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    • 91. 发明申请
    • III-Nitride Device Having an Enhanced Field Plate
    • 具有增强型场板的III型氮化物器件
    • US20140159116A1
    • 2014-06-12
    • US14085037
    • 2013-11-20
    • International Rectifier Corporation
    • Michael A. BriereJin Wook Chung
    • H01L29/778
    • H01L29/7786H01L29/2003H01L29/402
    • In an exemplary implementation, a semiconductor device includes a III-nitride heterojunction including a III-nitride barrier layer situated over a III-nitride channel layer to form a conduction channel including a two-dimensional electron gas. The semiconductor device further includes a gate electrode coupled to a field plate. The field plate includes a plurality of steps insulated from the conduction channel by a dielectric body and the III-nitride barrier layer. The dielectric body under each one of the plurality of steps contributes to a breakdown voltage that is at least twice a breakdown voltage of the semiconductor device at each corresponding step. The breakdown voltage can correspond to a breakdown voltage of the dielectric body and the III-nitride barrier layer.
    • 在示例性实施方案中,半导体器件包括III族氮化物异质结,其包括位于III族氮化物沟道层上方的III族氮化物势垒层,以形成包括二维电子气的导电通道。 半导体器件还包括耦合到场板的栅电极。 场板包括通过电介质体和III族氮化物阻挡层与导电沟道绝缘的多个台阶。 在多个步骤中的每一个步骤下的电介质体有助于在每个相应步骤处的半导体器件的击穿电压的至少两倍的击穿电压。 击穿电压可以对应于电介质体和III族氮化物阻挡层的击穿电压。
    • 93. 发明申请
    • Active Area Shaping of III-Nitride Devices Utilizing Multiple Dielectric Materials
    • 使用多种电介质材料的三氮化硅器件的主动区域整形
    • US20140070278A1
    • 2014-03-13
    • US14081798
    • 2013-11-15
    • International Rectifier Corporation
    • Michael A. Briere
    • H01L29/778
    • H01L29/778H01L21/28264H01L23/3192H01L29/2003H01L29/42376H01L29/518H01L29/66462H01L29/7786H01L2924/0002H01L2924/00
    • In an exemplary implementation, a III-nitride semiconductor device includes a III-nitride heterojunction including a first III-nitride body situated over a second III-nitride body to form a two-dimensional electron gas. The III-nitride semiconductor device further includes a dielectric body situated over the III-nitride heterojunction and including a first dielectric layer of a first dielectric material and a second dielectric layer of a second dielectric material different than the first dielectric material. A gate well of a first width is defined by the first dielectric layer, and is of a second width defined by the second dielectric layer, where the second width is greater than the first width. The III-nitride semiconductor device further includes a gate arrangement situated in the gate well and including a gate electrode integrated with a field plate.
    • 在示例性实施方案中,III族氮化物半导体器件包括III族氮化物异质结,其包括位于第二III族氮化物体上方的第一III族氮化物体,以形成二维电子气。 III族氮化物半导体器件还包括位于III族氮化物异质结上方的电介质体,并且包括第一电介质材料的第一电介质层和与第一电介质材料不同的第二电介质材料的第二电介质层。 第一宽度的栅极阱由第一介电层限定,并且具有由第二介电层限定的第二宽度,其中第二宽度大于第一宽度。 III族氮化物半导体器件还包括位于栅极阱中并包括与场板集成的栅电极的栅极布置。
    • 94. 发明申请
    • Integrated Composite Group III-V and Group IV Semiconductor Device
    • 集成复合组III-V和IV类半导体器件
    • US20140008663A1
    • 2014-01-09
    • US14019738
    • 2013-09-06
    • International Rectifier Corporation
    • Michael A. Briere
    • H01L29/205
    • According to one disclosed embodiment, a method for fabricating a monolithic integrated composite device comprises forming a group III-V semiconductor body over a group IV semiconductor substrate, forming a trench in the group III-V semiconductor body, and forming a group IV semiconductor body in the trench. The method also comprises fabricating at least one group IV semiconductor device in the group IV semiconductor body, and fabricating at least one group III-V semiconductor device in the group III-V semiconductor body. In one embodiment, the method further comprises planarizing an upper surface of the III-V semiconductor body and an upper surface of the group IV semiconductor body to render those respective upper surfaces substantially co-planar. In one embodiment, the method further comprises fabricating at least one passive device in a defective region of said group IV semiconductor body adjacent to a sidewall of the trench.
    • 根据一个公开的实施例,一种用于制造单片集成复合器件的方法包括在IV族半导体衬底上形成III-V族半导体体,在III-V族半导体体中形成沟槽,并形成IV族半导体体 在沟里。 该方法还包括在IV族半导体本体中制造至少一种IV族半导体器件,并且在III-V族半导体器件中制造至少一种III-V族III族半导体器件。 在一个实施例中,该方法还包括使III-V半导体体的上表面和IV族半导体本体的上表面平坦化,以使这些相应的上表面基本上共面。 在一个实施例中,该方法还包括在与沟槽的侧壁相邻的所述IV族半导体主体的缺陷区域中制造至少一个无源器件。
    • 95. 发明申请
    • Monolithic Group III-V and Group IV Device
    • 单体III-V族和IV族装置
    • US20130337626A1
    • 2013-12-19
    • US13969392
    • 2013-08-16
    • International Rectifier Corporation
    • Michael A. Briere
    • H01L21/761
    • According to one disclosed embodiment, a method for fabricating a monolithic integrated composite device comprises forming a group III-V semiconductor body over a group IV semiconductor substrate, forming a trench in the group III-V semiconductor body, and forming a group IV semiconductor body in the trench. The method also comprises fabricating at least one group IV semiconductor device in. the group IV semiconductor body, and fabricating at least one group III-V semiconductor device in the group III-V semiconductor body. In one embodiment, the method further comprises planarizing an upper surface of the III-V semiconductor body and an upper surface of the group IV semiconductor body to render those respective upper surfaces substantially co-planar. In one embodiment, the method further comprises fabricating at least one passive device in a defective region of said group IV semiconductor body adjacent to a side-wall of the trench.
    • 根据一个公开的实施例,一种用于制造单片集成复合器件的方法包括在IV族半导体衬底上形成III-V族半导体体,在III-V族半导体体中形成沟槽,并形成IV族半导体体 在沟里。 该方法还包括在IV族半导体体中制造至少一种IV族半导体器件,并且在III-V族半导体体中制造至少一种III-V族III族半导体器件。 在一个实施例中,该方法还包括使III-V半导体体的上表面和IV族半导体本体的上表面平坦化,以使这些相应的上表面基本上共面。 在一个实施例中,该方法还包括在邻近沟槽的侧壁的所述IV族半导体主体的缺陷区域中制造至少一个无源器件。