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    • 12. 发明公开
    • Optical Displacement Sensor
    • US20240060768A1
    • 2024-02-22
    • US18267314
    • 2021-12-14
    • SensiBel AS
    • Håkon SagbergMatthieu Lacolle
    • G01B11/14H04R23/00H04R29/00
    • G01B11/14H04R23/008H04R29/004
    • An optical displacement sensor comprises a reflective surface and one or more diffraction gratings which, together with the reflective surface, each define a respective interferometric arrangement. The reflective surface is moveable relative to the diffraction grating(s) or vice versa. Light from a light source propagates via the interferometric arrangement(s) to produce an interference pattern at a respective set of photo detectors. Each interference pattern depends on the separation between the reflective surface and the respective grating. A collimating optical arrangement at least partially collimates the light between the light source and the diffraction grating(s). For the or each interferometric arrangement, when the reflective surface or the diffraction grating is in a zero-displacement position, the optical path length L of the light propagating between the diffraction grating and the reflective surface satisfies the relationship:





      L
      =



      T
      z


      n

      2


      ,




      to within 20% of






      T
      z

      2

      ,




      where n is an integer; where Tz is the Talbot length, defined by:






      T
      z

      =

      λ

      1
      -


      1
      -


      λ
      2


      p
      2







      ,




      where λ is the wavelength of the light, and where p is the grating period of the respective diffraction grating.