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    • 96. 发明申请
    • PLACING TABLE AND PLASMA PROCESSING APPARATUS
    • 配置表和等离子体加工设备
    • US20150373783A1
    • 2015-12-24
    • US14730520
    • 2015-06-04
    • TOKYO ELECTRON LIMITED
    • Dai KITAGAWA
    • H05B3/26H01L21/683H01L21/67H01J37/32
    • H05B3/26H01J37/32532H01J37/32715H01L21/67103H01L21/67109H01L21/6831H01L21/68757H05B3/262
    • Provided is a placing table configured to place a workpiece thereon. The placing table includes: an electrostatic chuck configured to attract the workpiece; a support member configured to support a focus ring; and a metal base having a first region configured to support the electrostatic chuck and a second region configured to support the support member, the second region surrounding the first region. The support member includes: an intermediate layer formed of a ceramic sintered compact and supported on the second region via an adhesive; a thermally sprayed ceramic layer formed on the intermediate layer by a thermal spraying method; and a heater electrode provided within the thermally sprayed ceramic layer. The heater electrode is formed by the thermal spraying method.
    • 提供了一种配置成将工件放置在其上的放置台。 放置台包括:静电卡盘,其构造成吸引工件; 构造成支撑聚焦环的支撑构件; 以及具有构造成支撑所述静电卡盘的第一区域的金属基座和被构造成支撑所述支撑构件的第二区域,所述第二区域围绕所述第一区域。 支撑构件包括:由陶瓷烧结体形成的中间层,并通过粘合剂支撑在第二区域上; 通过热喷涂法形成在中间层上的热喷涂陶瓷层; 以及设置在热喷涂陶瓷层内的加热电极。 加热电极通过热喷涂法形成。
    • 99. 发明申请
    • HEATER ASSEMBLY
    • 加热器总成
    • US20140097176A1
    • 2014-04-10
    • US13839749
    • 2013-03-15
    • Minco Products, Inc.
    • Peter M. BobganTimothy Robert DeBruin
    • H05B3/26H05B3/72
    • H05B3/262H01L21/67103H01L21/68785H05B3/72
    • An assembly suitable for controlling the temperature of a workpiece operatively engaged thereby is provided. The assembly generally comprises a housing characterized by first and second housing members sealingly united at their peripheries, and a heater cartridge enclosed within the housing and compressively retained interior of the sealingly united peripheries of the housing members. The heater cartridge comprises a heat conducting casing characterized by first and second heat conducting casing members and a composite heating element compressively retained between the heat conducting casing members. The first and second heat conducting casing members are selectively united interior of their peripheries so as to delimit heat conduits for the heater cartridge.
    • 提供了一种适于控制由此可操作地接合的工件的温度的组件。 组件通常包括壳体,其特征在于在其周边处密封地结合的第一和第二壳体构件,以及封装在壳体内的加热器盒和密封地联合的外壳构件的外围的内部。 加热器盒包括导热壳体,其特征在于,第一和第二导热壳体构件和压缩地保持在导热壳体构件之间的复合加热元件。 第一和第二导热壳体构件选择性地结合在其周边的内部,以限定加热器盒的热导管。