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    • 76. 发明专利
    • Resist composition and method for forming resist pattern
    • 用于形成电阻图案的耐蚀组合物和方法
    • JP2013080109A
    • 2013-05-02
    • JP2011220101
    • 2011-10-04
    • Tokyo Ohka Kogyo Co Ltd東京応化工業株式会社
    • UTSUMI YOSHIYUKIDAZAI NAOHIRO
    • G03F7/004C07C61/135C07C65/10C07C309/12C07C311/04C07C381/12G03F7/039H01L21/027
    • PROBLEM TO BE SOLVED: To provide a resist composition excellent in lithography characteristics and pattern shape and to provide a method for forming a resist pattern.SOLUTION: A resist composition includes: a base component (A) generating an acid by exposure in which a solubility of the base component in a developer is changed by an action of an acid; an acid generator component (C) generating an acid having a pKa of 0 or more by exposure (excluding the base component (A)); and an acid generator component (B) generating an acid by exposure (excluding the base component (A) and the acid generator component (C)), where the base component (A) contains a polymer (A1) having an anion moiety generating an acid by exposure on at least one terminal of the main chain.
    • 要解决的问题:提供光刻特性和图案形状优异的抗蚀剂组合物,并提供形成抗蚀剂图案的方法。 抗蚀剂组合物包括:通过曝光产生酸的碱成分(A),其中碱性组分在显影剂中的溶解度通过酸的作用而改变; 通过曝光产生pKa为0以上的酸的酸发生剂成分(C)(不包括碱成分(A))。 以及通过曝光产生酸的酸产生剂成分(B)(不包括基础成分(A)和酸产生剂成分(C)),其中,碱成分(A)含有具有阴离子部分的聚合物(A1) 酸暴露于主链的至少一个末端。 版权所有(C)2013,JPO&INPIT