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    • 49. 发明授权
    • Method for detecting and characterizing plasma-etch induced damage in an integrated circuit
    • 用于检测和表征集成电路中的等离子体蚀刻引起的损伤的方法
    • US06265729B1
    • 2001-07-24
    • US09277338
    • 1999-03-26
    • Mark Michael NelsonSubhash Madhukar Deshmukh
    • Mark Michael NelsonSubhash Madhukar Deshmukh
    • H01L2358
    • H01L22/34H01L22/12
    • Characterization of plasma-induced damage in semiconductor manufacturing has long been considered unimportant because the damage had no discernible effect on circuit performance. With increasing transistor counts on an integrated circuit, the damage-induced parasitics are becoming increasingly important. Electrical characterization of such effects provides a far more sensitive method for determining the extent of damage and the effectiveness of efforts to repair the damage. A measurement of diode leakage current through a plasma-etch effect test diode which is formed completely within an active device region, removed from field oxide regions quantifies the extent of damage created by a plasma and the effectiveness of a repair technique that may be applied to the process.
    • 长期以来,半导体制造中等离子体引起的损伤的表征被认为是不重要的,因为损伤对电路性能没有明显的影响。 随着集成电路中晶体管数量的增加,损伤引起的寄生效应变得越来越重要。 这种影响的电气特性提供了一种更加敏感的方法来确定损伤的程度和修复损坏的努力的有效性。 通过等离子蚀刻效应测试二极管的二极管泄漏电流的测量,其完全在活性器件区域内形成,从场氧化物区域移除,量化了由等离子体产生的损伤程度以及修复技术的有效性,可用于 的过程。
    • 50. 发明授权
    • Contact lens storage container
    • 隐形眼镜储存容器
    • US06050398A
    • 2000-04-18
    • US199827
    • 1998-11-25
    • Michael Nelson WildePaul Clement Nicolson
    • Michael Nelson WildePaul Clement Nicolson
    • A45C11/04
    • B65D75/326B65D2585/545
    • A container is provided for storing a contact lens in a liquid, the contact lens having a base surface defining a base curve equivalent radius and a front surface. The container includes a base portion and a bowl portion formed integral with the base portion for containing the liquid and the contact lens. The bowl portion includes a lens seating section having an inner surface defined by a radius sized from slightly larger than to equal to the base curve equivalent radius so that the front surface of the contact lens removably adheres to the inner surface. The base curve equivalent radius may be from about 85% to about 100% of the inner surface radius, and the inner surface radius may be about 9.0 mm.
    • 提供了用于将隐形眼镜存储在液体中的容器,所述隐形眼镜具有限定基本曲线等效半径的基面和前表面。 容器包括基部和与基部一体形成的用于容纳液体和隐形眼镜的碗部。 碗部包括透镜座部,其具有由略大于等于基本曲线等效半径的半径限定的内表面,使得隐形眼镜的前表面可移除地粘附到内表面。 基本曲线等效半径可以为内表面半径的约85%至约100%,内表面半径可以为约9.0mm。