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    • 65. 发明申请
    • SERRATED MEMS RESONATORS
    • SERRATED MEMS谐振器
    • WO2008133754A3
    • 2008-12-31
    • PCT/US2007088196
    • 2007-12-19
    • SITIME INCHAGELIN PAUL MERRITTPEDERSEN DAVID RAYMOND
    • HAGELIN PAUL MERRITTPEDERSEN DAVID RAYMOND
    • H02N2/00H01L41/00
    • H02N1/008H03H9/02275H03H9/2468H03H2009/02496
    • One embodiment of the present invention sets forth a serrated tooth actuator for driving MEMS resonator structures. The actuator includes a fixed drive electrode having a serrated tooth surface opposing a MEMS resonator arm also having a serrated tooth surface, where the MEMS resonator arm is configured to rotate towards the drive electrode when an AC signal is applied to the drive electrode. Such a configuration permits higher amplitude signals to be applied to the drive electrode without the performance of the actuator being compromised by nonlinear effects. In addition, the serrated tooth configuration enables a sufficiently high actuating force to be maintained even though the distance traversed by the MEMS resonator arm during operation is quite small. Further, the serrated configuration allows a MEMS resonator system to withstand larger fluctuations in voltage and larger substrate stresses without experiencing a substantial shift in resonant frequency.
    • 本发明的一个实施例提出了用于驱动MEMS谐振器结构的锯齿状致动器。 致动器包括固定的驱动电极,其具有与具有锯齿状齿表面的MEMS谐振器臂相对的锯齿状齿表面,其中,当将CCP信号施加到驱动电极时,MEMS谐振臂被配置为朝向驱动电极旋转。 这种配置允许更高幅度的信号被施加到驱动电极,而不会使致动器的性能受到非线性效应的影响。 此外,即使在操作期间由MEMS谐振器臂穿过的距离相当小,锯齿形齿构造也能够保持足够高的致动力。 此外,锯齿形配置允许MEMS谐振器系统承受较大的电压波动和较大的衬底应力,而不会发生谐振频率的实质性偏移。