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    • 99. 发明专利
    • Substrate storage case
    • 基板存储盒
    • JP2005088921A
    • 2005-04-07
    • JP2003323585
    • 2003-09-16
    • Dainippon Printing Co Ltd大日本印刷株式会社
    • NAKAMAE SATOSHI
    • B65D85/86B65D25/10B65D43/16H01L21/673
    • H01L21/67353B65D25/10B65D43/163H01L21/67359H01L21/67383H01L21/67386
    • PROBLEM TO BE SOLVED: To provide an inexpensive substrate storage case of excellent cleaning property and drying property of a case itself which is capable of preventing a substrate from being damaged or polluted by internal dust in the case where the substrate such as a photo mask is stored, maintained and carried, easily handled and capable of suppressing dust generation when the substrate is taken in/taken out.
      SOLUTION: In the substrate storage case 1 in which an upper lid 2 and a lower lid 3 are connected to each other via a hinge 4 in an opening/closing manner, supporting parts 5 and 6 of a substrate 7 protruded from an inner surface of each lid are provided on four corners of the upper lid 2 and the lower lid 3. The substrate 7 is simultaneously positioned at and supported by the supporting part 6 of the lower lid 3 by each two edges on the lower surface side of the four corners of the substrate 7, and each two edges on the upper surface side of the four corners of the substrate 7 are fixed by the supporting part 5 of the upper lid 2 by closing the upper lid 2 to store the substrate 7.
      COPYRIGHT: (C)2005,JPO&NCIPI
    • 要解决的问题:为了提供一种廉价的基板储存盒,其具有优异的壳体本身的清洁性能和干燥性能,该壳体本身能够防止基板在例如基板的基板的情况下被内部灰尘损坏或污染 光掩模被存储,保持和携带,易于处理并且能够在吸收/取出基板时抑制灰尘产生。 解决方案:在其中上盖2和下盖3经由铰链4以开/闭方式彼此连接的基板存储盒1中,从基板7的突出的基板7的支撑部分5和6 每个盖的内表面设置在上盖2和下盖3的四个角上。基板7同时位于下盖3的支撑部6并由下盖3的下表面侧的两个边缘支撑 基板7的四个角以及基板7的四个角的上表面侧的两个边缘通过闭合上盖2而被上盖2的支撑部5固定,从而存储基板7。 P>版权所有(C)2005,JPO&NCIPI