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    • 72. 发明授权
    • Method of direct Coulomb explosion in laser ablation of semiconductor structures
    • 半导体结构激光烧蚀中直接库仑爆炸的方法
    • US07759607B2
    • 2010-07-20
    • US11820655
    • 2007-06-20
    • William W. Chism, II
    • William W. Chism, II
    • B23K26/00
    • B23K26/1423B23K26/03B23K26/032B23K26/0624B23K26/0665B23K26/40B23K2101/40B23K2103/50
    • A new technique and Method of Direct Coulomb Explosion in Laser Ablation of Semiconductor Structures in semiconductor materials is disclosed. The Method of Direct Coulomb Explosion in Laser Ablation of Semiconductor Structures provides activation of the “Coulomb explosion” mechanism in a manner which does not invoke or require the conventional avalanche photoionization mechanism, but rather utilizes direct interband absorption to generate the Coulomb explosion threshold charge densities. This approach minimizes the laser intensity necessary for material removal and provides optimal machining quality. The technique generally comprises use of a femtosecond pulsed laser to rapidly evacuate electrons from a near surface region of a semiconductor or dielectric structure, and wherein the wavelength of the laser beam is chosen such that interband optical absorption dominates the carrier production throughout the laser pulse. The further application of a strong electric field to the semiconductor or dielectric structure provides enhancement of the absorption coefficient through a field induced redshift of the optical absorption. The use of this electric field controlled optical absorption is available in all semiconductor materials and allows precise control of the ablation rate. When used in conjunction with nanoscale semiconductor or dielectric structures, the application of a strong electric field provides for laser ablation on sub-micron lateral scales.
    • 公开了半导体材料中半导体结构的激光烧蚀中的直接库仑爆炸的新技术和方法。 在半导体结构的激光烧蚀中的直接库仑爆炸的方法提供了“库仑爆炸”机制的激活,其方式不会引起或需要常规的雪崩光电离机理,而是利用直接的带间吸收来产生库仑爆炸阈值电荷密度 。 这种方法可最大限度地减少材料去除所需的激光强度,并提供最佳的加工质量。 该技术通常包括使用飞秒脉冲激光来从半导体或电介质结构的近表面区域快速排出电子,并且其中选择激光束的波长,使得带间光吸收主导整个激光脉冲中的载流子产生。 对半导体或电介质结构的强电场的进一步应用通过光吸收的场诱导红移提高了吸收系数。 在所有的半导体材料中都可使用这种电场控制的光吸收,并允许精确控制烧蚀速率。 当与纳米级半导体或电介质结构结合使用时,强电场的应用提供了亚微米横向尺度上的激光烧蚀。
    • 74. 发明授权
    • Process for high quality plasma arc cutting of stainless steel and
aluminum
    • 高品质等离子弧切割不锈钢和铝的工艺
    • US5414236A
    • 1995-05-09
    • US989183
    • 1992-12-11
    • Richard W. Couch, Jr.Nicholas A. SandersZhipeng LuLifeng Luo
    • Richard W. Couch, Jr.Nicholas A. SandersZhipeng LuLifeng Luo
    • B23K10/00B23K26/12B23K26/14B23K35/38
    • B23K26/123B23K10/00B23K26/125B23K26/1423B23K35/38B23K2203/05B23K2203/10
    • A plasma arc torch uses a mix of reactive and reducing gas flows to cut sheets of stainless steel, aluminum and other non-ferrous metals. The reducing gas flow to the cut is varied as a percentage of the total gas flow to maintain a reducing atmosphere down through the cut, but to leave a predominantly oxidizing atmosphere at the intersection of the cut and the bottom surface of the sheet being out. These flows can also be characterized as either a plasma gas flow, one that forms the arc, or a shield gas flow that surrounds the arc. The reactive gas is preferably a flow of air, oxygen, nitrogen, carbon dioxide or a combination of these gases. The reactive gas is usually in the plasma gas flow, whether alone or mixed with other gases. The reducing gas is preferably hydrogen, hydrogen 35, methane, or a mixture of these gases. For aluminum, the reactive gas is preferably air or nitrogen and the reducing gas is preferably methane or a mixture of methane and air.
    • 等离子弧焊炬使用反应和还原气流混合切割不锈钢,铝和其他有色金属片。 进入切割的还原气体流量以总气体流量的百分比而变化,以通过切割保持还原气氛,但在片材的切割和底部表面的交叉点处留下主要的氧化气氛。 这些流动也可以表征为等离子体气体流,形成电弧的流动或围绕电弧的屏蔽气体流。 反应气体优选为空气,氧气,氮气,二氧化碳或这些气体的组合。 反应气体通常处于等离子体气体流中,无论是单独还是与其他气体混合。 还原气体优选为氢气,氢气,甲烷或这些气体的混合物。 对于铝,反应性气体优选为空气或氮气,并且还原气体优选为甲烷或甲烷和空气的混合物。
    • 75. 发明授权
    • Laser-radio frequency energy beam system
    • 激光射频能量束系统
    • US3872279A
    • 1975-03-18
    • US40916773
    • 1973-10-24
    • SIRIUS CORP
    • FAIRBAIRN THOMAS E
    • B23K26/12B05B7/22B23K26/14G02B27/00H01S3/00B23K9/00
    • B23K26/1423B05B7/22B05B7/228B23K26/144B23K26/147
    • A laser-radio frequency system for generating a high temperature beam and for directing and modulating the combined beam at a workpiece or target. The system includes a hollow circular electrode mounted within a circular nozzle and spaced apart from the nozzle to define an annular gap. A radio frequency generator having a hollow metal coil as its tank coil is connected to the nozzle and a pressurized inert gas is fed through the tank coil into the nozzle. When the generator is activated, a coherent R.F. electron stream is emitted from the electrode and the inert gas flows along the annular gap to sheath and focus the stream into an energy beam directed toward the workpiece. A laser generator provides a laser beam through the hollow portion of the electrode which is reflected and focused onto the workpiece; therefore an algebraic summation of both electromagnetic energies is obtained at the workpiece in the non-oxidizing atmosphere. The radio frequency tank coil may be connected to a source of powder for spraying a coating on the workpiece.
    • 一种用于产生高温光束并用于在工件或靶上引导和调制组合光束的激光射频系统。 该系统包括安装在圆形喷嘴内并与喷嘴间隔开以限定环形间隙的中空圆形电极。 将具有中空金属线圈作为其槽线圈的射频发生器连接到喷嘴,并且将加压的惰性气体通过箱体线圈供给到喷嘴中。 当发电机被激活时,一个相干的R.F. 从电极发射电子流,并且惰性气体沿着环形间隙流动到鞘并将流聚焦成指向工件的能量束。 激光发生器通过反射并聚焦在工件上的电极的中空部分提供激光束; 因此在非氧化性气氛中的工件处获得两种电磁能的代数求和。 无线电频率槽线圈可以连接到用于在工件上喷涂涂层的粉末源。