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    • 25. 发明授权
    • Method of making glass waveguide for optical circuit
    • 制造光路的玻璃波导的方法
    • US4425146A
    • 1984-01-10
    • US213069
    • 1980-12-04
    • Tatsuo IzawaHidefumi MoriNobuo ShimizuYasuji Murakami
    • Tatsuo IzawaHidefumi MoriNobuo ShimizuYasuji Murakami
    • C03C15/00C03C17/02C03C17/34G02B6/136C03B19/00
    • C03C17/3411C03C15/00C03C17/02G02B6/136C03C2217/42Y10S65/16
    • Halides of Si and Ti, B, P, or Ge and oxygen or steam are introduced into a reaction vessel and heated in a vapor phase to form fine glass particles by oxidation or hydrolysis. The fine glass particles are deposited on a substrate. The deposited fine glass particles are heated and vitrified into a transparent glass layer, which is etched to form a core having a desired pattern by a reactive sputter etching process using Freon gas. The core is coated by a clad. In a waveguide thus formed, the cross sectional configuration and dimensions of the core layer and the refractive index difference are precisely controlled. The waveguide is manufactured with good reproducibility. The fabrication method is suitable for mass production of waveguides. An expansion coefficient transient layer is provided between the core layer and the substrate to prevent a crack in the waveguide. The glass softening temperature of the cladding layer is set lower than that of the core layer, so that the cross sectional configuration and dimensions of the core layer is unchanged against the heat in the vitrification process of the cladding layer. The refractive index is reduced in the vicinity of the boundary between the core and clad to prevent the loss of light due to light scattering on the core side faces.
    • 将Si和Ti,B,P或Ge和氧气或蒸汽的卤化物引入反应容器中并在汽相中加热以通过氧化或水解形成细玻璃颗粒。 细玻璃颗粒沉积在基底上。 将沉积的细玻璃颗粒加热并玻璃化成透明玻璃层,其通过使用氟利昂气体的反应溅射蚀刻工艺被蚀刻以形成具有所需图案的芯。 芯由涂层涂覆。 在如此形成的波导中,芯层的横截面形状和尺寸以及折射率差被精确地控制。 制造的波导具有良好的再现性。 该制造方法适用于大规模生产波导。 在芯层和衬底之间提供膨胀系数瞬变层以防止波导中的裂纹。 包覆层的玻璃软化温度设定为低于芯层的玻璃软化温度,使得芯层的截面形状和尺寸相对于包覆层的玻璃化过程中的热量而变化。 在芯和包层之间的边界附近,折射率降低,以防止由于芯侧面上的光散射引起的光的损失。
    • 26. 发明授权
    • Method of manufacturing member with concave portions, member with concave portions, lens substrate, transmission type screen and rear projection
    • 具有凹部的构件的制造方法,具有凹部的构件,透镜基板,透射型屏幕和后投影
    • US07892443B2
    • 2011-02-22
    • US11654308
    • 2007-01-17
    • Nobuo ShimizuKazuto Yoshimura
    • Nobuo ShimizuKazuto Yoshimura
    • B44C1/22
    • B23K26/066B23K26/0661B23K26/355B23K26/389B29D11/00365
    • A method of manufacturing a member with concave portions includes preparing a base material, forming a mask formation film on the base material, forming a number of openings in the mask formation film by laser irradiation treatments using a branching filter, and etching the base material to form the concave portions in the base material. The branching filter branches laser light into first laser beams and second laser beams. Each of irradiation regions of the mask formation film sequentially is subjected to the laser irradiation treatment, so that first openings are formed by the first laser beams and second openings are formed by the second laser beams. Each of the irradiation regions has portions where no opening is formed by the first beams of the laser irradiation treatment for the irradiation region while openings will be formed by the second laser beams in one or more of the subsequent laser irradiation treatments. In the base material, concave portions for examination use are formed using some of the openings formed by the second laser beams used in the laser irradiation treatments for the specified irradiation regions.
    • 制造具有凹部的部件的方法包括:准备基材,在基材上形成掩模形成膜,通过使用分支过滤器的激光照射处理在掩模形成膜中形成多个开口,并将基材蚀刻到 在基材中形成凹部。 分支滤波器将激光分支成第一激光束和第二激光束。 对掩模形成膜的照射区域依次进行激光照射处理,由第一激光形成第一开口部,第二激光光束形成第二开口部。 每个照射区域具有通过用于照射区域的激光照射处理的第一光束而不形成开口的部分,同时在随后的一次或多次激光照射处理中由第二激光束形成开口。 在基材中,使用由用于特定照射区域的激光照射处理中的第二激光形成的一些开口形成用于检查用的凹部。