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    • 11. 发明申请
    • Systems and Methods for Integrated Multi-Layer Magnetic Films
    • 集成多层磁膜的系统和方法
    • US20150171157A1
    • 2015-06-18
    • US14571649
    • 2014-12-16
    • Ferric Inc.
    • Noah Andrew SturckenRyan Davies
    • H01L49/02H01L23/50
    • H01L28/10H01L21/32051H01L23/5223H01L23/5227H01L23/645H01L2924/0002H01L2924/00
    • Integrated multi-layer magnetic films for use in passive devices in microelectronic applications and methods of manufacture thereof. Soft ferromagnetic materials exhibiting high permeability and low coercivity are laminated together with insulating layers interposed. Electrical conductors coupled to interconnects are magnetically coupled to magnetic film layers to engender an inductor (self and mutual). Soft ferromagnetic materials are provided in an alternating array of parallel plate capacitors. Each alternating magnetic film is electrically coupled to either a primary or secondary electrical conductor interconnects and separated by an electrically insulating dielectric material. Alternatively, each alternating magnetic layer comprises an induced anisotropy material, which can also be combined with coiled conductor giving rise to a hybrid inductive/capacitive device. Also, soft ferromagnetic material are also selected and tuned to provide for FMR notch filtering.
    • 用于微电子应用中的无源器件的集成多层磁性膜及其制造方法。 表现出高磁导率和低矫顽力的软铁磁材料层压在绝缘层上。 耦合到互连的电导体磁耦合到磁膜层以产生电感器(自相互)。 柔性铁磁材料以平行板电容器的交替阵列提供。 每个交替磁性膜电耦合到主电导体互连件或次电导体互连件,并由电绝缘电介质材料隔开。 或者,每个交变磁性层包括感应各向异性材料,其也可以与产生混合电感/电容器件的线圈导体组合。 此外,软铁磁材料也被选择和调谐以提供FMR陷波滤波。