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    • 33. 发明申请
    • METHOD AND APPARATUS FOR HANDLING AND ALIGNING GLASS SUBSTRATES
    • 用于处理和排列玻璃基板的方法和装置
    • US20070151296A1
    • 2007-07-05
    • US11614042
    • 2006-12-20
    • Jun HuhSung Park
    • Jun HuhSung Park
    • C03B11/08C03B18/00
    • B65G49/065B65G49/064B65G2249/02B65G2249/04B65G2249/045
    • A chuck adapted to support a substrate includes an array of glass bars spaced apart and each having a number of holes in its supporting surface. The holes in the supporting surfaces are connected to a common conduit that is supplied with air to provide an air cushion to support the substrate during loading and positioning operations. Scrubbers in contact with one or more edges of the substrate are used to locate the substrate precisely relative to a mechanical reference. After the substrate is positioned at the desired location, the common conduit is separately supplied with vacuum to provide a suction force to hold the substrate to the chuck. The array of glass bars are designed to operate in conjunction with a multi-light backlight system that provides uniform illumination for areas of the substrate that are supported above a glass bar as well as for areas of the substrate that are positioned between the glass bars.
    • 适于支撑衬底的卡盘包括间隔开的每个在其支撑表面中具有多个孔的玻璃棒阵列。 支撑表面中的孔连接到供给空气的公共导管,以在加载和定位操作期间提供气垫以支撑基板。 使用与衬底的一个或多个边缘接触的擦洗器相对于机械参考精确地定位衬底。 在将基板定位在所需位置之后,公共导管被分开供给真空,以提供将基板保持在卡盘上的吸力。 玻璃棒阵列设计成与多光背光系统一起工作,该多光背光系统为支撑在玻璃棒上方的基底区域以及位于玻璃棒之间的基底区域提供均匀的照明。
    • 38. 发明申请
    • Flash memory device and method of fabricating the same
    • 闪存装置及其制造方法
    • US20070029622A1
    • 2007-02-08
    • US11479330
    • 2006-06-30
    • Sung Park
    • Sung Park
    • H01L29/76
    • H01L27/105G11C16/0408H01L27/11526H01L27/11531
    • A semiconductor device includes a semiconductor substrate having a cell region and a peripheral region. A cell array is defined within the cell region, the cell array having first, second, third, and fourth sides. A first decoder is defined within the peripheral region and provided adjacent to the first side of the cell array. A first isolation structure is formed at a first boundary region provided between the first side of the cell array and the peripheral region. A first dummy active region is formed at a second boundary region that is provided between the second side of the cell array and the peripheral region. The first isolation structure has a first portion that has a first depth and a second portion that has a second depth.
    • 半导体器件包括具有单元区域和周边区域的半导体衬底。 单元阵列定义在单元区域内,单元阵列具有第一,第二,第三和第四面。 第一解码器被限定在外围区域内并且被提供为与单元阵列的第一侧相邻。 在设置在电池阵列的第一侧和周边区域之间的第一边界区域处形成第一隔离结构。 在设置在电池阵列的第二侧和周边区域之间的第二边界区域处形成第一虚拟有源区域。 第一隔离结构具有具有第一深度的第一部分和具有第二深度的第二部分。