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    • 24. 发明授权
    • Method to reduce adhesion between a conformable region and a pattern of a mold
    • 降低适形区域和模具图案之间粘合的方法
    • US07157036B2
    • 2007-01-02
    • US10463396
    • 2003-06-17
    • Byung Jin ChoiFrank Y. XuNicholas A. StaceyVan Xuan Hong TruskettMichael P. C. Watts
    • Byung Jin ChoiFrank Y. XuNicholas A. StaceyVan Xuan Hong TruskettMichael P. C. Watts
    • B29C59/00B29C33/60
    • B82Y10/00B82Y40/00G03F7/0002
    • The present invention provides a method to reduce adhesion between a conformable region on a substrate and a pattern of a mold, which selectively comes into contact with the conformable region. The method features forming a conformable material on the substrate and contacting the conformable material with the surface. A conditioned layer is formed from the conformable material. The conditioned layer has first and second sub-portions, with the first sub-portion being solidified and the second sub-portion having a first affinity for the surface and a second affinity for the first sub-portion. The first affinity is greater than the second affinity. In this fashion, upon separation of the mold from the conditioned layer, a subset of the second sub-portion maintains contact with the mold, thereby reducing the probability that a pattern formed in the conditioned layer becomes compromised. These and other embodiments are described herein.
    • 本发明提供一种降低基材上的适形区域和选择性地与适形区域接触的模具图案之间的粘附性的方法。 该方法的特征在于在基底上形成适形材料并使适形材料与表面接触。 由适形材料形成调理层。 调理层具有第一和第二子部分,其中第一子部分被固化,第二子部分对于表面具有第一亲和力,对第一子部分具有第二亲和力。 第一亲和力大于第二亲和力。 以这种方式,在模具与调理层分离时,第二子部分的子集保持与模具的接触,从而降低在调理层中形成的图案变得损害的可能性。 这些和其他实施例在本文中描述。