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    • 74. 发明申请
    • REDUCING THE SPECTRAL BANDWIDTH OF LASERS
    • 减少激光的光谱带宽
    • WO2014011897A1
    • 2014-01-16
    • PCT/US2013/050102
    • 2013-07-11
    • KLA-TENCOR CORPORATION
    • ARMSTRONG, J. Joseph
    • H01S3/10
    • H01S3/06754G01N21/00G01N21/9501G01N21/956H01S3/0057H01S3/0092H01S3/02H01S3/06758H01S3/10H01S3/30H01S3/302H01S2301/08
    • A laser system for semiconductor inspection includes a fiber-based fundamental light source for generating fundamental light that is then converted/mixed by a frequency conversion module to generate UV-DUV laser light. The fundamental light source includes a nonlinear chirp element (e.g., a Bragg grating or an electro-optic modulator) that adds a nonlinear chirp to the seed light laser system prior to amplification by the fiber amplifier(s) (e.g., doped fiber or Raman amplifiers). The nonlinear chirp includes an x2 or higher nonlinearity and is configured to compensate for the Self Phase Modulation (SPM) characteristics of the fiber-based amplifiers such that fundamental light is generated that has a spectral E95 bandwidth within five times that of the seed light. When multiple series-connected amplifiers are used, either a single nonlinear chirp element is provided before the amplifier string, or chirp elements are included before each amplifier.
    • 用于半导体检测的激光系统包括用于产生基本光的基于光纤的基本光源,然后由变频模块转换/混合以产生UV-DUV激光。 基本光源包括非线性啁啾元件(例如,布拉格光栅或电光调制器),其在由光纤放大器(例如,掺杂光纤或拉曼)放大之前将种子光激光系统添加非线性啁啾 放大器)。 非线性啁啾包括x2或更高的非线性,并且被配置为补偿基于光纤的放大器的自相位调制(SPM)特性,使得产生具有在种子光的5倍以内的光谱E95带宽的基本光。 当使用多个串联放大器时,在放大器串之前提供单个非线性啁啾元件,或者在每个放大器之前包括啁啾元件。
    • 75. 发明申请
    • COMPACT RAMAN GENERATOR WITH SYNCHRONIZED PULSES
    • 具有同步脉冲的紧凑型拉曼发生器
    • WO2013142718A1
    • 2013-09-26
    • PCT/US2013/033350
    • 2013-03-21
    • RAYTHEON COMPANY
    • ROCKWELL, David, A.SHKUNOV, Vladimir, V.
    • H01S3/30
    • H01S3/30H01S3/08027H01S3/08059H01S3/094026H01S3/094076H01S3/094084
    • According to an embodiment of the disclosure, a Raman generator includes a Raman medium (410, 510) and one or more optical elements (415a, 415b, 415c, 415d, 515a, 515b). The Raman medium is configured to receive a pump pulse at a first wavelength and shift at least a portion of the pump pulse energy or power into a Stokes-shifted pulse at a second wavelength. The one or more optical elements (415a, 415b, 415c, 415d, 515a, 515b) are configured to synchronize one or more subsequent passages of the Stokes-shifted pulse through the Raman medium with one or more subsequent pump pulses at the first wavelength. The synchronized passage of the Stokes-shifted pulse and one or more subsequent pump pulses through the Raman medium increases a power of the Stoke-shifted pulse.
    • 根据本公开的实施例,拉曼发生器包括拉曼介质(410,510)和一个或多个光学元件(415a,415b,415c,415d,515a,515b)。 所述拉曼介质被配置为接收第一波长的泵浦脉冲,并将所述泵浦脉冲能量或功率的至少一部分移动到第二波长的斯托克斯脉冲。 所述一个或多个光学元件(415a,415b,415c,415d,515a,515b)被配置为使经过拉曼介质的斯托克斯位移脉冲的一个或多个后续通道与第一波长的一个或多个后续泵浦脉冲同步。 斯托克斯移位脉冲和一个或多个后续泵浦脉冲通过拉曼介质的同步通过增加了斯托克斯脉冲的功率。
    • 77. 发明申请
    • DEVICES, SYSTEMS AND METHODS PROVIDING MICRO-RING AND/OR MICRO-RACETRACK RESONATOR
    • 提供微环和/或微型差分谐振器的装置,系统和方法
    • WO2010009460A1
    • 2010-01-21
    • PCT/US2009/051117
    • 2009-07-20
    • THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OF NEW YORKWONG, Chee, WeiYANG, XiaodongMCMILLAN, James, F.
    • WONG, Chee, WeiYANG, XiaodongMCMILLAN, James, F.
    • H01S3/083
    • H01S3/30H01S3/0637H01S3/082H01S3/083
    • Provided herein are certain embodiments of systems, methods and devices for Raman lasers based on micro-ring and mircro-racetrack resonators, and the manufacturing thereof. For example, a device can be provided which is structured to receive an electro-magnetic radiation including a resonator arrangement which has a distance from one edge thereof to another edge thereof of at most approximately a wavelength of the electro-magnetic radiation that impacts the resonator arrangement. According to some embodiments, the resonator arrangement can be configured to generate a Raman radiation when impacted by a further electro-magnetic radiation. In some embodiments, the resonator arrangement can solely generate the Raman radiation which is lasing, which Raman radiation can be generated by the resonator arrangement in a continuous mode and/or a pulsed lasing mode. The resonator arrangement can generate the Raman radiation which is lasing without a use of an external electrical driver.
    • 本文提供了基于微环和微跑轨道谐振器的拉曼激光器的系统,方法和装置的某些实施例及其制造。 例如,可以提供一种装置,其被构造为接收包括谐振器装置的电磁辐射,所述谐振器装置具有从其一个边缘到另一个边缘的距离至多近似于撞击谐振器的电磁辐射的波长的距离 安排。 根据一些实施例,谐振器装置可被配置为当受到另外的电磁辐射的影响时产生拉曼辐射。 在一些实施例中,谐振器装置可以仅产生激光的拉曼辐射,该拉曼辐射可以由连续模式和/或脉冲激光模式中的谐振器装置产生。 谐振器装置可以产生不使用外部电驱动器的激光的拉曼辐射。