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    • 4. 发明专利
    • Angular velocity sensor
    • 角速度传感器
    • JP2008292477A
    • 2008-12-04
    • JP2008120224
    • 2008-05-02
    • Rutgers The State Univ Of New JerseySeiko Epson Corpセイコーエプソン株式会社ルトガース,ザ ステート ユニヴァーシティ オブ ニュージャーシィ
    • YONG YOOK-KONGPATEL MIHIRKANNA SHIGEOTANAKA MASAKO
    • G01C19/56
    • G01C19/5642
    • PROBLEM TO BE SOLVED: To provide an angular velocity sensor facilitating a support structure, improving frequency temperature characteristics, and detecting angular velocity precisely.
      SOLUTION: The angular velocity sensor comprises a projection that projects in the direction of the Y' axis on the main surface of a rotary Y cut crystal substrate, and is extended in the direction of the X axis. A drive electrode and a detection electrode are formed on a main surface near the projection. A thickness slide vibration in the direction of the X axis is excited on the crystal substrate by the drive electrode to excite vibration at the projection. Then, the projection is bent and displaced by Coriolis' force operating in a direction orthogonal to the vibration at the projection according to the rotation around the Y' axis. The displacement of the projection is applied to the crystal substrate as stress, and a change in the stress is detected by the detection electrode, thus detecting angular velocity applied to the angular velocity sensor.
      COPYRIGHT: (C)2009,JPO&INPIT
    • 要解决的问题:提供便于支撑结构的角速度传感器,提高频率温度特性,并精确地检测角速度。 解决方案:角速度传感器包括在旋转Y切割晶体基板的主表面上沿Y轴方向突出并沿X轴方向延伸的突起。 驱动电极和检测电极形成在突起附近的主表面上。 通过驱动电极在X轴方向上的厚度滑动振动在晶体基板上激发,以激发投影时的振动。 然后,通过科里奥利力沿着与Y'轴线周围的旋转方向垂直于突起处的振动的方向进行弯曲和移位。 突起的位移作为应力施加到晶体基板,并且通过检测电极检测应力的变化,从而检测施加到角速度传感器的角速度。 版权所有(C)2009,JPO&INPIT