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51. 发明授权

US07230242B2 Methods for SEM inspection of fluid containing samples 有权
标题翻译：含有液体样品的SEM检查方法
公开(公告)号：US07230242B2
公开(公告)日：2007-06-12
申请号：US10516411
申请日：2003-06-01
申请人： Vered Behar , Amotz Nechushtan , Yossef Kliger , Opher Gileadi , David Sprinzak , Ory Zik , Yiftah Karni
发明人： Vered Behar , Amotz Nechushtan , Yossef Kliger , Opher Gileadi , David Sprinzak , Ory Zik , Yiftah Karni
IPC分类号： G01N23/00
CPC分类号： B01L3/50855 , B01L3/508 , B01L2200/0689 , B01L2300/042 , B01L2300/0654 , B01L2300/0829 , G01N1/36 , H01J37/20 , H01J37/244 , H01J2237/2003 , H01J2237/2006 , H01J2237/201 , H01J2237/2608
摘要： A method of visualizing a sample in a wet environment including introducing a sample into a specimen enclosure in a wet environment and scanning the sample in the specimen enclosure in a scanning electron microscope, thereby visualizing the sample.
摘要翻译：一种在潮湿环境中可视化样品的方法，包括将样品引入湿环境中的样品外壳中，并在扫描电子显微镜中扫描样品外壳中的样品，从而使样品可视化。

52. 发明申请

US20070125947A1 Sample enclosure for a scanning electron microscope and methods of use thereof 审中-公开
标题翻译：用于扫描电子显微镜的样品外壳及其使用方法
公开(公告)号：US20070125947A1
公开(公告)日：2007-06-07
申请号：US10546170
申请日：2003-12-10
申请人： David Sprinzak , Ory Zik , Yiftah Karni , Amots Nechushtan , Opher Gileadi
发明人： David Sprinzak , Ory Zik , Yiftah Karni , Amots Nechushtan , Opher Gileadi
IPC分类号： G21K7/00
CPC分类号： H01J37/20 , B01L3/508 , B01L3/50855 , B01L2300/042 , B01L2300/0654 , B01L2300/0829 , H01J37/244 , H01J2237/2003 , H01J2237/2006 , H01J2237/201 , H01J2237/2608 , H01J2237/28
摘要： A SEM sample container having a sample enclosure (100, 102) including an electron beam permeable, fluid permeable membrane (132), and a peripheral enclosure sealed to the membrane, and a sample enclosure closure including a quick-connect attachment (152) for sealing engagement with the sample enclosure.
摘要翻译：具有包括电子束可透过的流体可渗透膜（132）的样品外壳（100,102）和密封到膜的外围外壳的SEM样品容器以及包括快速连接附件（152）的样品外壳封闭件与样品外壳密封接合。

53. 发明申请

US20070114434A1 MULTI-PIXEL ELECTRON MICROBEAM IRRADIATOR SYSTEMS AND METHODS FOR SELECTIVELY IRRADIATING PREDETERMINED LOCATIONS 有权
标题翻译：多像素电子微波辐射器系统和选择性预测位置的方法
公开(公告)号：US20070114434A1
公开(公告)日：2007-05-24
申请号：US11320515
申请日：2005-12-28
申请人： Sha Chang , Otto Zhou
发明人： Sha Chang , Otto Zhou
IPC分类号： G01K1/08
CPC分类号： H01J37/304 , G21K5/04 , H01J33/02 , H01J33/04 , H01J37/302 , H01J37/317 , H01J2201/30469 , H01J2237/0635 , H01J2237/2004 , H01J2237/2006 , H01J2237/316
摘要： Multi-pixel electron microbeam irradiator systems and methods are provided with particular applicability for selectively irradiating predetermined cells or cell locations. A multi-pixel electron microbeam irradiator system can include a plurality of individually addressable electron field emitters sealed in a vacuum. The multi-pixel electron microbeam irradiator system can include an anode comprising one or more electron permeable portions corresponding to the plurality of electron field emitters. Further, the multi-pixel electron microbeam irradiator system can include a controller operable to individually control electron extraction from each of the electron field emitters for selectively irradiating predetermined locations such as cells or cell locations.
摘要翻译：提供了多像素电子微束照射器系统和方法，其特别适用于选择性地照射预定的细胞或细胞位置。多像素电子微束照射器系统可以包括在真空中密封的多个可单独寻址的电子场发射器。多像素电子微束照射器系统可以包括阳极，该阳极包括对应于多个电子场发射体的一个或多个电子透过部分。此外，多像素电子微束照射器系统可以包括控制器，其可操作以单独地控制来自每个电子场发射器的电子提取，以选择性地照射诸如单元或单元位置的预定位置。

54. 发明申请

US20060273277A1 Plasma resistant seal assembly with replaceable barrier shield 审中-公开
标题翻译：等离子电阻密封组件，带可更换屏障
公开(公告)号：US20060273277A1
公开(公告)日：2006-12-07
申请号：US11414848
申请日：2006-05-01
申请人： Mark Heller , Leslie Feeney
发明人： Mark Heller , Leslie Feeney
IPC分类号： F16K1/00
CPC分类号： H01J37/32495 , H01J2237/166 , H01J2237/2005 , H01J2237/2006
摘要： The seal assemblies of this invention comprise a closure assembly having first and second grooves, with a rubber seal mounted in said first groove and a removably mounted, replaceable barrier strand in said second groove, said barrier located between the rubber seal and a plasma source, whereby said barrier shields the rubber seal from erosive effects of the plasma.
摘要翻译：本发明的密封组件包括具有第一和第二凹槽的封闭组件，其中安装在所述第一凹槽中的橡胶密封件和在所述第二凹槽中的可拆卸地安装的可更换的阻挡筋，所述屏障位于橡胶密封件和等离子体源之间，由此所述屏障屏蔽橡胶密封件免受等离子体的侵蚀作用。

55. 发明授权

US06956223B2 Multi-directional scanning of movable member and ion beam monitoring arrangement therefor 有权
标题翻译：可移动构件的多方向扫描和离子束监测装置
公开(公告)号：US06956223B2
公开(公告)日：2005-10-18
申请号：US10119290
申请日：2002-04-10
申请人： Theodore H. Smick , Frank D. Roberts , Marvin Farley , Geoffrey Ryding , Takao Sakase , Adrian Murrell , Peter Edwards , Bernard Harrison
发明人： Theodore H. Smick , Frank D. Roberts , Marvin Farley , Geoffrey Ryding , Takao Sakase , Adrian Murrell , Peter Edwards , Bernard Harrison
IPC分类号： H01J37/04 , H01J37/18 , H01J37/317 , H01L21/265 , H01L21/68 , B05C5/00
CPC分类号： H01J37/20 , H01J37/18 , H01J37/3171 , H01J2237/20 , H01J2237/2006 , H01J2237/2007 , H01J2237/20221 , H01J2237/20228 , H01J2237/20278 , H01L21/682 , H01L21/6835
摘要： Semiconductor processing apparatus is disclosed which provides for movement of a scanning arm 60 of a substrate or wafer holder 180, in at least two generally orthogonal directions (so-called X-Y scanning). Scanning in a first direction is longitudinally through an aperture 55 in a vacuum chamber wall. The arm 60 is reciprocated by one or more linear motors 90A, 90B. The arm 60 is supported relative to a slide 100 using gimballed air bearings so as to provide cantilever support for the arm relative to the slide 100. A compliant feedthrough 130 into the vacuum chamber for the arm 60 then acts as a vacuum seal and guide but does not itself need to provide bearing support. A Faraday 450 is attached to the arm 60 adjacent the substrate holder 180 to allow beam profiling to be carried out both prior to and during implant. The Faraday 450 can instead or additionally be mounted adjacent the rear of the substrate holder or at 90° to it to allow beam profiling to be carried out prior to implant, with the substrate support reversed or horizontal and out of the beam line.
摘要翻译：公开了半导体处理装置，其提供基板或晶片保持器180的扫描臂60在至少两个大致正交的方向（所谓的X-Y扫描）上的移动。沿着第一方向进行的扫描纵向地穿过真空室壁中的孔口55。臂60由一个或多个线性电动机90A，90B往复运动。臂60相对于滑块100被支撑，使用支撑的空气轴承，以便相对于滑块100为臂提供悬臂支撑。进入用于臂60的真空室中的柔性馈通件130然后用作真空密封和引导件，但本身不需要提供轴承支撑件。法拉第450附接到靠近基板保持器180的臂60，以允许在植入之前和期间执行光束轮廓。法拉第450可以替代地或附加地安装在靠近衬底保持器的后部或与其相邻的90°处，以允许在植入之前执行光束轮廓，其中衬底支撑件反向或水平并且离开光束线。

56. 发明授权

EP2541588B1 STAGE DEVICE 有权
标题翻译：舞台设备
公开(公告)号：EP2541588B1
公开(公告)日：2017-07-12
申请号：EP10810729.3
申请日：2010-02-23
申请人： Advantest Corporation
发明人： OAE, Yoshihisa , SHIMIZU, Youichi
IPC分类号： H01L21/027 , F16C32/06 , G03F7/20
CPC分类号： F16C29/025 , F16C32/0614 , F16C2300/62 , F16C2360/45 , G03F7/70716 , G03F7/70816 , H01J37/20 , H01J2237/2006 , H01J2237/202 , H01J2237/3175

57. 发明公开

EP3139397A1 TRANSPORT DEVICE, TREATMENT DEVICE, VACUUM DEVICE, AND CHARGED PARTICLE BEAM DEVICE 审中-公开
标题翻译：运输工具，BEHANDLUNGSVORRICHTUNG，VAKUUMVORRICHTUNG UND LADUNGSTEILCHENSTRAHLVORRICHTUNG
公开(公告)号：EP3139397A1
公开(公告)日：2017-03-08
申请号：EP16186479.8
申请日：2016-08-31
申请人： Hitachi High-Tech Science Corporation
发明人： IWAHORI, Toshiyuki , HASUDA, Masakatsu
IPC分类号： H01J37/18
CPC分类号： H01J37/185 , H01J37/20 , H01J37/285 , H01J2237/2002 , H01J2237/2004 , H01J2237/2006 , H01J2237/31749
摘要： Provided is a transport device in which a reduction in the size and a reduction in the cost of the entire device are possible. A transport unit 20 which is interposed between a sub-chamber 4 and a first treatment chamber 10 is provided with: a transport bar 21 which transports a sample S along a right-left direction in a preliminary sample chamber; a support 31 which supports the transport bar; a case 41 which supports the support so as to be rotatable around a rotation axis intersecting the right-left direction; and a second O-ring 52 which seals an inside of the case. The preliminary sample chamber and a first treatment space can communicate with each other through the inside of the case. The transport bar is made so as to be able to transition between a first state where the transport bar can transport the sample between the preliminary sample chamber and the inside of the case, and a second state where the transport bar can transport the sample between the first treatment space and the inside of the case, by rotation of the support with respect to the case.
摘要翻译：提供了一种输送装置，其中可以减小整个装置的尺寸和降低成本。插入在副室4和第一处理室10之间的输送单元20设置有：在预备样品室中沿左右方向输送样品S的输送杆21; 支撑运输栏的支架31; 壳体41，其支撑支撑件以能够围绕与左右方向相交的旋转轴线旋转; 以及密封壳体内部的第二O形环52。预备样品室和第一处理空间可以通过壳体内部彼此连通。输送条被制成能够在运输条可以在预备样品室和壳体的内部之间输送样品的第一状态和第二状态之间转移，其中运输条可以将样品在第一处理空间和壳体的内部，通过支撑件相对于壳体的旋转。

58. 发明公开

EP3125271A1 MICRO-CHAMBER FOR INSPECTING SAMPLE MATERIAL 有权
标题翻译： MIKROKAMMER ZUR UNTERSUCHUNG VON PROBENMATERIAL
公开(公告)号：EP3125271A1
公开(公告)日：2017-02-01
申请号：EP15178825.4
申请日：2015-07-29
申请人： FEI Company
发明人： MELE, Luigi , DONA, Pleun , VAN VEEN Gerard
IPC分类号： H01J37/20
CPC分类号： H01J37/20 , B01L3/502723 , B01L2200/0605 , B01L2300/0654 , B01L2300/0887 , B01L2300/123 , B01L2400/0406 , B01L2400/0694 , G01N1/04 , G01N21/03 , G01N21/11 , G01N2021/0346 , G01N2021/6482 , G01N2223/307 , H01J37/26 , H01J2237/2002 , H01J2237/2003 , H01J2237/2005 , H01J2237/2006
摘要： The invention relates to a micro-chamber for inspecting sample material, the sample material immersed in a liquid when filling the micro-chamber, the micro-chamber comprising:
• an inspection volume (101) for holding the sample material, the inspection volume defined by:
o a first rigid layer (102A+102B),
o a second rigid layer (103A+103B) spaced from the first rigid layer, and
o a hermetic seal (104) between the first and the second rigid layers,
Characterized in that,
prior to filling the inspection chamber with the liquid with immersed sample material,
• a thin part (105) of at least one of the rigid layers separates the inspection volume from the outside,
• the thin part is equipped to be punctured, and
• the inspection volume is an evacuated volume,

as a result of which the liquid with immersed sample material, when placed upon the thin part, is sucked into the inspection volume when the thin part is punctured.
This results in a micro-chamber that can be filled with sample material without the need of applying vacuum tubing's to it.
摘要翻译：本发明涉及用于检查样品材料的微室，当填充微室时浸在液体中的样品材料，所述微室包括：用于保持样品材料的检查体积（101），检查体积由第一刚性层（102A + 102B），与第一刚性层隔开的第二刚性层（103A + 103B）和第一和第二刚性层之间的气密密封（104）限定，其特征在于，先前用浸没的样品材料将液体填充到检查室中，至少一个刚性层的薄部分（105）将检查体积与外部分隔开，薄部分被装备成被刺破，并且€ ¢检查体积为抽真空体积，其结果是当薄的部分被刺穿时，将浸入样品的液体放置在薄部分时被吸入检查体积。这导致可以填充样品材料的微室，而不需要对其施加真空管。

59. 发明授权

EP2024733B1 Compact scanning electron microscope 有权
标题翻译：小型扫描电子显微镜
公开(公告)号：EP2024733B1
公开(公告)日：2014-11-26
申请号：EP07798253.6
申请日：2007-06-07
申请人： FEI COMPANY
发明人： BIERHOFF, Mart Petrus Maria , BUIJSSE, Bart , KOOIJMAN, Cornelis Sander , VAN LEEUWEN, Hugo , TAPPEL, Hendrik Gezinus , SANFORD, Colin August , STOKS, Sander Richard Marie , BERGER, Steven , BORMANS, Ben Jacobus Marie , DRIESSEN, Koen Arnoldus Wilhelmus , PERSOON, Johannes Antonius Hendricus W.G.
IPC分类号： H01J37/28 , H01J37/16 , H01J37/18 , H01J37/20 , H01J37/22 , H01J37/244
CPC分类号： H01J37/26 , H01J37/16 , H01J37/18 , H01J37/185 , H01J37/20 , H01J37/21 , H01J37/226 , H01J37/244 , H01J37/261 , H01J37/28 , H01J37/302 , H01J2237/1405 , H01J2237/162 , H01J2237/1825 , H01J2237/188 , H01J2237/2003 , H01J2237/2006
摘要： A compact electron microscope uses a removable sample holder having walls that form a part of the vacuum region in which the sample resides. By using the removable sample holder to contain the vacuum, the volume of air requiring evacuation before imaging is greatly reduced and the microscope can be evacuated rapidly. In a preferred embodiment, a sliding vacuum seal allows the sample holder to be positioned under the electron column, and the sample holder is first passed under a vacuum buffer to remove air in the sample holder.

60. 发明公开

EP2541588A1 STAGE DEVICE 有权
标题翻译： OBJEKTTISCHVORRICHTUNG
公开(公告)号：EP2541588A1
公开(公告)日：2013-01-02
申请号：EP10810729.3
申请日：2010-02-23
申请人： Advantest Corporation
发明人： OAE, Yoshihisa , SHIMIZU, Youichi
IPC分类号： H01L21/027 , F16C32/06 , G03F7/20
CPC分类号： F16C29/025 , F16C32/0614 , F16C2300/62 , F16C2360/45 , G03F7/70716 , G03F7/70816 , H01J37/20 , H01J2237/2006 , H01J2237/202 , H01J2237/3175
摘要： A stage device to be used in a vacuum includes: a gas supply unit for generating a gas; a base member having four of upper, lower, right, and left surfaces; a slider formed in a frame shape surrounding the base member and having surfaces facing the respective surfaces of the base member, and disposed to be movable; and an air bearing configured to float the slider by supplying the gas to a space between the base member and the slider. The slider includes: an air chamber provided on the surface facing the base member for accumulating air, and the base member includes thereinside a slider-moving air flow passage configured to supply the gas from an inlet port for letting in the gas generated by the gas supply unit to an outlet port for supplying the gas to the air chamber of the slider.
摘要翻译：在真空中使用的级装置包括：用于产生气体的气体供应单元; 具有上，下，右和左表面四个的基部构件; 滑块，其形成为围绕所述基座构件并且具有面向所述基座构件的相应表面的表面并且被设置为可移动的框架形状; 以及空气轴承，其构造成通过将气体供应到基部构件和滑块之间的空间来浮动滑块。滑块包括：设置在面向基座部件的表面上的空气室，用于积聚空气，底座部件包括滑块移动空气流动通道，该滑块移动空气流动通道构造成从入口端口供应气体，以使气体产生气体供给单元到用于将气体供应到滑块的空气室的出口。

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