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71. 发明申请

US20190032998A1 ASSEMBLY OF A LINER AND A FLANGE FOR A VERTICAL FURNACE AS WELL AS THE LINER AND THE VERTICAL FURNACE 审中-公开
公开(公告)号：US20190032998A1
公开(公告)日：2019-01-31
申请号：US15660805
申请日：2017-07-26
申请人： ASM IP Holding B.V.
发明人： Lucian C. Jdira , Chris G.M. de Ridder , Theodorus G.M. Oosterlaken , Klaas P. Boonstra , Herbert Terhorst , Juul Keijser
IPC分类号： F27B5/04 , F27B1/14 , F27B1/28 , F27B5/08 , F27B5/12 , F27B5/16 , F27D3/00 , F27D11/00
摘要： An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising:an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner;a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.

72. 发明授权

US09803925B2 Thermal shielding system 有权
公开(公告)号：US09803925B2
公开(公告)日：2017-10-31
申请号：US14654611
申请日：2013-12-19
申请人： PLANSEE SE
发明人： Christian Grohs , Karl Huber , Arno Plankensteiner , Karl Raggl , Bernhard Valentini
IPC分类号： C30B35/00 , F27D1/00 , C21D9/00 , C04B35/48 , F27B1/14 , F27B3/12 , F27B5/08 , F27B14/10 , F27D1/02
CPC分类号： F27D1/0033 , C04B35/48 , C21D9/00 , F27B1/14 , F27B3/12 , F27B5/08 , F27B14/10 , F27D1/0006 , F27D1/02
摘要： A thermal shielding system for thermally shielding a batch space of high-temperature furnaces includes at least one shielding element. The shielding element has an encasing wall formed of refractory metal sheet(s) and a ceramic material accommodated in the wall. The ceramic material is present in a particulate and/or fibrous structure and it is based on zirconium oxide (ZrO2)

73. 发明申请

US20170073786A1 HEAT TREATMENT APPARATUS 审中-公开
标题翻译：热处理设备
公开(公告)号：US20170073786A1
公开(公告)日：2017-03-16
申请号：US15343355
申请日：2016-11-04
申请人： IHI Corporation , IHI Machinery and Furnace Co., Ltd.
发明人： Kazuhiko KATSUMATA , Kaoru ISOMOTO , Takahiro NAGATA , Akira NAKAYAMA , Yuusuke SHIMIZU , Gen NISHITANI
IPC分类号： C21D9/00 , F27B5/14 , F27B5/08 , F27D1/18 , F27D1/00
摘要： A heat treatment apparatus includes: a heat treatment chamber that performs heating treatment for a treatment object thereinside; and a thermal insulator disposed inside the heat treatment chamber and surrounding a receiving area for the treatment object. The heat treatment chamber includes a side wall portion and a lid portion configured to be attachable to and detachable from the side wall portion. The thermal insulator includes a ceiling disposed on the inside of the lid portion. The ceiling includes a thermal insulator lid that is at least part of the ceiling and is united to the lid portion.
摘要翻译：热处理设备包括：对其内部的处理对象进行加热处理的热处理室; 以及热绝缘体，其设置在所述热处理室的内部并且围绕所述处理对象的接收区域。热处理室包括侧壁部分和盖部分，盖部分被构造成可附接到侧壁部分并从侧壁部分拆卸。绝热体包括设置在盖部内侧的顶棚。天花板包括至少部分天花板并与盖部分结合的绝热盖。

74. 发明授权

US08030599B2 Substrate processing apparatus, heating device, and semiconductor device manufacturing method 有权
标题翻译：基板加工装置，加热装置以及半导体装置的制造方法
公开(公告)号：US08030599B2
公开(公告)日：2011-10-04
申请号：US12429462
申请日：2009-04-24
申请人： Masakazu Shimada
发明人： Masakazu Shimada
IPC分类号： F27B5/00 , F27B5/08 , F27B5/14 , C23C16/00
CPC分类号： H01L21/67109
摘要： Provided are a substrate processing apparatus, a heating device, and a semiconductor device manufacturing method. The substrate processing apparatus comprises a process chamber configured to process a substrate. A heating element is installed at a peripheral side of the process chamber. An annular inner wall is installed at a peripheral side of the heating element. An annular outer wall is installed at a peripheral side of the inner wall with a space being formed therebetween. An annular cooling member is installed at the space for cooling. An actuating mechanism moves the cooling member between a contacting position where the cooling member makes contact with at least one of the inner wall and the outer wall and a non-contacting position where the cooling member does not make contact with any one of the inner wall and the outer wall. A control unit controls at least the actuating mechanism.
摘要翻译：提供了一种基板处理装置，加热装置和半导体装置的制造方法。基板处理装置包括被配置为处理基板的处理室。加热元件安装在处理室的周边。环形内壁安装在加热元件的周边。环形外壁安装在内壁的周边，其间形成有空间。环形冷却件安装在冷却空间。致动机构将冷却部件移动到冷却部件与内壁和外壁之中的至少一个接触的接触位置和冷却部件不与内壁中的任何一个接触的非接触位置和外墙。控制单元至少控制致动机构。

75. 发明授权

US06919539B2 Substantially-uniform-temperature annealing 失效
标题翻译：基本均匀的温度退火
公开(公告)号：US06919539B2
公开(公告)日：2005-07-19
申请号：US10623877
申请日：2003-07-21
申请人： Shariar Motakef , Serhat Yesilyurt
发明人： Shariar Motakef , Serhat Yesilyurt
IPC分类号： C30B33/00 , G02B1/02 , G02B5/30 , F27B5/08 , F27B5/14 , F27B3/28 , F27D1/10
CPC分类号： G02B5/3083 , C30B29/12 , C30B33/00 , G02B1/02 , Y10T117/1016
摘要： A system for heating optical members includes a thermally-conductive inner housing defining an interior volume for receiving an optical member to be heated, a thermally-insulative outer housing at least partially containing the thermally-conductive inner housing, and a heating structure disposed outside the inner housing and configured to provide heat through the thermally-conductive inner housing and into the interior volume defined by the inner housing.
摘要翻译：一种用于加热光学构件的系统包括限定用于接收待加热的光学构件的内部空间的导热内部壳体，至少部分地包含导热内部壳体的热绝缘外部壳体，以及设置在内壳体并且被配置为通过导热内壳体提供热量并进入由内壳体限定的内部空间。

76. 发明授权

US3647924A High-temperature furnace for melting materials in space 失效
标题翻译：用于空气中熔融材料的高温炉
公开(公告)号：US3647924A
公开(公告)日：1972-03-07
申请号：US3647924D
申请日：1971-02-12
申请人： NASA
发明人： RASQUIN JOHN R
IPC分类号： B64G4/00 , F27D11/02 , F27B5/08 , H05B3/00
CPC分类号： F27D11/02 , B64G4/00
摘要： An electrically powered furnace for melting high-melting point materials in the vacuum and zero gravity environment of space comprising an alumina crucible, cylindrical in shape, and enclosing a cylindrical tantalum sample holder that contains the sample to be melted. The crucible is surrounded by concentric cylindrical enclosures made of polished sheet molybdenum. The sample holder is clamped between a pair of round plates and a pair of alignment bolts are joined to the circular plates and extend along the longitudinal axis of the furnace through the end covers of the crucible and surrounding concentric enclosures.
摘要翻译：一种用于在空间真空和零重力环境中熔化高熔点材料的电动炉，其包括圆柱形的氧化铝坩埚，并且包围含有要熔化的样品的圆柱形钽样品架。坩埚被由抛光片钼制成的同心圆柱形外壳包围。样品架夹在一对圆形板之间，一对校准螺栓与圆形板连接，并通过坩埚的端盖和周围的同心围板沿炉纵向轴线延伸。

77. 发明申请

US20220008991A1 SEALED FURNACE 有权
公开(公告)号：US20220008991A1
公开(公告)日：2022-01-13
申请号：US17429763
申请日：2020-02-11
申请人： Desktop Metal, Inc.
发明人： Nathan Woodard , Jonah Samuel Myerberg , Emanuel M Sachs , Richard Remo Fontana , Robert Edward Weiss , Yet-Ming Chiang , Stephen Dipietro , Nicholas Graham Bandiera
IPC分类号： B22F3/00 , B22F3/10 , B33Y40/20 , F27B5/04 , F27B5/08 , F27D1/00 , F27D99/00 , F27B5/18
摘要： A furnace may include an outer wall defining a chamber, the chamber including an internal cavity configured to receive one or more parts, at least one heater positioned within the chamber, the at least one heater being configured to generate temperatures of at least about 800 degrees Celsius within the internal cavity, and a vacuum pump configured to apply a vacuum to at least a portion of the chamber. The furnace may also include at least one layer of inner insulation and at least one layer of outer insulation disposed outward of the inner insulation with respect to the chamber, the at least one layer of outer insulation being sealed with respect to the at least one layer of inner insulation.

78. 发明授权

US10605530B2 Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace 有权
公开(公告)号：US10605530B2
公开(公告)日：2020-03-31
申请号：US15660805
申请日：2017-07-26
申请人： ASM IP Holding B.V.
发明人： Lucian C. Jdira , Chris G. M. de Ridder , Theodorus G. M. Oosterlaken , Klaas P. Boonstra , Herbert Terhorst , Juul Keijser
IPC分类号： F27D7/06 , F27B5/04 , F27B1/14 , F27B1/28 , F27B5/08 , F27B5/12 , F27B5/16 , F27D3/00 , F27D11/00 , H01L21/67
摘要： An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising: an inlet opening configured to insert and remove a boat configured to carry substrates in the inner space of the liner; a gas inlet to provide a gas to the inner space. The assembly is constructed and arranged with a gas exhaust opening to remove gas from the inner space and a space between the liner and the low pressure tube.

79. 发明授权

US10529597B2 Heater elements with enhanced cooling 有权
公开(公告)号：US10529597B2
公开(公告)日：2020-01-07
申请号：US15619568
申请日：2017-06-12
申请人： Arsalan Emami
发明人： Arsalan Emami
IPC分类号： F27D11/00 , H01L21/67 , H01L23/467 , F27D1/00 , F27B5/08 , F27B3/24 , F27D9/00
摘要： A heater assembly with enhanced cooling pursuant to various embodiments described herein makes use of fluidic flow in the insulation or in the space used for insulation. By creating a natural convection or forced convection flow, the heater cools down faster, it can operate at lower temperatures and/or higher temperature precision, and it can improve temperature controllability by generating higher heat loss rates.

80. 发明授权

US09679791B2 Heater elements with enhanced cooling 有权
公开(公告)号：US09679791B2
公开(公告)日：2017-06-13
申请号：US14920900
申请日：2015-10-23
申请人： Arsalan Emami
发明人： Arsalan Emami
IPC分类号： F27D11/00 , H01L21/67 , H01L23/467 , F27D1/00 , F27B5/08 , F27D9/00
CPC分类号： H01L21/67098 , F27B5/08 , F27D1/0006 , F27D11/00 , F27D2009/0005 , H01L21/67109 , H01L23/467 , H01L2924/0002 , H01L2924/00
摘要： A heater assembly with enhanced cooling pursuant to various embodiments described herein makes use of fluidic flow in the insulation or in the space used for insulation. By creating a natural convection or forced convection flow, the heater cools down faster, it can operate at lower temperatures and/or higher temperature precision, and it can improve temperature controllability by generating higher heat loss rates.

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