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11. 发明申请

US20170010219A1 METHOD FOR INSPECTING AN OBJECT WITH AN ARRAY OF BEAMS 有权
标题翻译：用于检查对象的方法用于组织框架
公开(公告)号：US20170010219A1
公开(公告)日：2017-01-12
申请号：US14797040
申请日：2015-07-10
申请人： APPLIED MATERIALS ISRAEL LTD.
发明人： Ido Almog , Ron Naftali
IPC分类号： G01N21/88 , G01N21/95
CPC分类号： G01N21/8806 , G01N21/9501 , G01N2201/0638
摘要： According to an embodiment of the invention there may be provided a system for inspecting an object, the system may include a traveling lens acousto-optic device that is configured to generate a sequence of traveling lenses that propagate through an active region of the traveling lens acousto-optic device; an illumination unit that that is configured to illuminate the sequence of traveling lenses to provide a sequence of input beams; a first beam splitter that is configured to split the sequence of input beams to an intermediate array of intermediate beams, the intermediate array comprises multiple sequences of intermediate beams, the sequences of intermediate beams are spaced apart from each other; a masking unit that is configured to mask first beams of the intermediate array and unmask output beams of the intermediate array in an alternating manner; multiple detectors; and an objective lens that is configured to receive the output beams, direct the output beams towards multiple areas of the object, receive collected beams from the multiple areas of the object, and direct the collected beams towards the multiple detectors; and wherein each detector is associated with an area of the multiple areas.
摘要翻译：根据本发明的实施例，可以提供一种用于检查物体的系统，该系统可以包括行进透镜声光装置，其被配置为产生传播通过移动透镜声音的有源区域的行进透镜序列光设备照明单元，被配置为照亮所述行进透镜的顺序以提供输入光束的序列; 第一分束器，其被配置为将输入光束序列分割成中间光束的中间阵列，所述中间阵列包括多个中间光束序列，所述中间光束的序列彼此间隔开; 掩模单元，被配置为屏蔽所述中间阵列的第一光束，并且以交替方式解除所述中间阵列的输出光束的屏蔽; 多个探测器; 以及物镜，被配置为接收输出光束，将输出光束导向物体的多个区域，从物体的多个区域接收收集的光束，并将收集的光束引向多个检测器; 并且其中每个检测器与所述多个区域的区域相关联。

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