会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 97. 发明公开
    • METHOD FOR ENHANCING ADHESION OF THIN FILM
    • VERFAHREN ZUR VERBESSERUNG DER HAFTUNG EINESDÜNNENFILMS
    • EP1788115A1
    • 2007-05-23
    • EP04772959.5
    • 2004-09-06
    • Canon Machinery Inc.
    • SAWADA, Hiroshi, CANON MACHINERY CORPORATIONKAWAHARA, Kosuke, CANON MACHINERY CORPORATION
    • C23C16/02B23K26/00
    • C23F4/02C23C16/0263
    • (Problems) To provide a method for enhancing adhesion of a thin film, and a method for enhancing adhesion of a thin film provided with a surface function caused by the shape.
      (Means) Adhesion of a thin film can be enhanced by irradiating the surface of a parent material with a laser beam at a fluence in the vicinity of the machining threshold, scanning the irradiated part while overlapping to form a grating structure, and then forming a solid thin film in the grating structure. When the grating structure formed on the parent material is left on the solid thin film, adhesion of the thin film is enhanced and surface functions, e.g. reduction of friction and wear caused by the shape, suppression of adhesion of fine particles, and cell sensibility, can be exhibited in conjunction with the function of the solid thin film.
    • (问题)提供一种提高薄膜粘附性的方法,以及提高具有由形状引起的表面功能的薄膜的附着力的方法。 (装置)通过用激光束在加工阈值附近照射母材表面,同时重叠扫描照射部分以形成光栅结构,可以增强薄膜的粘附性,然后形成 固体薄膜在光栅结构中。 当在母材上形成的光栅结构留在固体薄膜上时,薄膜的粘附性增强,并且表面功能例如。 结合固体薄膜的功能可以显示由形状引起的摩擦和磨损的降低,细颗粒的粘附抑制和细胞感觉性。