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81. 发明申请

US20220100106A1 WORKPIECE CONTAINER SYSTEM 有权
公开(公告)号：US20220100106A1
公开(公告)日：2022-03-31
申请号：US17168207
申请日：2021-02-05
申请人： GUDENG PRECISION INDUSTRIAL CO., LTD
发明人： MING-CHIEN CHIU , CHIA-HO CHUANG , HSIN-MIN HSUEH , HSING-MIN WEN , SHU-HUNG LIN
IPC分类号： G03F7/20 , B01D69/12 , B01D71/02 , B01D53/26
摘要： The instant disclosure discloses a workpiece container system comprising a storage assembly that comprises a seat member. The seat member has a storage portion that defines a longitudinal axis through a geometric center region thereof, provided with a workpiece receiving region that encompasses the geometric center region and configured to receive a workpiece. The seat member has a pair of flank portions arranged on opposite sides of the storage portion along the longitudinal axis, each having a thickness thinner than that of the storage portion. A diffuse inducing component is provided on the storage portion in the workpiece receiving region yet offsets the geometric center region thereof.

82. 发明申请

US20220062955A1 RETICLE POD CLEANSING APPARATUS 有权
公开(公告)号：US20220062955A1
公开(公告)日：2022-03-03
申请号：US17088605
申请日：2020-11-04
申请人： GUDENG PRECISION INDUSTRIAL CO., LTD.
发明人： CHIA-HO CHUANG , HSIN-MIN HSUEH , MING-CHIEN CHIU
IPC分类号： B08B5/02 , B08B13/00 , B08B9/093 , H01L21/673 , G03F1/82
摘要： A reticle pod cleansing apparatus includes a cavity, a gas injection unit, a dust counting unit and a control unit. The cavity has a chamber, an inlet opening in communication with the chamber, and an outlet opening in communication with the chamber. The gas injection unit is disposed at the chamber and is in communication with an inlet device through the inlet opening to inject gas into the chamber. The dust counting unit is in communication with the outlet opening to receive gas discharged from the outlet opening and calculate dust quantity of the gas discharged. The control unit is in signal communication with dust counting unit and adapted to send a signal when the calculated dust quantity is less than a predetermined threshold. During a cleansing process, the reticle pod cleansing apparatus detects precisely and instantly whether a reticle pod being cleansed has been sufficiently cleansed or not.

83. 外观设计

USD944220S1 Reticle box 有权
公开(公告)号：USD944220S1
公开(公告)日：2022-02-22
申请号：US29757167
申请日：2020-11-04
申请人： GUDENG PRECISION INDUSTRIAL CO., LTD.
设计人： Ming-Chien Chiu , Yung-Chin Pan , Yu-Chen Chu , Cheng-En Chung

84. 发明授权

US11175579B2 Reticle pod 有权
公开(公告)号：US11175579B2
公开(公告)日：2021-11-16
申请号：US16876149
申请日：2020-05-18
申请人： GUDENG PRECISION INDUSTRIAL CO., LTD.
发明人： Chia-Ho Chuang , Hsin-Min Hsueh , Yu-Chen Chu , Ming-Chien Chiu
IPC分类号： G03F1/66
摘要： A reticle pod includes a body, cover, sliding-rail member, sliding-fastening member and shut-corresponding element. The sliding-rail member has a dent portion and a slot portion and defines a locked direction. The dent portion extends from the slot portion in the locked direction. The sliding-fastening member is slidably disposed at the sliding-rail member. The sliding-fastening member has a fastening portion and resilient arms. The resilient arms are inserted into a slot of the slot portion. The fastening portion has a fastening groove corresponding in height to the slot portion. An oblique-guide surface is disposed above the fastening groove. When the cover switches from an open state to a closed state, the shut-corresponding element pushes the sliding-fastening member across the oblique-guide surface and thus compresses the sliding-fastening member, allowing the shut-corresponding element to enter the fastening groove. Then, the resilient arms releases resilient potential energy whereby the sliding-fastening member rebounds.

85. 发明授权

US11104496B2 Non-sealed reticle storage device 有权
公开(公告)号：US11104496B2
公开(公告)日：2021-08-31
申请号：US16923458
申请日：2020-07-08
申请人： GUDENG PRECISION INDUSTRIAL CO., LTD.
发明人： Chia-Ho Chuang , Hsing-Min Wen , Hsin-Min Hsueh , Yi-Hsuan Lee , Ming-Chien Chiu
IPC分类号： B65D53/06 , B65D85/38 , B01D46/00 , B01D46/42 , B01D46/54 , F16K27/02 , G03F1/66 , H01L21/673 , B65D81/24 , B65D85/30 , G03F7/20
摘要： A reticle storage device includes a top lid having a ceiling and a cover surrounding the ceiling, and a bottom lid having a carrier and a peripheral structure surrounding the carrier. When the top lid engages with the bottom lid, a passage is defined therebetween and therefore the reticle storage device is not sealed.

86. 发明授权

US11031267B2 Method and system of measuring air-tightness and container measured thereby 有权
公开(公告)号：US11031267B2
公开(公告)日：2021-06-08
申请号：US16039689
申请日：2018-07-19
申请人： Gudeng Precision Industrial Co., LTD
发明人： Chia-Ho Chuang , Shu-Hung Lin
IPC分类号： H01L21/673 , G01M3/00 , G03F1/66 , B65D85/48 , G03F7/20
摘要： A method and a system of measuring air-tightness and a container measured thereby are provided. In the method, a first cover having a first contact surface and a first base having a second contact surface are provided. The two contact surfaces are used for engaging with each other to form an air-tight state. Further, a first contour curve relating to the first contact surface and a second contour curve relating to the second contact surface are acquired. Then, the two contour curves are brought into contact with each other, and the area of a first gap between the two curves is determined. When the area of the first gap is equal to or smaller than a threshold, the first cover and the first base are paired as a first combination of acceptable air-tightness so as to form the container.

87. 发明申请

US20210033989A1 APPARATUS FOR CONTAINING A SUBSTRATE AND METHOD OF MANUFACTURING THE APPARATUS 有权
公开(公告)号：US20210033989A1
公开(公告)日：2021-02-04
申请号：US16704086
申请日：2019-12-05
申请人： GUDENG PRECISION INDUSTRIAL CO., LTD.
发明人： CHIA-HO CHUANG , HSIN-MIN HSUEH , MING-CHIEN CHIU
IPC分类号： G03F7/20
摘要： An apparatus for containing a substrate and a method of manufacturing the apparatus are provided. The apparatus for containing a substrate includes: a base having a periphery and an upward-facing top horizontal planar surface with a plurality of contact elements, the contact elements being used for engaging the substrate to hold the substrate upon the upward-facing top horizontal planar surface, an upward-facing frame-like support surface extending from the upward-facing top horizontal planar surface and surrounding the contact elements at a position proximate to the periphery of the base; and a cover having a downward-facing frame-like support surface being in large-area contact with the upward-facing frame-like support surface to define a cavity for containing the substrate between the base and the cover. The downward-facing and upward-facing frame-like support surfaces in contact with each other are not at the same level as the upward-facing top horizontal planar surface.

88. 发明申请

US20200243361A1 POD AND METHOD FOR CONTAINING A RETICLE USING THE SAME 审中-公开
公开(公告)号：US20200243361A1
公开(公告)日：2020-07-30
申请号：US16798458
申请日：2020-02-24
申请人： GUDENG PRECISION INDUSTRIAL CO., LTD
发明人： MING-CHIEN CHIU , CHIA-HO CHUANG , HSIN-MIN HSUEH
IPC分类号： H01L21/673 , G03F7/20 , G03F1/66
摘要： A reticle pressing unit and an EUV reticle pod using the same are provided. An inner assembly includes an upper cover and a lower cover. The lower cover includes a supporting element for supporting the reticle. A pressing unit for pressing the reticle is disposed on the upper cover and includes a pressing element and a limiting cap. The pressing element has oppositely arranged pressing part and pressure receiving part. The pressing part extends through the upper cover to press against the reticle. The pressing element is covered by the limiting cap and is protruded outwardly from a top surface of the limiting cap. An outer cover has a pushing surface for forming a surface-to-surface contact with the pressure receiving part and for simultaneously pressing against the pressure receiving part and the top surface to solve the problems relating to the reticle which is applied with uneven forces.

89. 发明申请

US20200183267A1 RETICLE CONTAINER 审中-公开
公开(公告)号：US20200183267A1
公开(公告)日：2020-06-11
申请号：US16706612
申请日：2019-12-06
申请人： Gudeng Precision Industrial CO., LTD.
发明人： MING-CHIEN CHIU , YUNG-CHIN PAN , CHIH-SHENG HUNG
IPC分类号： G03F1/66 , H01L21/673
摘要： The present invention discloses a reticle container which comprises an upper cover and a lower cover. A plurality of identification modules is disposed on the edge of the reticle container. Therefore, the user can quickly identify the usage of the reticle container or number per se. On the other hand, the reticle container of the present invention further comprises supporters, sustainers and connecting modules. Therefore, the reticle container of the present invention is able to satisfy various structural requirements and conditions for carrying the reticle in a sealed environment.

90. 发明授权

US10670976B2 EUV reticle pod 审中-公开
公开(公告)号：US10670976B2
公开(公告)日：2020-06-02
申请号：US15880243
申请日：2018-01-25
申请人： Gudeng Precision Industrial Co., LTD
发明人： Hsin-Min Hsueh , Chia-Ho Chuang , Cheng-Ju Lee , Jeng-Jie Huang
IPC分类号： G03F1/66 , G03F7/20 , H01L21/673
摘要： An EUV reticle pod is provided. The pod includes an inner and an outer box assembly. The inner box assembly contained in the outer box assembly includes a base and a cover. The base has an upper surface and a surrounding wall. The upper surface includes a carry surface, at least one trench, and a first contacting surface. The EUV reticle is carried above the carry surface. The trench has a circular loop structure and its bottom is lower than the carry surface. The carry surface, the trench, and the first contacting surface are sequentially distributed from the center of the upper surface towards the surrounding wall. The cover has a concave for accommodating the EUV reticle and a second contacting surface for cooperating with the first contacting surface to form an air-tight seal. The trench captures and traps particles to reduce the particle contamination on the reticle.

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