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    • 62. 发明公开
    • 유리 기판의 제조 방법 및 고평탄하고 고평활한 유리 기판
    • 玻璃基板的加工方法,以及高平板和高平板玻璃基板
    • KR1020080111468A
    • 2008-12-23
    • KR1020087024824
    • 2007-04-11
    • 아사히 가라스 가부시키가이샤
    • 오쯔까,고지고지마,히로시이또,마사부미
    • C03C23/00C03C19/00
    • C03C15/02B24B7/242B24B37/08C03C3/06C03C19/00C03C23/005C03C23/006C03C2201/42C03C2204/08Y10T428/24355
    • The present invention is to provide a processing method for manufacturing a highly flat and highly smooth glass substrate with good productivity. A highly flat and highly smooth glass substrate is obtained with good productivity by processing of a glass substrate, which comprises a step of measuring the surface shape of the glass substrate prior to processing, a step of processing the surface of the substrate by changing a processing condition for each site (first processing step), and a step of finish-polishing the surface of the glass substrate that has been subjected to the first processing step (second processing step). At that time, the processing condition for each site within the surface of the substrate in the first processing step is determined from a processing amount that is determined from the concave-convex shape of the surface of the glass substrate prior to processing and the in-plane distribution of a processing amount by the second processing step separately measured by using a similar substrate. ® KIPO & WIPO 2009
    • 本发明提供一种以高生产率制造高度平坦且高度光滑的玻璃基板的加工方法。 通过处理玻璃基板,通过加工玻璃基板,以高生产率获得高度平坦且高度平滑的玻璃基板,其包括在处理之前测量玻璃基板的表面形状的步骤,通过改变处理来处理基板的表面的步骤 (第一处理步骤),以及对经过第一处理步骤(第二处理步骤)的玻璃基板的表面进行精抛光的步骤。 此时,根据从处理前的玻璃基板的表面的凹凸形状确定的处理量来确定第一处理工序中的基板的表面内的每个部位的处理条件, 通过使用相似的基板分别测量的第二处理步骤的处理量的平面分布。 ®KIPO&WIPO 2009