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    • 41. 发明申请
    • GENERATING PLASMAS IN PULSED POWER SYSTEMS
    • 在脉冲电力系统中生成等离子体
    • WO2012076630A1
    • 2012-06-14
    • PCT/EP2011/072141
    • 2011-12-07
    • APPLIED MATERIALS INC.HERMANNS, Uwe
    • HERMANNS, Uwe
    • H01J37/32
    • H01J37/3299H01J37/32045H01J37/32935
    • Generating plasmas in pulsed power systems. In one aspect, a system includes a plasma chamber having one or more anodes and cathodes arranged for generating a plasma in the plasma chamber, two or more plasma power supplies each having a pulsed power output suitable for generating the plasma and coupled to respective of the one or more anodes and cathodes of the plasma chamber and a signal generator supplying the input signal coupled to the inputs of the plasma power supplies. The input signal is selected to trigger the pulsing, by the arc management circuitry, of the power output from the plasma power supplies. The plasma power supplies each include arc management circuitry and an input coupled to trigger, in response to an input signal, pulsing, by the arc management circuitry, of the power output from the plasma power supply.
    • 在脉冲电力系统中产生等离子体。 一方面,一种系统包括具有一个或多个阳极和等离子体室的等离子体室,其布置用于在等离子体室中产生等离子体;两个或更多个等离子体电源,每个等离子体电源具有适于产生等离子体的脉冲功率输出, 等离子体室的一个或多个阳极和阴极以及提供耦合到等离子体电源的输入的输入信号的信号发生器。 选择输入信号以通过电弧管理电路触发从等离子体电源输出的功率的脉冲。 等离子体电源各自包括电弧管理电路和耦合以响应于输入信号触发由电弧管理电路脉冲从等离子体电源的功率输出的输入。