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21. 发明申请

US20080316885A1 METHOD OF RECORDING ERASE PATTERN INFORMATION ON AN OPTICAL RECORDING MEDIUM, ERASING INFORMATION ON THE OPTICAL RECORDING MEIDUM BASED ON THE ERASE PATTERN INFORMATION, AND OPTICAL RECORDING MEDIUM THEREFOR 有权
标题翻译：记录光记录介质上的擦除图案信息的方法，基于消除图案信息擦除光记录单元的信息，以及光记录介质
公开(公告)号：US20080316885A1
公开(公告)日：2008-12-25
申请号：US12140332
申请日：2008-06-17
申请人： Kyung-geun Lee , Yong-jin Ahn , In-sik Park , Seong-sue Kim , Du-seop Yoon
发明人： Kyung-geun Lee , Yong-jin Ahn , In-sik Park , Seong-sue Kim , Du-seop Yoon
IPC分类号： G11B7/0045
CPC分类号： G11B7/0062 , G11B7/00736
摘要： An optical recording medium is provided for allowing data to be recorded on, erased from, and reproduced from, and storing information about power levels of an erase pulse. The recorded erase pattern information may include information about power levels of first and last pulses of an erase pattern for erasing data. The first and last pulses of the erase pattern can be differently set depending on the differing kind of recording layer or layers of a disk or differing kinds of disks and recorded in a reproducible only area or rewritable area of the optical recording medium. Thus, by presetting the appropriate erase power levels, the time required for selecting an optimal erase power for the optical recording medium can be considerably reduced.
摘要翻译：提供了一种光学记录介质，用于允许数据从擦除脉冲的功率电平被记录，擦除，再生和存储信息。记录的擦除模式信息可以包括关于用于擦除数据的擦除模式的第一和最后脉冲的功率电平的信息。擦除图案的第一个和最后一个脉冲可以根据盘的不同种类的记录层或不同种类的盘被不同地设置，并被记录在光学记录介质的仅可重现区域或可重写区域中。因此，通过预设适当的擦除功率电平，可以大大减少为光学记录介质选择最佳擦除功率所需的时间。

22. 发明授权

US07369470B2 Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium therefor 有权
公开(公告)号：US07369470B2
公开(公告)日：2008-05-06
申请号：US10320737
申请日：2002-12-17
申请人： Kyung-geun Lee , Yong-jin Ahn , In-sik Park , Seong-sue Kim , Du-seop Yoon
发明人： Kyung-geun Lee , Yong-jin Ahn , In-sik Park , Seong-sue Kim , Du-seop Yoon
IPC分类号： G11B7/00
CPC分类号： G11B7/0062 , G11B7/00736 , G11B20/10 , G11B20/10009
摘要： An optical recording medium allowing data to be recorded on, erased from, and reproduced from, and storing information about power levels of an erase pulse. The recorded erase pattern information may include information about power levels of first and last pulses of an erase pattern for erasing data. The first and last pulses of the erase pattern can be differently set depending on the differing kind of recording layer or layers of a disk or differing kinds of disks and recorded in a reproducible only area or rewritable area of the optical recording medium. Thus, by presetting the appropriate erase power levels, the time required for selecting an optimal erase power for the optical recording medium can be considerably reduced.

23. 发明申请

US20050073930A1 Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium therefor 有权
标题翻译：在光记录介质上记录擦除图案信息的方法，基于擦除图案信息擦除光记录介质上的信息，以及光记录介质
公开(公告)号：US20050073930A1
公开(公告)日：2005-04-07
申请号：US10992700
申请日：2004-11-22
申请人： Kyung-geun Lee , Yong-jin Ahn , In-sik Park , Seong-sue Kim , Du-seop Yoon
发明人： Kyung-geun Lee , Yong-jin Ahn , In-sik Park , Seong-sue Kim , Du-seop Yoon
IPC分类号： G11B7/006 , G11B7/007 , G11B7/125 , G11B7/24 , G11B11/00
CPC分类号： G11B7/0062 , G11B7/00736 , G11B20/10 , G11B20/10009
摘要： An optical recording medium allowing data to be recorded on, erased from, and reproduced from, and storing information about power levels of an erase pulse. The recorded erase pattern information may include information about power levels of first and last pulses of an erase pattern for erasing data. The first and last pulses of the erase pattern can be differently set depending on the differing kind of recording layer or layers of a disk or differing kinds of disks and recorded in a reproducible only area or rewritable area of the optical recording medium. Thus, by presetting the appropriate erase power levels, the time required for selecting an optimal erase power for the optical recording medium can be considerably reduced.
摘要翻译：一种允许将数据记录在擦除脉冲的功率电平上并从其再生并存储关于擦除脉冲的功率电平的信息的光学记录介质。记录的擦除模式信息可以包括关于用于擦除数据的擦除模式的第一和最后脉冲的功率电平的信息。擦除图案的第一个和最后一个脉冲可以根据盘的不同种类的记录层或不同种类的盘被不同地设置，并被记录在光学记录介质的仅可重现区域或可重写区域中。因此，通过预设适当的擦除功率电平，可以大大减少为光学记录介质选择最佳擦除功率所需的时间。

24. 发明授权

US07447129B2 Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium therefor. 有权
标题翻译：在光学记录介质上记录擦除图案信息的方法，基于擦除图案信息擦除光记录介质上的信息，以及光记录介质。
公开(公告)号：US07447129B2
公开(公告)日：2008-11-04
申请号：US11414328
申请日：2006-05-01
申请人： Kyung-geun Lee , Yong-jin Ahn , In-sik Park , Seong-sue Kim , Du-seop Yoon
发明人： Kyung-geun Lee , Yong-jin Ahn , In-sik Park , Seong-sue Kim , Du-seop Yoon
IPC分类号： G11B7/00
CPC分类号： G11B7/0062 , G11B7/00736 , G11B20/10 , G11B20/10009
摘要： An optical recording medium allowing data to be recorded on, erased from, and reproduced from, and storing information about power levels of an erase pulse. The recorded erase pattern information may include information about power levels of first and last pulses of an erase pattern for erasing data. The first and last pulses of the erase pattern can be differently set depending on the differing kind of recording layer or layers of a disk or differing kinds of disks and recorded in a reproducible only area or rewritable area of the optical recording medium. Thus, by presetting the appropriate erase power levels, the time required for selecting an optimal erase power for the optical recording medium can be considerably reduced.
摘要翻译：一种允许将数据记录在擦除脉冲的功率电平上并从其再生并存储关于擦除脉冲的功率电平的信息的光学记录介质。记录的擦除模式信息可以包括关于用于擦除数据的擦除模式的第一和最后脉冲的功率电平的信息。擦除图案的第一个和最后一个脉冲可以根据盘的不同种类的记录层或不同种类的盘被不同地设置，并被记录在光学记录介质的仅可重现区域或可重写区域中。因此，通过预设适当的擦除功率电平，可以大大减少为光学记录介质选择最佳擦除功率所需的时间。

25. 发明申请

US20060193227A1 Method of recording erase pattern information on an optical recording medium, erasing information on the optical recording medium based on the erase pattern information, and optical recording medium therefor 有权
公开(公告)号：US20060193227A1
公开(公告)日：2006-08-31
申请号：US11414328
申请日：2006-05-01
申请人： Kyung-geun Lee , Yong-Jin Ahn , In-sik Park , Seong-sue Kim , Du-seop Yoon
发明人： Kyung-geun Lee , Yong-Jin Ahn , In-sik Park , Seong-sue Kim , Du-seop Yoon
IPC分类号： G11B20/10
CPC分类号： G11B7/0062 , G11B7/00736 , G11B20/10 , G11B20/10009
摘要： An optical recording medium allowing data to be recorded on, erased from, and reproduced from, and storing information about power levels of an erase pulse. The recorded erase pattern information may include information about power levels of first and last pulses of an erase pattern for erasing data. The first and last pulses of the erase pattern can be differently set depending on the differing kind of recording layer or layers of a disk or differing kinds of disks and recorded in a reproducible only area or rewritable area of the optical recording medium. Thus, by presetting the appropriate erase power levels, the time required for selecting an optimal erase power for the optical recording medium can be considerably reduced.

26. 发明授权

US07095703B2 Apparatus and method for recording mark 失效
公开(公告)号：US07095703B2
公开(公告)日：2006-08-22
申请号：US10374715
申请日：2003-02-27
申请人： Seong-sue Kim , Du-seop Yoon , In-sik Park , Dong-ho Shin
发明人： Seong-sue Kim , Du-seop Yoon , In-sik Park , Dong-ho Shin
IPC分类号： G11B7/00
CPC分类号： G11B7/0948 , G11B7/00454 , G11B7/095 , G11B7/0956 , G11B7/126 , G11B7/1392
摘要： A recording apparatus to record a mark on a recording medium includes an aberration detecting part and an optical power controller. The aberration detecting part detects an aberration signal corresponding to the amount of an aberration contained in a light beam radiated onto a recording surface of the recording medium by using an optical pickup system which includes a light source and an objective lens. The light source emits a light beam having a power to record the mark on the recording medium. The objective lens condenses the light beam to focus the light beam as an optical spot on the recording surface of the recording medium. The optical power controller controls the power output from the light source according to the detected aberration signal, so as to have the light source output an optical power to record the mark, in which a deformation due to the aberration is compensated for, on the recording medium. Accordingly, even though the aberration occurs, a proper mark in which the deformation due to the aberration is compensated for can be recorded by increasing the recording power of the light source in proportion to the amount of the aberration to compensate for the aberration. As a result, the mark showing a good signal characteristic can be recorded on the recording medium without an additional aberration compensating device.

27. 发明授权

US09645484B2 Reflective masks for use in extreme ultraviolet lithography apparatus and methods of manufacturing the same 有权
公开(公告)号：US09645484B2
公开(公告)日：2017-05-09
申请号：US14827440
申请日：2015-08-17
申请人： Seong-sue Kim , Hwan-seok Seo , In-sung Kim , Tae-geun Kim
发明人： Seong-sue Kim , Hwan-seok Seo , In-sung Kim , Tae-geun Kim
IPC分类号： G03F1/24 , G03F1/22
CPC分类号： G03F1/24
摘要： Reflective masks, and methods of manufacturing the same, include a reflective multi-layer on a mask substrate, a plurality of support patterns spaced apart from one another in the main trench. The plurality of support patterns are in a main trench of the reflective multi-layer. The plurality of support patterns correspond to areas of the reflective mask not transferred onto an exposure target substrate. The support patterns partition the main trench to form a plurality of auxiliary trenches. The reflective mask further includes a light absorption pattern including a plurality of auxiliary light absorption patterns in the auxiliary trenches.

28. 发明申请

US20130056642A1 METHOD AND APPARATUS FOR MEASURING AERIAL IMAGE OF EUV MASK 审中-公开
标题翻译：用于测量EUV掩蔽的空气影像的方法和装置
公开(公告)号：US20130056642A1
公开(公告)日：2013-03-07
申请号：US13542936
申请日：2012-07-06
申请人： Dong-gun LEE , Seong-sue Kim
发明人： Dong-gun LEE , Seong-sue Kim
IPC分类号： G01J1/04
CPC分类号： G03F1/82 , B82Y10/00 , B82Y40/00 , G01J1/4228 , G01J1/4257 , G03F1/22
摘要： An aerial image measuring apparatus includes an extreme ultra-violet (EUV) light generation unit configured to generate EUV light, a moving unit configured to mount an EUV mask and to move the EUV mask in x and y axis directions, a primary reduction optics configured to primarily reduce a divergence of the EUV light generated by the EUV light generation unit, a secondary reduction optics configured to secondarily reduce the divergence of the primarily reduced EUV light, and a detection unit configured to sense energy information from the secondarily reduced EUV light reflected from the plurality of regions on the EUV mask, the secondarily reduced EUV light being incident on and reflected from a plurality of regions on the EUV mask.
摘要翻译：一种空间图像测量装置，包括：被配置为产生EUV光的极紫外（EUV）光产生单元，被配置为安装EUV掩模并在x轴和y轴方向上移动EUV掩模的移动单元，以主要减少由EUV光发生单元产生的EUV光的发散，配置成二次减少主要减少的EUV光的发散的次级减光光学元件和被配置为从二次降低的EUV光中检测能量信息的检测单元在EUV掩模上的多个区域中，二次还原的EUV光入射到EUV掩模上的多个区域并从其反射。

29. 发明申请

US20110240863A1 METHODS AND APPARATUSES FOR MEASURING PHASE ROUGHNESS IN AN EXTREME ULTRAVIOLET MASK 审中-公开
标题翻译：用于测量超极紫外线掩膜相位粗糙度的方法和装置
公开(公告)号：US20110240863A1
公开(公告)日：2011-10-06
申请号：US12984856
申请日：2011-01-05
申请人： Dong-gun Lee , Seong-sue Kim
发明人： Dong-gun Lee , Seong-sue Kim
IPC分类号： G01N21/17
CPC分类号： G01N21/4788 , G01B11/303 , G01N2021/479 , G03F1/24 , G03F1/84
摘要： Example embodiments are directed to a method and an apparatus for measuring phase roughness in an extreme ultraviolet (EUV) mask. In example embodiments, a speckle generated by the phase roughness in the EUV mask is detected by irradiating an EUV beam on the EUV mask. The phase roughness in the EUV mask is calculated and measured using the speckle.
摘要翻译：示例性实施例涉及用于测量极紫外（EUV）掩模中的相位粗糙度的方法和装置。在示例实施例中，通过在EUV掩模上照射EUV波束来检测由EUV掩模中的相位粗糙度产生的散斑。使用斑点计算和测量EUV掩模中的相位粗糙度。

30. 发明授权

US06395366B1 Phase change optical disc 失效
标题翻译：相变光盘
公开(公告)号：US06395366B1
公开(公告)日：2002-05-28
申请号：US09717383
申请日：2000-11-22
申请人： Seong-sue Kim
发明人： Seong-sue Kim
IPC分类号： B32B302
CPC分类号： G11B7/2578 , G11B7/2534 , G11B7/2542 , G11B7/2585 , G11B2007/2431 , G11B2007/24314 , G11B2007/24316 , G11B2007/25706 , G11B2007/2571 , G11B2007/25715 , G11B2007/25716 , Y10T428/21
摘要： A phase change optical disc having a substrate and a first dielectric layer formed on the substrate. A recording layer is formed on the first dielectric layer and is convertible into one of an amorphous state and a crystal state according to the power of an incident beam. A second dielectric layer is formed on the recording layer. A reflective layer is formed on the second dielectric layer. The first dielectric layer is formed of a material having a refractive index of 2.7 or more with respect to the incident beam.
摘要翻译：一种相变光盘，具有形成于基板上的基板和第一介电层。记录层形成在第一电介质层上，并根据入射光束的功率可转换成非晶状态和晶体状态之一。在记录层上形成第二介质层。在第二电介质层上形成反射层。第一电介质层由相对于入射光束的折射率为2.7以上的材料形成。

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