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91. 发明专利

JPH11170160A POLISHING DEVICE 失效
公开(公告)号：JPH11170160A
公开(公告)日：1999-06-29
申请号：JP33886597
申请日：1997-12-09
申请人： MORI YUZO , JAPAN SCIENCE & TECH CORP , KOYO SEIKO CO
发明人： MORI YUZO , HAMAZAKI KOJI , HIRAOKA TAIJI
IPC分类号： B24B37/00 , B24B53/00
摘要： PROBLEM TO BE SOLVED: To provide a polishing device which can easily maintain a high degree of processing accuracy, which can prevent contamination of a tool due to the atmosphere during molding of the tool, and which can aim at lowering the cost and saving space. SOLUTION: In a polishing device in which a surface to be polished of a workpiece is processed by a working head 10 with the use of a processing solution in which powder particles having such a nature that it is combined with the workpiece under interaction therebetween are dispersed in pure water, there is provided a sapphire knife mechanism part 20 for forming a working sphere 30 in the working head 10. The sapphire knife mechanism 20 is driven by drive parts (an x-drive unit, a y-drive unit and a θ-drive unit) for moving work tables (an x-table 2, a y-table 3 and a θ-table 4). The working sphere 30 of the working head 10 is dipped in a working sphere forming water tank 24 during formation of the working sphere 30.

92. 发明专利

JPH1025583A SHAPE GENERATING DEVICE 失效
公开(公告)号：JPH1025583A
公开(公告)日：1998-01-27
申请号：JP17947496
申请日：1996-07-09
申请人： MORI YUZO , DENKI KOGYO CO LTD , NIKON CORP
发明人： MORI YUZO , TANIGUCHI MIKI , TAKINO HIDEO , TANAKA HIROAKI , EBI MASAMI , SHIBATA NORIO
IPC分类号： H05H1/46 , B23K10/00 , C03B23/00 , C23F4/00 , H01L21/302 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To provide a shape generating device capable of stabilizing the plasma state during working and capable of working the shape of articles with high accuracy at a high working speed. SOLUTION: This shape generating device having a supporting means 14 for supporting a work, a working electrode 15 for forming plasma and reactive gas supplying means 23, 24 is provided with a resonator 1 as a matching means for efficiently supplying electric power to this working electrode. At least two movable parts 26, 27 are arranged to the resonator 1 in order to vary at least two electric constants.

93. 发明专利

JPH09253977A METHOD FOR FORMING SHAPE 失效
公开(公告)号：JPH09253977A
公开(公告)日：1997-09-30
申请号：JP6649896
申请日：1996-03-22
申请人： MORI YUZO , NIKON CORP
发明人： TAKINO HIDEO , ITO HIROSHI , SHIBATA NORIO , MORI YUZO
IPC分类号： B23Q15/00 , B23H7/26 , B24B13/02 , B24B51/00
摘要： PROBLEM TO BE SOLVED: To enable a moving path of a machining means to be easily attained without performing any complex calculation. SOLUTION: An outer shape P of a sectional surface 3 of a part to be processed when a part C to be processed is sliced into a specifies thickness (d) is calculated for every sectional surface 3. A plane L passing through the outer shape P of the sectional surface 3 and perpendicular to the sectional surface 3 is set, thereby the outer shape is constructed by the sectional surface 3 and the plane L, and a cubic body S contacted at its inner side with the part C to processed is set. A processing means smaller than a processing area of the sectional surface 3 is scanned at the position S of the cubic body so as to remove each of the layers S1, S2... constituting the cubic body S, thereby the item to be processed is processed.

94. 发明专利

JPH09106897A PROCESSING DEVICE 失效
公开(公告)号：JPH09106897A
公开(公告)日：1997-04-22
申请号：JP26445795
申请日：1995-10-12
申请人： MORI YUZO , NIKON CORP
发明人： TAKINO HIDEO , ITO HIROSHI , KOBAYASHI TERUNORI , SHIBATA NORIO
IPC分类号： H05H1/46 , G02B3/00 , H01L21/302 , H01L21/3065
摘要： PROBLEM TO BE SOLVED: To obtain processing with its high-precision efficiency for a surface such as optical lens by removing a surface layer with its uniform thickness while the shape precision of a processing face of a material to be processed is maintained by means of radial reaction generated by means of plasma. SOLUTION: A spherical face lens 10 is placed on a work table 1 of a lens processing device. A chamber 9 is closed, and the chamber 9 is temporarily de-pressurized by means of a gas discharge system 5. A reaction gas is supplied by means of a gas supply system, the pressure in the chamber is set to a specified pressure. A plasma generating unit of a processing electrode 2 is made close to a predetermined distance from the surface of a processed lens 10. High- frequency power is applied to the processing electrode 2 by means of a power supply system 3. An arc-shaped local plasma is generated along the plasma generating unit of the processing electrode 2, and radical of reaction gas is generated by means of this plasma. The radical of the reaction gas and the processed lens 10 react, the processed lens 10 reacts, and the surface of the processed lens is processed. The generated gas is discharged by means of the gas discharge system.

95. 发明专利

JPH08337676A METHOD FOR MODIFYING POROUS OBJECT AND APPARATUS THEREFOR 失效
公开(公告)号：JPH08337676A
公开(公告)日：1996-12-24
申请号：JP14310695
申请日：1995-06-09
申请人： MORI YUZO , NITTO DENKO CORP
发明人： MORI YUZO , ODA TAKASHI , URAIRI MASAKATSU
IPC分类号： B29C71/04 , B29K105/04 , C08J7/00 , C08J9/36
摘要： PURPOSE: To enable the surface and inside surface of a porous object having pores in its inside to be modified easily and uniformly by introducing active species in a plasma generated by applying high fequency/high voltage to the object placed between electrodes in a pressurized reactive gas. CONSTITUTION: The surface and inside pore surfaces of a porous obiect 4 are modified by placing a voltage-applying electrode 2 for applying voltage, a conductor for preventing arc discharge during applying voltage, and an earth electrode together with the object 4 placed between both the electrodes in a treating chamber 10, introducing a reactive gas from a reactive-gas-introducing port 1 into the chamber 10, applying high-frequency/high voltage from a high-frequency power source 8 through a connection joint 9 and the voltage-applying electrode 2 to the object 4 kept in tight contact with a conductor 3 to generate a high-density plasma, and sucking and leading active species occurring in the plasma through a gas-permeable support 11, which is in contact with the underside of the object 4 and supports it, from a hollow section 20 to a reactive gas exhaust port 12.

96. 发明专利

JPH07166375A ELECTRODE FOR PLASMA CVM POLISHING AND PROCESSING 失效
公开(公告)号：JPH07166375A
公开(公告)日：1995-06-27
申请号：JP19377393
申请日：1993-08-04
申请人： MORI YUZO , JAPAN RES DEV CORP , OFIC CO
发明人： TANI TAKENORI
IPC分类号： B24B1/00 , C23F4/00
摘要： PURPOSE:To make processing patterns distinct and carry out polishing with a high accuracy and high efficiency by specifically providing the electrode using high-frequency plasma with holes for supplying a gaseous mixture and radiating plasma.radicals by swirling flow from a nozzle part. CONSTITUTION:This electrode has the conductive nozzle part 1, a hollow distributor part 2, a casing part 3 and a cover part 4. A graphite rod 5 for the electrode is inserted into the space within the nozzle part 1 reducing gradually toward a radiation port 11. The distributor part 2 and the casing part 3 are communicated with the supply holes 21 for supplying the gaseous mixture composed of reactive gases for plasma formation and inert gas introduced from an introducing port 41 via a distributing part 42 to the space in the distributor part 2. Plural pieces of the supply holes 21 are arranged to incline with the central axes of the distributor part 2 and the nozzle part 1. The gaseous mixture supplied by these holes form the swirling flow and the plasma radicals by this swirling flow are radiated to the surface 6 of the material to be worked opposite to the radiation port 11.

97. 发明专利

JPH06335539A GOLF CLUB 失效
公开(公告)号：JPH06335539A
公开(公告)日：1994-12-06
申请号：JP12877793
申请日：1993-05-31
申请人： TSURUYA CO , MORI YUZO , TOYO ALUMINIUM KK
发明人： NISHIMURA FUMINOBU , MORI YUZO , AOKI TADAAKI
IPC分类号： A63B53/04
摘要： PURPOSE:To provide the golf club capable of increasing a flying distance. CONSTITUTION:Silicone bouncing putty 4 is sealed into the rear position of a face 3 within a head 2 of the club. The repulsive force of the face is increased by instantaneous curing of the putty 4 by the shock of impact, by which the initial speed of a ball is increased and the flying distance is extended.

98. 发明专利

JPH06168924A PROCESSING OF SUPERFINE MIRROR SURFACE AND DEVICE THEREOF 失效
公开(公告)号：JPH06168924A
公开(公告)日：1994-06-14
申请号：JP10034792
申请日：1992-03-25
申请人： YUUHA MIKAKUTOU SEIMITSU KOGAK , MORI YUZO
发明人： MORI YUZO
IPC分类号： C23F4/00 , H01L21/302 , H01L21/304 , H01L21/3065
摘要： PURPOSE:To provide a method of processing a superfine mirror surface, which is capable of processing smoothly the surface of a workpiece both in a microscopical manner and a macroscopical manner in the order of atom size without introducing a processing deteriorated layer utilizing a radical reaction, and a device for the method. CONSTITUTION:An electrode support body 3 consisting of an insulator having a plurality of parallel grooves 4 opened on the side of a processed surface 8 is provided and a wire electrode 5 or a blade electrode for applying a high-frequency voltage from a high-frequency power supply is arranged in each groove. An electrode structure 1 constituted in such a way as to provide nozzles 6, which are opened in the grooves and generate a high-speed gas flow of the mixed gas consisting of reaction gas and inert gas in the longitudinal direction of the grooves, and a stage 9 for fixing a workpiece W, which is provided at a prescribed fine interval D to the structure 1 and has a plane-shaped processed surface, are provided and a superfine mirror surface processing device consists of the electrode support body 3, the structure 1, the stage 9 and a workpiece support structure 2 having a driving mechanism, which maintains the stage in parallel to the structure 1 and enables the stage to make a relative motion.

99. 发明专利

JPH05234942A 失效
公开(公告)号：JPH05234942A
公开(公告)日：1993-09-10
申请号：JP7446591
申请日：1991-03-13
申请人： MORI YUZO , YUUHA MIKAKUTOU SEIMITSU KOGAK
发明人： MORI YUZO
IPC分类号： H01L21/302 , H01L21/3065
摘要： PURPOSE:To obtain an electrode capable of always supplying a constant amount of reaction gas to the whole part of a working region, or supplying constant density neutral radicals based on the reaction gas, when cutting or mirror- finishing is performed, by a method wherein a gas supply channel which is opened toward the processed surface side and supplies atmosphere gas containing the reaction gas is installed in the inside. CONSTITUTION:A DC voltage or an AC voltage is applied to an electrode 2. Neutral radicals 4 based on reaction gas 3 are formed by the electric field. Volatile material 6 formed by radical reaction of the neutral radicals with atoms or molecules constituting the processed surface 7 of an object to be processed is vaporized and eliminated to progress the working. As to the electrode 2 for working use of a distortionless precise machining equipment, a gas supplying channel 8 is installed inside the electrode open toward the processed surface 7 side to supply atmosphere gas containing the reaction gas 3. For example, the gas supplying channel 8 is formed in the inside, the tip is constituted as a pin type to which electric field concentrates, and the neutral radicals are formed between the electrode and the processed surface 7.

100. 发明专利

JPH04162523A METHOD AND APPARATUS FOR UNDISTORTED PRECISION CUTTING BY RADICAL REACTION 失效
公开(公告)号：JPH04162523A
公开(公告)日：1992-06-08
申请号：JP28927190
申请日：1990-10-25
申请人： YUUHA MIKAKUTOU SEIMITSU KOUGA , MORI YUZO
发明人： MORI YUZO
IPC分类号： H01L21/304 , H01L21/302 , H01L21/3065
摘要： PURPOSE:To narrow the cutting width of a silicon single crystal or the like and to eliminate a danger that an electrode is cut by a highly corrosive reaction gas by a method wherein a workpiece is turned in a gas atmosphere containing a reaction gas and neutral radicals are generated between the end edge of a ribbon-shaped blade electrode to which a high-frequency voltage has been applied and a working part. CONSTITUTION:A workpiece W, which has been arranged in a gas atmosphere containing a reaction gas is turned; a high-frequency voltage is applied to a ribbon- shaped blade electrode 11 which has been stretched and installed parallel with a face perpendicular to its shaft R; neutral radicals based on the reaction gas are generated between the end edge 9 of the blade electrode 1 and a working part 7; a volatile substance produced by a radical reaction of the neutral radicals with atoms or molecules at the working part 7 is gasified and removed. As the working part 7 is retreated, the blade electrode 1 is advanced parallel and the workpiece W is cut. For example, flat nozzles 15 are inserted into a working groove 8 which has been formed in a workpiece W by means of said blade electrode 1, a gas containing a reaction gas is spouted from the nozzles 15 and said cutting operation is executed.

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