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    • 56. 发明授权
    • High-throughput graphene printing and selective transfer using a localized laser heating technique
    • 使用局部激光加热技术的高通量石墨烯印刷和选择性转移
    • US09573814B2
    • 2017-02-21
    • US14185350
    • 2014-02-20
    • THE TRUSTEES OF THE STEVENS INSTITUTE OF TECHNOLOGY
    • Vikram PatilYoun-Su KimKitu KumarEui-Hyeok Yang
    • H01L21/02C01B31/04H01L29/66
    • C01B31/0453C01B32/186H01L29/66015Y10T156/1705
    • A method of high-throughput printing and selective transfer of graphene onto a substrate includes the steps of: providing a thermal release tape having graphene adhered thereto; placing a substrate onto the graphene; pressing the thermal tape and the graphene against the substrate at a uniformly-distributed pressure; heating localized portions of the thermal tape and graphene using a localized heat source, thereby diminishing the adhesive properties of the thermal release tape in the localized portions and transferring graphene from said localized portions to the substrate; and separating the thermal release tape from the substrate. The method may include the further step of moving the localized heat source to selected positions on the thermal release tape during the heating step, thereby forming a pattern of heated portions. The method may use a laser beam as the localized heat source, movement of the laser beam being performed by a computer-controlled deflectable mirror.
    • 将高通量打印和石墨烯选择性转移到基板上的方法包括以下步骤:提供具有粘附在其上的石墨烯的热释放带; 将衬底放置在石墨烯上; 以均匀分布的压力将热敏胶带和石墨烯压在基材上; 使用局部热源加热热带和石墨烯的局部部分,从而减小局部部分中的热释放带的粘合性能,并将石墨烯从所述局部部分转移到基底; 以及将热释放带与基底分离。 该方法可以包括在加热步骤期间将局部热源移动到热释放带上的选定位置的步骤,从而形成加热部分的图案。 该方法可以使用激光束作为局部热源,由计算机控制的可偏转镜执行激光束的移动。