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91. 发明授权

US08562293B2 Multi-stage pump rotor for a turbomolecular pump 有权
标题翻译：用于涡轮分子泵的多级泵转子
公开(公告)号：US08562293B2
公开(公告)日：2013-10-22
申请号：US12682067
申请日：2008-09-19
申请人： Heinrich Engländer
发明人： Heinrich Engländer
IPC分类号： F04D19/04
CPC分类号： F04D19/042 , F04D19/048 , F04D29/321 , F04D29/644
摘要： A multi-stage pump rotor (10) for a turbomolecular pump has at least two separate blade disk rings (17), each having a motor ring (12) and at least one blade disk (14). A cylindrical reinforcement pipe (18), which surrounds the rotor rings (12) of the blade disk rings (17) on the outside without clearance, is provided between the blade disks (14) of adjacent blade disk rings (17). The reinforcement pipe (18) absorbs a large part of the tangential forces occurring during operation such that the pump rotor (10) has improved stability at high rotor speeds.
摘要翻译：用于涡轮分子泵的多级泵转子（10）具有至少两个独立的叶片盘环（17），每个具有马达环（12）和至少一个叶片盘（14）。在相邻的叶片盘环（17）的叶片盘（14）之间设置圆柱形加强管（18），其围绕外部没有间隙的叶片盘环（17）的转子环（12）围绕。加强管（18）吸收在操作期间发生的切向力的大部分，使得泵转子（10）在高转子速度下具有改进的稳定性。

92. 发明申请

US20130129482A1 VACUUM PUMP 审中-公开
标题翻译：真空泵
公开(公告)号：US20130129482A1
公开(公告)日：2013-05-23
申请号：US13813345
申请日：2011-08-05
申请人： Shingo Tsutsui
发明人： Shingo Tsutsui
IPC分类号： F04D19/04
CPC分类号： F04D19/04 , F04D19/042 , F04D19/048 , F04D29/023 , F04D29/522 , F04D29/701 , F05D2260/95 , F05D2300/171 , F05D2300/507 , F05D2300/611
摘要： A vacuum pump (1) includes: a rotor (30) provided with a rotor-side discharge function unit (32); a motor (36) that drives the rotor (30) to rotate with respect to a stator-side discharge function unit (22); and a cylindrical pump casing (2) made of a magnetic material, in which the rotor (30) and the stator-side discharge function unit (22) are disposed.
摘要翻译：真空泵（1）包括：转子（30），设有转子侧排放功能单元（32）; 驱动所述转子（30）相对于定子侧排出功能单元（22）旋转的马达（36）; 和设置有转子（30）和定子侧排出功能单元（22）的由磁性材料制成的圆柱形泵壳体（2）。

93. 发明申请

US20100290915A1 MULTI-STAGE PUMP ROTOR FOR A TURBOMOLECULAR PUMP 有权
标题翻译：用于涡轮分子泵的多级泵转子
公开(公告)号：US20100290915A1
公开(公告)日：2010-11-18
申请号：US12682067
申请日：2008-09-19
申请人： Heinrich Englaender
发明人： Heinrich Englaender
IPC分类号： F04D29/38
CPC分类号： F04D19/042 , F04D19/048 , F04D29/321 , F04D29/644
摘要： A multi-stage pump rotor (10) for a turbomolecular pump has at least two separate blade disk rings (17), each having a motor ring (12) and at least one blade disk (14). A cylindrical reinforcement pipe (18), which surrounds the rotor rings (12) of the blade disk rings (17) on the outside without clearance, is provided between the blade disks (14) of adjacent blade disk rings (17). The reinforcement pipe (18) absorbs a large part of the tangential forces occurring during operation such that the pump rotor (10) has improved stability at high rotor speeds.
摘要翻译：用于涡轮分子泵的多级泵转子（10）具有至少两个独立的叶片盘环（17），每个具有马达环（12）和至少一个叶片盘（14）。在相邻的叶片盘环（17）的叶片盘（14）之间设置圆柱形加强管（18），其围绕外部没有间隙的叶片盘环（17）的转子环（12）围绕。加强管（18）吸收在操作期间发生的切向力的大部分，使得泵转子（10）在高转子速度下具有改进的稳定性。

94. 发明授权

US07292425B2 Magnetic bearing device and turbo molecular pump with the magnetic bearing device mounted thereto 失效
标题翻译：磁轴承装置和涡轮分子泵，其上安装有磁性轴承装置
公开(公告)号：US07292425B2
公开(公告)日：2007-11-06
申请号：US11088063
申请日：2005-03-23
申请人： Toshiaki Kawashima , Hirotaka Namiki , Hideo Fukami
发明人： Toshiaki Kawashima , Hirotaka Namiki , Hideo Fukami
IPC分类号： H02K7/09
CPC分类号： F04D19/048 , F16C32/0446 , F16C32/0476 , F16C2360/45
摘要： To provide a magnetic bearing device capable of reducing vibration by preventing a deterioration in the control of a rotor shaft due to a variation in the axial position of the rotor shaft, while performing positional control over the rotor shaft in a specific attitude with optimal magnetic force, and to a turbo molecular pump with the magnetic bearing device mounted thereto. A sensitivity storage section 281 stores therein a sensor sensitivity used in a sensor sensitivity adjustment. The sensitivity storage section 281 outputs the stored sensor sensitivity to a sensitivity switching section. The sensitivity switching section switches the sensor sensitivity according to the situation, and outputs the result to a sensor signal amplifier section. The sensor signal amplifier section 252 performs, to a sensor signal, the sensor sensitivity adjustment according to the sensor sensitivity stored in the sensitivity storage section 281, and outputs, to an A/D converter 154, a sensor output signal 153 having a sensor output voltage V after the sensor sensitivity adjustment.
摘要翻译：为了提供一种能够通过防止由于转子轴的轴向位置的变化导致的转子轴的控制的劣化而能够减小振动的磁性轴承装置，同时以最佳磁力以特定的姿态对转子轴进行位置控制以及安装有磁性轴承装置的涡轮分子泵。灵敏度存储部分281存储传感器灵敏度调节中使用的传感器灵敏度。灵敏度存储部分281将存储的传感器灵敏度输出到灵敏度切换部分。灵敏度切换部根据情况切换传感器灵敏度，并将结果输出到传感器信号放大部。传感器信号放大器部分252根据存储在灵敏度存储部分281中的传感器灵敏度对传感器信号执行传感器灵敏度调节，并将具有传感器输出的传感器输出信号153输出到A / D转换器154 传感器灵敏度调整后的电压V。

95. 发明申请

US20070132327A1 Turbomolecular vacuum pump 有权
标题翻译：涡轮分子真空泵
公开(公告)号：US20070132327A1
公开(公告)日：2007-06-14
申请号：US10575305
申请日：2004-10-14
申请人： Maurice Brunet
发明人： Maurice Brunet
IPC分类号： F01D1/36 , H02K7/09 , F04B17/00
CPC分类号： F16C32/0489 , F04D19/048 , F04D25/068 , F04D25/0693 , F16C32/047 , F16C35/00 , F16C2360/45
摘要： The turbomolecular vacuum pump with active magnetic bearings comprises an enclosure (110) defining a primary vacuum chamber (116), a rotor (120), an electric motor (107), an axial magnetic bearing (103), radial magnetic bearings (101, 102), an axial detector (106), and radial detectors (104, 105). Remote external electric circuits associated with the electric motor (107) and with the axial and radial magnetic bearings (103 and 101, 102) essentially comprise power supply electric circuits (191). Circuits (194) for controlling the axial and radial magnetic bearings (103 and 101, 102) from signals issued by the axial and radial detectors (106 and 104, 105) are embedded in a resin and placed inside the enclosure (110) in the primary vacuum chamber (116). A hermetic leaktight electrical connector (180) and an electric cable (183, 184) providing a connection with the remote external electric circuits (191, 192) each have a number of connection wires that is less than ten.
摘要翻译：具有主动磁轴承的涡轮分子真空泵包括限定初级真空室（116）的外壳（110），转子（120），电动机（107），轴向磁性轴承（103），径向磁轴承（101， 102），轴向检测器（106）和径向检测器（104,105）。与电动机（107）和轴向和径向磁性轴承（103和101,102）相关联的远程外部电路基本上包括电源电路（191）。用于根据由轴向和径向检测器（106和104,105）发出的信号控制轴向和径向磁性轴承（103和101,102）的电路（194）嵌入在树脂中并放置在外壳（110）内初级真空室（116）。提供与远程外部电路（191,192）的连接的气密密封电连接器（180）和电缆（183,184）各自具有小于10的多个连接线。

96. 发明授权

US06617733B1 Magnetic bearing apparatus and vacuum pump having magnetic bearing apparatus 有权
标题翻译：磁轴承装置和具有磁性轴承装置的真空泵
公开(公告)号：US06617733B1
公开(公告)日：2003-09-09
申请号：US09700640
申请日：2000-12-29
申请人： Akira Yamauchi , Manabu Nonaka
发明人： Akira Yamauchi , Manabu Nonaka
IPC分类号： H02K709
CPC分类号： F04D29/058 , F04D19/048 , F16C27/04 , F16C32/0442 , F16C39/02 , F16C2360/45
摘要： In a magnetic bearing apparatus provided at least with a touchdown bearing and a corrugated plate-like damper member inserted into an annular gap between the touchdown bearing and its retainer member, to keep on holding the corrugated plate-like damper member in a predetermined position without fail. A cylindrical retainer member 9 is a thrust bearing retainer member and also a touchdown bearing retainer member. A touchdown bearing 4, i.e., a pair of roller bearings 4a and 4b disposed in upper and lower stages are received in an inner circumferential portion of the cylindrical retainer member 9. An annular gap G is formed between the inner circumferential surface of the cylindrical retainer member 9 and outer races of the pair of roller bearings 4a and 4b. A pair of corrugated strip steel plates 8a and 8b that are the corrugated plate-like damper members are inserted into this annular gap G. Also, a strip-like metal thin plate 10a is inserted while being clamped between the upper corrugated strip steel plate 8a and the lower corrugated strip steel plate 8b. Thus, the strip-like metal thin plate 10a functions as a positional offset preventing means of the pair of corrugated strip steel plates 8a and 8b.
摘要翻译：在至少设置有触地轴承和插入到触下轴承与其保持构件之间的环形间隙中的波纹状板状阻尼构件的磁性轴承装置中，为了保持将波纹板状阻尼构件保持在预定位置而没有圆柱形保持构件9是推力轴承保持构件，也是触下轴承保持构件。设置在上下台面的一对滚动轴承4a和4b被容纳在圆柱形保持构件9的内圆周部分中。环形间隙G形成在圆柱形保持器的内圆周表面之间一对滚子轴承4a和4b的构件9和外圈。作为波纹板状阻尼构件的一对波纹状钢板8a，8b被插入到该环状间隙G中。另外，将带状金属薄板10a插入在上部波纹状钢板8a 和下波纹条带钢板8b。因此，带状金属薄板10a用作一对波纹状钢板8a，8b的位置偏移防止机构。

97. 发明申请

US20030102747A1 Use of zirconia balls for the landing bearings in molecular drag pumps on magnetic bearings 审中-公开
标题翻译：在磁轴承上使用分子阻力泵中的氧化锆球用于着陆轴承
公开(公告)号：US20030102747A1
公开(公告)日：2003-06-05
申请号：US10278804
申请日：2002-10-24
申请人： ALCATEL
发明人： Rainer Mathes , Andre Bouille
IPC分类号： H02K007/09
CPC分类号： F04D29/0566 , F04D19/048 , F04D29/058 , F04D29/059 , F16C32/0442 , F16C33/303 , F16C33/32 , F16C39/02 , F16C2360/45
摘要： According to the invention, a landing bearing for a vacuum pump comprises a rotor ball race and a coaxial stator ball race with rolling elements placed between them, housed one after another and rolling on respective rolling tracks of the rotor and stator ball races. The rolling elements comprise a succession of rolling elements having outside surfaces made of zirconium dioxide. This reduces the resistance of the landing bearing to acceleration, while nevertheless providing good resistance to chemical attacks from process gases and plasmas.
摘要翻译：根据本发明，用于真空泵的着陆轴承包括转子球座圈和同轴定子球座圈，滚动元件放置在它们之间，一个接一个地容纳并且在转子和定子球座的相应滚动轨道上滚动。滚动元件包括具有由二氧化锆制成的外表面的一系列滚动元件。这降低了着陆轴承对加速度的阻力，同时仍然提供了良好的抗过程气体和等离子体的化学侵蚀。

98. 发明授权

US06498410B1 Motor and pressure generating apparatus incorporating the motor 有权
标题翻译：电动机和压力发生装置结合电动机
公开(公告)号：US06498410B1
公开(公告)日：2002-12-24
申请号：US09536569
申请日：2000-03-28
申请人： Hirokazu Yashiro , Youichi Kuwayama
发明人： Hirokazu Yashiro , Youichi Kuwayama
IPC分类号： F04B3900
CPC分类号： F04D19/042 , F04D19/048 , F04D29/0516 , F04D29/057 , F16C17/026 , F16C32/044 , F16C33/107 , F16C2360/45 , H02K7/088 , H02K7/09 , H02K7/14
摘要： A compact turbo-molecular pump having a high depressurizing capability. A motor driving the pump includes a rotary shaft, the distal and basal ends of which are supported by magnetic bearings. Each magnetic bearing has a rotated magnet, which is rotated integrally with the rotary shaft, and a fixed magnet, which is opposed to the rotated magnet. The rotated and fixed magnets repel each other. The diameter of the magnetic bearing at the distal end of the rotary shaft is greater than that of the magnetic bearing at the basal end. This decreases movement of the rotary shaft toward its distal end when the pump operates.
摘要翻译：具有高减压能力的紧凑型涡轮分子泵。驱动泵的电动机包括旋转轴，其远端和底端由磁性轴承支撑。每个磁性轴承具有与旋转轴一体旋转的旋转磁体和与旋转的磁体相对的固定磁体。旋转和固定的磁体彼此排斥。旋转轴远端的磁性轴承的直径大于基端的磁性轴承的直径。当泵工作时，这减少了旋转轴朝向其远端的运动。

99. 发明申请

US20020155013A1 Magnetic bearing protective device and turbomolecular pump 有权
标题翻译：磁轴承保护装置和涡轮分子泵
公开(公告)号：US20020155013A1
公开(公告)日：2002-10-24
申请号：US10164059
申请日：2002-06-06
申请人： SEIKO INSTRUMENTS INC.
发明人： Miyako Komoriya
IPC分类号： F04B017/00
CPC分类号： F04D29/058 , F04D19/048 , F16C32/0442 , F16C32/0444 , F16C32/0489 , F16C2360/45
摘要： To provide a magnetic bearing protective device and a turbomolecular pump in which stable control can be held against the excessive oscillation of a rotator and an externally given shake. A magnetic bearing is stopped for the purpose of protecting the same when the current flowing through radial position controlling electromagnets (3A, 3B) and an axial position controlling electromagnet (5) reaches to a preset value for a given time. At this point, no limitation is put on the current flowing through the radial position controlling electromagnet (3A), etc., so that the oscillation of rotor blades (1) ends early. Therefore, less damage is given to touch down bearings (13, 15).
摘要翻译：提供磁轴承保护装置和涡轮分子泵，其中可以保持稳定的控制以防止旋转器的过度振荡和外部给定的震动。为了保护电磁轴承，当流过径向位置控制电磁铁（3A，3B）和轴向位置控制电磁铁（5）的电流在给定时间达到预设值时，停止磁轴承。此时，对流过该径向位置控制用电磁铁（3A）等的电流没有限制，使得转子叶片（1）的摆动提前结束。因此，触碰轴承（13,15）的损坏较少。

100. 发明申请

US20020131877A1 Turbo molecular pump 有权
标题翻译：涡轮分子泵
公开(公告)号：US20020131877A1
公开(公告)日：2002-09-19
申请号：US10100750
申请日：2002-03-18
发明人： Hideki Omori
IPC分类号： F04B017/00
CPC分类号： F16C32/0489 , F04D19/042 , F04D19/048 , F04D25/06 , F04D29/5813 , F16C37/005 , F16C2360/45
摘要： The present invention provides a turbo molecular pump capable of suppressing temperature rise in an electronic circuit section within a range, without losing airtight property thereof with a simple construction. In a base section of a turbo molecular pump, a bottom portion thereof is sealed by a bottom cover. A semiconductor device is disposed at the inner portion of the bottom cover. A cooling member is provided, which is used for releasing heat of the semiconductor device in an airtight state outside the bottom cover.
摘要翻译：本发明提供一种涡轮分子泵，其能够以简单的结构在不影响气密性的范围内抑制电子电路部的温度上升。在涡轮分子泵的基部中，其底部由底盖密封。半导体器件设置在底盖的内部。提供冷却构件，其用于在底盖外部的气密状态下释放半导体器件的热量。

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