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    • 54. 发明授权
    • Method of manufacturing substrate having transparent conductive film, substrate having transparent conductive film manufactured using the method, and touch panel using the substrate
    • 制造具有透明导电膜的基板的方法,使用该方法制造的具有透明导电膜的基板和使用该基板的触摸面板
    • US06685805B2
    • 2004-02-03
    • US09909570
    • 2001-07-20
    • Shogo KiyotaYukihiro Katoh
    • Shogo KiyotaYukihiro Katoh
    • C23C1434
    • G06F3/045C23C14/086H01B1/08H01H13/785H01H2201/028H01H2209/084
    • In a method of manufacturing a substrate having a transparent conductive film in which sputtering is carried out on a transparent insulating substrate using an indium oxide/tin oxide target under an atmosphere of a mixed gas containing argon and oxygen, when the ratio of oxygen to argon in the mixed gas is in a suitable range of 0.016 to 0.018, the carrier density of the transparent conductive film becomes a maximum, while the mobility rises progressively as the ratio of oxygen to argon increases. The surface resistance of the transparent conductive film, that is the reciprocal of the product of the carrier density and the mobility, 1/(carrier density×mobility), takes a minimum value when the ratio of oxygen to argon is in the above suitable range. In this case, crystallization of the film is promoted and the percentage change between the surface resistance of the film before heat treatment and the surface resistance of the film after heat treatment can be kept down to within ±10%.
    • 在制造具有透明导电膜的基板的方法中,其中在含有氩和氧的混合气体的气氛下,在使用氧化铟/氧化锡靶的透明绝缘基板上进行溅射,当氧与氩的比例 在混合气体的合适范围为0.016〜0.018的范围内,透明导电膜的载流子密度变得最大,而随着氧与氩的比例增加,迁移率逐渐上升。 当氧与氩的比例在上述适当范围内时,透明导电膜的表面电阻,即载流子密度乘积和迁移率1 /(载流子密度迁移率)的乘积的倒数为最小值。 在这种情况下,促进了膜的结晶,并且热处理前的膜的表面电阻与热处理后的膜的表面电阻之间的百分比变化可以保持在±10%以内。
    • 55. 发明申请
    • Method of manufacturing substrate having transparent conductive film, substrate having transparent conductive film manufactured using the method, and touch panel using the substrate
    • 制造具有透明导电膜的基板的方法,使用该方法制造的具有透明导电膜的基板和使用该基板的触摸面板
    • US20020034836A1
    • 2002-03-21
    • US09909570
    • 2001-07-20
    • Nippon Sheet Glass Co., Ltd.
    • Shogo KiyotaYukihiro Katoh
    • H01L021/44H01L029/04
    • G06F3/045C23C14/086H01B1/08H01H13/785H01H2201/028H01H2209/084
    • In a method of manufacturing a substrate having a transparent conductive film in which sputtering is carried out on a transparent insulating substrate using an indium oxide/tin oxide target under an atmosphere of a mixed gas containing argon and oxygen, when the ratio of oxygen to argon in the mixed gas is in a suitable range of 0.016 to 0.018, the carrier density of the transparent conductive film becomes a maximum, while the mobility rises progressively as the ratio of oxygen to argon increases. The surface resistance of the transparent conductive film, that is the reciprocal of the product of the carrier density and the mobility, 1/(carrier densitynullmobility), takes a minimum value when the ratio of oxygen to argon is in the above suitable range. In this case, crystallization of the film is promoted and the percentage change between the surface resistance of the film before heat treatment and the surface resistance of the film after heat treatment can be kept down to within null10%.
    • 在制造具有透明导电膜的基板的方法中,其中在含有氩和氧的混合气体的气氛下,在使用氧化铟/氧化锡靶的透明绝缘基板上进行溅射,当氧与氩的比例 在混合气体的合适范围为0.016〜0.018的范围内,透明导电膜的载流子密度变得最大,而随着氧与氩的比例增加,迁移率逐渐上升。 当氧与氩的比例在上述适当范围内时,透明导电膜的表面电阻,即载流子密度乘积和迁移率1 /(载流子密度迁移率)的乘积的倒数为最小值。 在这种情况下,促进了膜的结晶,并且热处理前的膜的表面电阻与热处理后的膜的表面电阻之间的百分比变化可以保持在±10%以内。
    • 56. 发明授权
    • One-sided electrode arrangement on an intermediate spacer for a touchscreen
    • 用于触摸屏的中间隔板上的单面电极布置
    • US06305073B1
    • 2001-10-23
    • US09474707
    • 1999-12-29
    • James Cameron Badders, Jr.
    • James Cameron Badders, Jr.
    • H01H1100
    • G06F3/045H01H13/702H01H13/703H01H13/785H01H2201/028H01H2207/004H01H2207/008H01H2207/01H01H2207/028H01H2209/038H01H2209/06H01H2209/082H01H2211/014H01H2229/002H01H2229/028H01H2231/004Y10T29/49105
    • A membrane switch (10) is disclosed having a bottom membrane (12) with an upper conductive surface (16), a top membrane (14) with a lower conductive surface (18), and an intermediate spacer (20) disposed therebetween. The intermediate spacer includes a central aperture (24) and is formed of an intermediate substrate (21) having a lower surface (26) and an upper surface (28). First y-axis electrodes (30A, 30B) including first contact portions (31A, 31B) and second x-axis electrodes (34A, 34B) including second contact portions (38A, 38B) are both formed on the upper surface of the intermediate substrate. The intermediate spacer further includes an upper adhesive layer (45) including predefined first apertures (50) adapted to overlie the first contact portions of the y-axis electrodes and predefined second apertures (47) adapted to overlie the second contact portions of the x-axis electrodes, and a lower adhesive layer (43). Preferably after the intermediate spacer is assembled, at least one hole (39) is defined through each of the first contact portions, extending through the intermediate substrate and the lower adhesive layer. Then conductive epoxy material (41) is poured into the first aperture and the hole so as to provide an electrical conduction path between the first contact portion of the y-axis electrode and the lower adhesive layer. Similarly, conductive epoxy material is poured into the second aperture predefined through the upper adhesive layer so as to provide an electrical conduction path between the second contact portion of the x-axis electrode and the upper adhesive layer. When the intermediate spacer thus constructed is secured between the bottom and top membranes, the y-axis and x-axis electrodes are in electrical contact with the bottom and top membranes, respectively.
    • 公开了一种膜开关(10),其具有具有上导电表面(16)的底膜(12),具有下导电表面(18)的顶膜(14)和设置在其间的中间间隔件(20)。 中间间隔件包括中心孔(24),并由具有下表面(26)和上表面(28)的中间基底(21)形成。 包括第二接触部分(38A,38B)的第一接触部分(31A,31B)和第二x轴电极(34A,34B)的第一y轴电极(30A,30B)都形成在中间基板 。 中间间隔物还包括上粘合剂层(45),其包括适于覆盖y轴电极的第一接触部分的预定义的第一孔(50)和适于覆盖x轴电极的第二接触部分的预定义的第二孔(47) 轴电极和下粘合剂层(43)。 优选地,在组装中间间隔件之后,通过每个第一接触部分限定至少一个孔(39),延伸穿过中间基底和下部粘合剂层。 然后将导电环氧材料(41)注入第一孔和孔中,以在y轴电极的第一接触部分和下粘合剂层之间提供导电路径。 类似地,将导电环氧树脂材料注入到通过上粘合剂层预定的第二孔中,以便在x轴电极的第二接触部分和上粘合剂层之间提供导电路径。 当如此构造的中间间隔件固定在底部和顶部膜之间时,y轴和x轴电极分别与底部和顶部膜电接触。