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    • 72. 发明专利
    • Method and apparatus for hydrogenating chlorosilane
    • 加氢氯霉素的方法与装置
    • JP2007091587A
    • 2007-04-12
    • JP2006267779
    • 2006-09-29
    • Wacker Chemie Agワッカー ケミー アクチエンゲゼルシャフトWacker Chemie AG
    • PAETZOLD UWEREISBECK ANTONSURNER MANFRED
    • C01B33/107B01J19/00
    • C01B33/1071F01N3/0253F01N3/36F01N2260/02F01N2260/024F01N2610/03
    • PROBLEM TO BE SOLVED: To provide a method and an apparatus for hydrogenating chlorosilane.
      SOLUTION: In the method of hydrogenating chlorosilane in a reactor having a reaction section having a surface to be in contact with chlorosilane and a heating element having a surface on which a stream is directly passed to be heated and which is to be in contact with chlorosilane, wherein chlorosilane is hydrogenated by the reaction section and the heating element in the reactor made of graphite, a Si-containing compound and hydrogen are brought into contact with the surface of the reaction section and the heating element to form a SiC film on the surface of the reaction section and the heating element in site in a first step and the chlorosilane/hydrogen mixture is heated in the reaction section using the heating element to hydrogenate the chlorosilane in a second step. In such a case, the reaction in the first step is carried out at a temperature higher than that in the second step.
      COPYRIGHT: (C)2007,JPO&INPIT
    • 要解决的问题:提供氢氯化硅烷的方法和装置。 解决方案:在具有反应部分的反应器中使氯硅烷氢化的方法中,反应部分具有与氯硅烷接触的表面和具有其上直接通过待加热的流的表面的加热元件, 与氯代硅烷接触,其中氯硅烷被反应部分氢化,并且由石墨制成的反应器中的加热元件,含Si化合物和氢与反应部分和加热元件的表面接触以形成SiC膜 在第一步骤中在反应部分的表面和加热元件的位置上,并且使用加热元件在反应部分中加热氯硅烷/氢混合物,以在第二步骤中氢化氯代硅烷。 在这种情况下,第一步骤中的反应在比第二步高的温度下进行。 版权所有(C)2007,JPO&INPIT