-axis direction, the first wall portion is separated from a first line passing through a first end at a side of the first wall portion in the mirror surface and a first corner portion formed at the side of the first wall portion by an outer surface opposite to the frame member and a first side surface in the window member.

3. 发明授权

US11339050B2 Actuator device 有权
公开(公告)号：US11339050B2
公开(公告)日：2022-05-24
申请号：US16789795
申请日：2020-02-13
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Sadaharu Takimoto , Yuki Morinaga , Daiki Suzuki , Yoshihisa Warashina
IPC分类号： H01L41/113 , H01L41/047 , B81B7/00 , G02B26/08 , B81B3/00
摘要： An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.

4. 外观设计

USD1024819S1 Laser beam reflector 有权
公开(公告)号：USD1024819S1
公开(公告)日：2024-04-30
申请号：US29751338
申请日：2020-09-21
申请人： HAMAMATSU PHOTONICS K.K.
设计人： Daiki Suzuki
摘要： FIG. 1 is a front view of a laser beam reflector of the present invention;
FIG. 2 is a rear view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is a left side view thereof;
FIG. 7 is a front, top plan and right side perspective view thereof;
FIG. 8 is a rear, top plan and left side perspective view thereof;
FIG. 9 is a cross-sectional view along the line 9-9 in FIG. 3;
FIG. 10 is an enlarged cross-sectional view along the line 10-10 in FIG. 1, in the area designated by 10′-10′ in FIG. 1 and 10″-10″ in FIG. 3; and,
FIG. 11 is a rear, top plan and left side perspective view thereof in the state of use.
The features shown in evenly-dashed broken lines depict environmental subject matter only and form no part of the claimed design. The dot-dash broken lines in the drawings represent the bounds of the claimed subject matter, the dot-dash broken lines, themselves forming no part thereof.

5. 发明授权

US11970389B2 Actuator device and method for manufacturing actuator device 有权
公开(公告)号：US11970389B2
公开(公告)日：2024-04-30
申请号：US17267144
申请日：2019-08-09
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Daiki Suzuki
IPC分类号： B81B3/00 , G02B26/08
CPC分类号： B81B3/0045 , G02B26/0833 , B81B2201/042 , B81B2207/07
摘要： An actuator device includes a support portion; a first movable portion; a second movable portion; a first connection portion that connects the first and second movable portions such that the first movable portion is swingable around a first axis; a second connection portion that connects the second movable portion and the support portion such that the first movable portion is swingable around the first axis. Two natural angular frequencies ω1 and ω2 (where ω1

6. 发明授权

US11952265B2 Actuator device 有权
公开(公告)号：US11952265B2
公开(公告)日：2024-04-09
申请号：US17725804
申请日：2022-04-21
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Sadaharu Takimoto , Yuki Morinaga , Daiki Suzuki , Yoshihisa Warashina
IPC分类号： B81B7/00 , B81B3/00 , G02B26/08
CPC分类号： B81B7/0006 , B81B3/0075 , G02B26/08 , G02B26/085 , B81B2201/042 , B81B2201/045 , B81B2203/0154 , B81B2203/0181 , B81B2203/058 , B81B2207/07
摘要： An actuator device includes a support portion, a movable portion, a connection portion which connects the movable portion to the support portion on a second axis, a first wiring which is provided on the connection portion, a second wiring which is provided on the support portion, and an insulation layer which includes a first opening exposing a surface opposite to the support portion in a first connection part located on the support portion in one of the first wiring and the second wiring and covers a corner of the first connection part. The rigidity of a first metal material forming the first wiring is higher than the rigidity of a second metal material forming the second wiring. The other wiring of the first wiring and the second wiring is connected to the surface of the first connection part in the first opening.

7. 发明授权

US11874458B2 Mirror unit 有权
公开(公告)号：US11874458B2
公开(公告)日：2024-01-16
申请号：US18103835
申请日：2023-01-31
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Daiki Suzuki , Tomoyuki Ide , Yuki Morinaga
IPC分类号： G02B26/08 , G02B26/10 , G02B5/08
CPC分类号： G02B26/105 , G02B5/08
摘要： In a mirror unit, a first wall portion is higher than a second wall portion. A window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface. When any one of first to fourth wall portions is set as a first reference wall portion, in a cross-section perpendicular to the first reference wall portion, a first line passing through a first end at a side of the first reference wall portion in the mirror surface and a first corner portion formed at the side of the first reference wall portion by an outer surface and a first side surface in the window member intersects the first wall portion. A wiring portion includes a portion extending inside a base and leads outside a frame member.

8. 发明授权

US11757341B2 Actuator device 有权
公开(公告)号：US11757341B2
公开(公告)日：2023-09-12
申请号：US18090160
申请日：2022-12-28
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Daiki Suzuki , Takuma Osaki , Yasuyuki Sakakibara
IPC分类号： G02B26/08 , H02K33/02
CPC分类号： H02K33/02 , G02B26/085
摘要： An actuator device includes a support part, a first movable part, a second movable part, a first connecting part, a second connecting part, a spiral coil provided to the second movable part, a magnetic field generator, a first external terminal provided to the support part; and a first wiring connected to an inner end portion of the coil and the first external terminal. The first wiring includes a lead wiring connected to the first external terminal, and a straddle wiring formed in a shape of a layer, provided to the second movable part so as to straddle the coil, and connected to the inner end portion of the coil and the lead wiring. A thickness of the straddle wiring is smaller than a thickness of the coil. The straddle wiring is electrically insulated from the mirror surface.

9. 发明授权

US11733511B2 Mirror device 有权
公开(公告)号：US11733511B2
公开(公告)日：2023-08-22
申请号：US17889882
申请日：2022-08-17
申请人： HAMAMATSU PHOTONICS K.K.
发明人： Daiki Suzuki , Takuma Osaki
IPC分类号： G02B26/08 , B81B3/00 , G02B7/182 , G02B26/10
CPC分类号： G02B26/085 , B81B3/00 , G02B7/182 , G02B26/0841 , G02B26/10
摘要： A mirror device includes a support portion, a movable portion, and a pair of torsion bars disposed on both sides of the movable portion on a first axis. The movable portion includes a frame-shaped frame connected to the pair of torsion bars and a mirror unit disposed inside the frame. The mirror unit is connected to the frame in each of a pair of connection regions located on both sides of the mirror unit in a direction parallel to a second axis. A region other than the pair of connection regions in a region between the mirror unit and the frame is a space. An outer edge of the mirror unit and an inner edge of the frame are connected to each other so that a curvature in each of the pair of connection regions is continuous when viewed from a direction perpendicular to the first and the second axes.

10. 发明授权

US11573296B2 Optical module and distance measurement device 有权
公开(公告)号：US11573296B2
公开(公告)日：2023-02-07
申请号：US16489005
申请日：2017-12-20
申请人： HAMAMATSU PHOTONICS K.K. , JAPAN AUTOMOBILE RESEARCH INSTITUTE
发明人： Yuki Morinaga , Daiki Suzuki
IPC分类号： G02B26/08 , G01S7/481 , G02B26/10 , G01S17/931
摘要： An optical module includes a support, a movable part supported by the support so as to be swingable about an axis, a mirror provided to the movable part, a drive coil provided to the movable part, a temperature monitoring element provided to the support, and a magnet that generates a magnetic field acting on the drive coil. The support is thermally connected to the magnet.

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