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    • 86. 发明公开
    • SUBSTRATE RECOVERY DEVICE
    • SUBSTRATRÜCKGEWINNUNGSVORRICHTUNG
    • EP2913654A1
    • 2015-09-02
    • EP13849192.3
    • 2013-10-04
    • Olympus Corporation
    • MORIMOTO, Nobuhiko
    • G01N1/28G01N33/48G02B21/32G02B21/36
    • G01N1/04B32B41/00B32B43/006B32B2310/0831G01N1/08G01N1/312G01N21/6456G01N2201/025G02B21/365Y10T156/1158Y10T156/1179Y10T156/19Y10T156/1917Y10T156/1983
    • The present invention provides a substrate collecting device (1) that includes a stage (3) on which a sheet (11) is placed with a plurality of substrates (2) facing downward, an acquiring section (4) which carries out a predetermined operation on some of the substrates (2), which are disposed at predetermined positions, from above the stage (3) thereby to cause the substrates (2) to come off from the sheet (11) and fall, an observation section (5) and a collecting section (7) disposed below the stage (3), and a moving mechanism (8), which integrally moves the observation section (5) and the collecting section (7) in a horizontal direction. The moving mechanism (8) is capable of positioning the observation section (5) and the collecting section (7) at two positions at which the observation section (5) or the collecting section (7) is positioned substantially vertically below a predetermined position.
    • 本发明提供了一种基板收集装置(1),其包括在其上放置有面向下的多个基板(2)的片材(11)的台(3),执行预定操作的获取部分(4) 在从台架(3)的上方配置在预定位置的一些基板(2)上,从而使基板(2)从板材(11)脱落并落下,观察部(5)和 设置在所述台架(3)的下方的收纳部(7)和使所述观察部(5)和所述收集部(7)沿水平方向一体移动的移动机构(8)。 移动机构(8)能够将观察部分(5)和收集部分(7)定位在观察部分(5)或收集部分(7)基本垂直地位于预定位置的两个位置处。