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    • 57. 发明申请
    • OSCILLATION GYRO SENSOR, COMPOSITE SENSOR AND PROCESS OF PRODUCING GYRO SENSOR
    • 振动陀螺传感器,复合传感器及生产陀螺传感器的过程
    • WO1997037195A1
    • 1997-10-09
    • PCT/JP1997001094
    • 1997-03-28
    • NGK INSULATORS, LTD.TAKEUCHI, YukihisaNAMERIKAWA, MasahikoSHIBATA, KazuyoshiOHNISHI, Takao
    • NGK INSULATORS, LTD.
    • G01C19/56
    • G01P15/097G01C19/5628G01P15/0922G01P2015/0817Y10T29/42
    • A detection unit equipped with a piezoelectric/electrostriction device (12) for detecting displacement perpendicular to the oscillation direction of an oscillator (2) when the oscillator rotates is constructed of a sintered body of ceramic together with the oscillator (2) and a support (4). The detection unit is constituted by a first sheet-like portion (6) which is thinner than the oscillator (2) and whose major surface extends in the oscillation direction. The piezoelectric/electrostriction device (12) is integrally formed on the first sheet-like portion (6) by a film formation method. Further, a thin second sheet-like portion (8) for lowering the rigidity of the oscillation element (2) in the oscillation direction and allowing the oscillation element (2) to easily oscillate is integrally disposed so that the major surface thereof extends perpendicularly to the oscillation direction. A ceramic oscillation gyro sensor the characteristics of which are hardly affected by the surrounding magnetic field, the manufacture of which is easy, and which has a high sensitivity is provided.
    • 配备有用于检测当振荡器旋转时垂直于振荡器(2)的振荡方向的位移的压电/电致伸缩装置(12)的检测单元与振荡器(2)和支撑件(2)一起由陶瓷烧结体构成 4)。 检测单元由比振荡器(2)薄的主要表面在振荡方向上延伸的第一片状部分(6)构成。 压电/电致伸缩装置(12)通过成膜方法一体形成在第一片状部分(6)上。 此外,用于降低振动元件(2)在振荡方向上的刚性并使振动元件(2)容易振荡的薄的第二片状部分(8)被一体地设置成使得其主表面垂直延伸 振荡方向。 一种陶瓷振荡陀螺传感器,其特性几乎不受周围磁场的影响,其制造容易,并且具有高灵敏度。