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71. 发明专利

IL209773D0 PROBE DETECTION SYSTEM 未知
公开(公告)号：IL209773D0
公开(公告)日：2011-04-28
申请号：IL20977310
申请日：2010-12-05
申请人： INFINITESIMA LTD
IPC分类号： G01Q10/06 , G01Q20/02
摘要： A probe detection system (74) for use with a scanning probe microscope comprises both a height detection system (88) and deflection detection system (28). As a sample surface is scanned, light reflected from a microscope probe (16) is separated into two components. A first component (84) is analysed by the deflection detection system (28) and is used in a feedback system that maintains the average probe deflection substantially constant during the scan. The second component (86) is analysed by the height detection system (88) from which an indication of the height of the probe above a fixed reference point, and thereby an image of the sample surface, is obtained. Such a dual detection system is particularly suited for use in fast scanning applications in which the feedback system is unable to respond at the rate required to adjust probe height between pixel positions.

72. 发明专利

DE102010001467A1 Sondenmikroskop 未知
公开(公告)号：DE102010001467A1
公开(公告)日：2010-08-05
申请号：DE102010001467
申请日：2010-02-01
申请人： MITUTOYO CORP
发明人： SUZUKI YOSHIMASA , KAWASAKI KAZUHIKO , KOGA SATOSHI
IPC分类号： G01Q20/02 , G01B11/14
摘要： Ein Sondenmikroskop (1) beinhaltet einen Cantilever (2) mit einer Sonde (21), ein Verschiebungserfassungs-Optiksystem (3), ein Beobachtungs-Optiksystem (4), eine Objektivlinse (6) und ein paralleles Glas (7). Das Verschiebungserfassungs-Optiksystem (3) beinhaltet eine erste Lichtquelle (31) und ein Lichterfassungselement (35). Das Beobachtungs-Optiksystem (4) beinhaltet eine zweite Lichtquelle (41), eine bilderzeugende Linse (42) und eine Kamera (43). Die Objektivlinse (6) ist zwischen dem Cantilever (2) und der ersten und zweiten Lichtquelle (31, 41) angeordnet und wird allgemein von dem Verschiebungserfassungs-Optiksystem (3) und dem Beobachtungs-Optiksystem (4) genutzt. Das parallele Glas (7) ist so vorgesehen, dass es frei zwischen dem Cantilever (2) und der Objektivlinse (6) eingefügt und zurückgezogen werden kann, um einen Brennpunkt der Objektivlinse (6) einzustellen.

73. 发明专利

DE69638084D1 未知
公开(公告)号：DE69638084D1
公开(公告)日：2009-12-31
申请号：DE69638084
申请日：1996-08-23
申请人： VEECO INSTR INC
发明人： YOUNG JAMES M , PRATER CRAIG B , GRIGG DAVID A , MEYER CHARLES R , HERTZOG WILLIAM H , GURLEY JOHN A , ELINGS VIRGIL B
IPC分类号： H01J37/22 , G01B7/34 , G01N27/00 , G01Q10/02 , G01Q20/02 , G01Q30/06 , G01Q60/24 , G01Q70/02
摘要： A scanning probe microscope and method having automated exchange and precise alignment of probes, wherein one or more additional stored probes for installation onto a probe mount are stored in a storage cassette or a wafer, a selected probe is aligned to a detection system, and the aligned probe is then clamped against the probe mount. Clamping is performed using a clamp which is disabled when removing a replacement probe from the storage cassette, enabled when installing the probe on the probe mount and disabled when releasing the probe at a later time for subsequent probe exchange. Probe alignment is automated using signals from the probe detection system or by forming an optical image of the probe using a camera or similar technique and determining probe positioning using pattern recognition processing of the probe image to allow probe removal and exchange without operator intervention. Techniques for error checking are employed to ensure proper probe installation and operation.

75. 发明专利

DE602005008926D1 未知
公开(公告)号：DE602005008926D1
公开(公告)日：2008-09-25
申请号：DE602005008926
申请日：2005-03-04
申请人： CONSEJO SUPERIOR INVESTIGACION
发明人： LECHUGA GOMEZ LAURA M , ALVAREZ SANCHEZ MAR , TAMAYO DE MIGUEL FRANCISCO JAV
IPC分类号： G01Q20/02 , G01Q30/04

78. 发明专利

DE60211388T2 未知
公开(公告)号：DE60211388T2
公开(公告)日：2007-02-08
申请号：DE60211388
申请日：2002-08-14
申请人： SWISSPROBE AG
发明人： FREDERIX LOUIS , HUG JOSEF
IPC分类号： B81B3/00 , G01D5/26 , G01D5/353 , G01Q10/00 , G01Q20/02 , G01Q30/02 , G01Q60/24 , G01Q70/00 , G02B26/10
摘要： An optical sensor, in particular for a scanning force microscope, measures the deflection of a cantilever ( 3 ) using an optical resonator between the cantilever ( 3 ) and an output surface ( 12 b) of a lens assembly ( 10 ). In order to form the resonator, output surface ( 12 b) is concave and parallel to the wavefronts of the light within the resonator. This design provides a resonator of high stability and allows to keep the distance between lens assembly ( 10 ) and cantilever ( 3 ) comparatively large.

79. 发明专利

DE69928474T2 未知
公开(公告)号：DE69928474T2
公开(公告)日：2006-07-20
申请号：DE69928474
申请日：1999-02-05
申请人： SEIKO INSTR INC
发明人： MITSUOKA YASUYUKI , CHIBA NORIO , KASAMA NOBUYUKI , NIWA TAKASHI , NAKAJIMA KUNIO
IPC分类号： G01B11/30 , G01N37/00 , G01Q20/02 , G01Q60/18 , G01Q60/22 , G01Q70/02 , G01Q70/06 , G01Q70/16 , G02B21/00 , G11B7/135 , G11B7/22

80. 发明专利

AT326052T 未知
公开(公告)号：AT326052T
公开(公告)日：2006-06-15
申请号：AT02755480
申请日：2002-08-14
申请人： SWISSPROBE AG
发明人： FREDERIX PATRICK LOUIS THEODOR , HUG HANS JOSEF
IPC分类号： B81B3/00 , G01D5/26 , G01D5/353 , G01Q10/00 , G01Q20/02 , G01Q30/02 , G01Q60/24 , G01Q70/00 , G02B26/10 , G12B21/08 , G12B21/20 , G12B21/02
摘要： An optical sensor, in particular for a scanning force microscope, measures the deflection of a cantilever ( 3 ) using an optical resonator between the cantilever ( 3 ) and an output surface ( 12 b) of a lens assembly ( 10 ). In order to form the resonator, output surface ( 12 b) is concave and parallel to the wavefronts of the light within the resonator. This design provides a resonator of high stability and allows to keep the distance between lens assembly ( 10 ) and cantilever ( 3 ) comparatively large.

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